JPS583297Y2 - Dust-proof drying equipment - Google Patents

Description

[Detailed description of the invention] The present invention relates to a new dust-proof drying device, in particular, a dust-proof drying device in which one blower unit is attached directly to the opening/closing door of the dryer to prevent the seat valve from entering. be.

Conventionally, as a method for drying an article to be dried, such as a mask or wafer, after a wet process, a rotary dryer installed in a clean bench or the like is often used.

FIG. 1 is a diagram for explaining how such a conventional drying device is used. In the figure, 1 is a rotary bench that forms a clean atmosphere, 11 is a clean bench support, 2 is a rotary dryer, Reference numeral 21 designates an opening/closing door through which semiconductor wafers and the like to be dried are taken in and out of the rotary dryer 2.

Further, 22 is a clean air inlet hole drilled in the opening/closing door 21, 23 is an exhaust port, and 3 is the clean bench support stand 11.
31 is a blower; 32 is a duct through which clean air blown from the blower 31 flows;
33 is an air filter that further purifies the blown clean air, and 34 is the clean air that has passed through the air filter 33.

However, in the conventional drying apparatus having such a configuration, an opening/closing door 2 is installed in the path of the clean air 34 blown from the blower unit 3 of the clean bench 1 through the air filter 33.
Since there is an opening/closing space 1, there is a concern that the seat valve floating in this space will mix with the clean air 341 and be fed into the dryer 2, contaminating the stored articles to be dried. there were.

This invention was made to solve the above problems,
This paper proposes a configuration in which clean air is blown directly into the drying device through an air filter, thereby attempting to improve the dustproof effect.

That is, the present invention provides a rotary dryer which is equipped with an opening/closing door having an air inlet at the upper part, and in which the stored material to be dried is rotated and dried by centrifugal separation. To provide a dust-proof type dryer characterized in that a blowing unit consisting of an air filter attached thereto and a lid surrounding the filter and having a blower attached to its inner surface is integrally attached thereto.

The dust-proof drying device according to the present invention will be explained in detail below with reference to the drawings.

Fig. 2 is a side view showing an embodiment of the present invention, and is a side view showing an embodiment of the present invention.
The same reference numerals are used for the same parts.

Reference numeral 4 denotes a blower unit having an air filter 33 integrally attached to the door 21 of the rotary dryer, and 5 an air cylinder that opens and closes the door 21 to which the blower unit 4 is attached.

As shown in the figure, in the air blowing unit 4, an air filter 33 that covers the clean air inlet 22 of the opening/closing door 21 is connected to the opening/closing door 21.
The air filter 33 is attached to the outer surface of the opening/closing door 21, and a blower 31 is attached to the inner surface of the door 21. .

In the drying apparatus 1 having such a configuration, first, before setting the wet-processed articles to be dried,
The air cylinder 51 opens the opening/closing door 21 together with the attached blower unit 4, and the articles to be dried are set at a predetermined position in the rotary dryer 2.

Then, the air cylinder 51 closes the opening/closing door 21 together with the air blower unit 4 attached to it again, and after that, the air blower unit 4 is operated and rotates while feeding purified air into the clean air inlet 22). Rotate the body to dry the contained items.

In this way, the clean air 34 is directly fed into the 101-way dryer 2, eliminating the risk of contaminating the articles to be dried.

Note that in FIG. 2, the blower unit 4 is the blower 31.
and an air filter 33 (for example, an absolute type filter that removes 9997% of dust of 0.3μ or more).

As explained above, the dust-proofing and drying device according to the present invention; according to this, purified air is directly fed into the rotary dryer 2 and is constantly kept in a clean atmosphere (where drying is performed by centrifugation 1). As a result, contamination of articles can be prevented, product quality can be improved, and the size of the apparatus can be expected to be reduced, making it extremely effective for drying semiconductor wafers, masks, etc.

[Brief explanation of the drawing]

FIG. 1 is a side view of a conventional drying device, and FIG. 2 is a side view showing an embodiment of the dustproof/drying device according to the present invention. 1: Clean bench, 2: Rotary dryer, 3, 4: Air blower unit, 5: Air cylinder, 11: Clean bench support stand, 21: Door, 22: Clean air inlet, 23: Exhaust ('', 31: Blower, 32: Duct, 33: Air filter, 34: Clean air.

Claims (1)

[Scope of utility model registration request] A rotary dryer 1 is provided with one opening/closing door having an air inlet at the upper part, and the stored material to be dried is rotated and dried by centrifugal separation E. One opening/closing door is installed on the outer surface of the rotary dryer 1 to cover the air inlet. 1. A dust-proof type dryer characterized in that a blower unit is integrally attached thereto, the blower unit consisting of an air filter and a lid that surrounds the filter and has a blower attached to the inner surface.