JPS583297Y2 - 防塵形乾燥装置 - Google Patents

防塵形乾燥装置

Info

Publication number
JPS583297Y2
JPS583297Y2 JP1979051619U JP5161979U JPS583297Y2 JP S583297 Y2 JPS583297 Y2 JP S583297Y2 JP 1979051619 U JP1979051619 U JP 1979051619U JP 5161979 U JP5161979 U JP 5161979U JP S583297 Y2 JPS583297 Y2 JP S583297Y2
Authority
JP
Japan
Prior art keywords
air
dust
opening
closing door
dried
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1979051619U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55152045U (enExample
Inventor
吉沢威
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1979051619U priority Critical patent/JPS583297Y2/ja
Publication of JPS55152045U publication Critical patent/JPS55152045U/ja
Application granted granted Critical
Publication of JPS583297Y2 publication Critical patent/JPS583297Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP1979051619U 1979-04-18 1979-04-18 防塵形乾燥装置 Expired JPS583297Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979051619U JPS583297Y2 (ja) 1979-04-18 1979-04-18 防塵形乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979051619U JPS583297Y2 (ja) 1979-04-18 1979-04-18 防塵形乾燥装置

Publications (2)

Publication Number Publication Date
JPS55152045U JPS55152045U (enExample) 1980-11-01
JPS583297Y2 true JPS583297Y2 (ja) 1983-01-20

Family

ID=28941302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979051619U Expired JPS583297Y2 (ja) 1979-04-18 1979-04-18 防塵形乾燥装置

Country Status (1)

Country Link
JP (1) JPS583297Y2 (enExample)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50138076U (enExample) * 1974-04-27 1975-11-13
JPS5422377Y2 (enExample) * 1974-04-30 1979-08-04
JPS5394766A (en) * 1977-01-31 1978-08-19 Toshiba Corp Rotation-system processor of semiconductor wafer

Also Published As

Publication number Publication date
JPS55152045U (enExample) 1980-11-01

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