JPH069500Y2 - Centrifugal dehydrator - Google Patents
Centrifugal dehydratorInfo
- Publication number
- JPH069500Y2 JPH069500Y2 JP1987165539U JP16553987U JPH069500Y2 JP H069500 Y2 JPH069500 Y2 JP H069500Y2 JP 1987165539 U JP1987165539 U JP 1987165539U JP 16553987 U JP16553987 U JP 16553987U JP H069500 Y2 JPH069500 Y2 JP H069500Y2
- Authority
- JP
- Japan
- Prior art keywords
- ring
- dust
- centrifugal dehydrator
- intake port
- preventing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Drying Of Solid Materials (AREA)
- Centrifugal Separators (AREA)
Description
【考案の詳細な説明】 〔産業上の利用分野〕 本考案は半導体製造におけるウェット処理後の乾燥に用
いる装置に関し、特に遠心脱水機に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to an apparatus used for drying after wet processing in semiconductor manufacturing, and more particularly to a centrifugal dehydrator.
従来この種の遠心脱水機は、第３図および第４図に示す
ように、清浄な空気を取入れる吸気口２には、メッシュ
７とメッシュ保持リング６とを備えた構造となってい
た。Conventionally, this type of centrifugal dehydrator has a structure in which a mesh 7 and a mesh holding ring 6 are provided in an intake port 2 for taking in clean air, as shown in FIGS. 3 and 4.
上述した遠心脱水機では被処理物３を乾燥させるためロ
ーターを高速回転したときに吸気口２から蓋１上の塵埃
をグローブ４内に吸込みやすい構造となっているので、
被処理物３に塵埃による悪影響を及ぼすという欠点があ
る。Since the centrifugal dehydrator described above has a structure in which dust on the lid 1 is easily sucked into the globe 4 from the intake port 2 when the rotor is rotated at a high speed to dry the object 3 to be processed,
There is a drawback in that the object 3 is adversely affected by dust.
本考案によれば、ウェット処理後の非処理物を高速回転
させることにより乾燥させる遠心脱水機において、吸気
口周辺の塵埃吸込み防止用のＯリングと塵埃巻込み防止
用の防塵リングを設け、防塵リングには、吸気口周辺の
塵埃の巻込みを防止するフランジを有する遠心脱水機が
得られる。According to the present invention, in a centrifugal dehydrator for drying non-processed material after wet processing by rotating it at a high speed, an O-ring for preventing dust suction around a suction port and a dust-proof ring for preventing dust entrapment are provided, It is possible to obtain a centrifugal dehydrator having a flange in the ring that prevents dust from being trapped around the intake port.
〔実施例〕 次の実施例を用いて本考案をより詳細に説明する。[Embodiment] The present invention will be described in more detail with reference to the following embodiment.
第１図は本考案のもととなる遠心脱水機の実施例を示す
ものである。メッシュ保持リング６に蓋面と垂直に例え
ば５０mm程度の防塵リング１０を設け、又、蓋本体１と
防塵リング１０との間に隙間をシールする為のＯリング
９を設けておく。クレードル５を高速回転させて吸気口
２よりグローブ４内へクリーンエアーを取入れる時、防
塵リング１０によって蓋上の塵埃８の巻込みを防止し、
又、Ｏリング９によって隙間からの塵埃８吸込みを防止
している。FIG. 1 shows an embodiment of a centrifugal dehydrator which is the basis of the present invention. The mesh holding ring 6 is provided with a dustproof ring 10 of, for example, about 50 mm perpendicular to the lid surface, and an O-ring 9 is provided between the lid body 1 and the dustproof ring 10 for sealing a gap. When the cradle 5 is rotated at high speed to take in clean air from the intake port 2 into the glove 4, the dustproof ring 10 prevents the dust 8 from being caught on the lid,
Further, the O-ring 9 prevents the dust 8 from being sucked through the gap.
第２図は本考案の実施例を示すものである。第１図の一
実施例においてメッシュ保持シング６にフランジ１１を
設け、吸気口２周辺の塵埃の巻込みを更に防止してい
る。FIG. 2 shows an embodiment of the present invention. In the embodiment of FIG. 1, a flange 11 is provided on the mesh holding sing 6 to further prevent the dust around the intake port 2 from being trapped.
〔考案の効果〕 以上説明したように本考案は被処理物を高速回転させ、
吸気口よりクリーンなエアーを取入れ被処理を乾燥させ
る遠心脱水機において、吸気口のメッシュ保持リングを
立上げ更にフランジを設け、又、蓋本体のメッシュ保持
リングの間にＯリングを設けることにより、蓋上の塵埃
の巻込み及び吸込みを防止できる効果がある。[Effects of the Invention] As described above, the present invention rotates the workpiece at high speed,
In a centrifugal dehydrator that takes in clean air from the intake port and dries the object to be processed, by raising the mesh holding ring at the intake port and further providing a flange, and by providing an O ring between the mesh holding rings of the lid body, This has the effect of preventing dust from being entrained and sucked on the lid.
第１図は本考案のもととなる実施例である。第２図は本
考案の一実施例である。 第３図は従来の遠心脱水機の概略断面図であり、第４図
は吸気口の詳細断面図である。 １……蓋本体、２……吸気口、３……被処理物、４……
グローブ、５……クレードル、６……メッシュ保持リン
グ、７……メッシュ、８……塵埃、９……Ｏリング、１
０，１１……防塵リング、１２……駆動用モータ。FIG. 1 shows an embodiment which is the basis of the present invention. FIG. 2 shows an embodiment of the present invention. FIG. 3 is a schematic sectional view of a conventional centrifugal dehydrator, and FIG. 4 is a detailed sectional view of an intake port. 1 ... Lid body, 2 ... Intake port, 3 ... Object to be processed, 4 ...
Glove, 5 ... Cradle, 6 ... Mesh retaining ring, 7 ... Mesh, 8 ... Dust, 9 ... O-ring, 1
0,11 ... Dust-proof ring, 12 ... Drive motor.
Claims (1)
ることにより乾燥させる遠心脱水機において、吸気口周
辺の塵埃吸込み防止用のＯリングと塵埃巻込み防止用の
防塵リングを設け、前記防塵リングには、吸気口周辺の
塵埃の巻込みを防止するフランジを有することを特徴と
する遠心脱水機。1. A centrifugal dehydrator for drying a non-processed product after wet processing by rotating it at a high speed, wherein an O-ring for preventing dust suction around a suction port and a dust-proof ring for preventing dust entrapment are provided. The centrifugal dehydrator, wherein the ring has a flange for preventing the inclusion of dust around the intake port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987165539U JPH069500Y2 (en) | 1987-10-28 | 1987-10-28 | Centrifugal dehydrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987165539U JPH069500Y2 (en) | 1987-10-28 | 1987-10-28 | Centrifugal dehydrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0170330U JPH0170330U (en) | 1989-05-10 |
| JPH069500Y2 true JPH069500Y2 (en) | 1994-03-09 |
Family
ID=31452116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987165539U Expired - Lifetime JPH069500Y2 (en) | 1987-10-28 | 1987-10-28 | Centrifugal dehydrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069500Y2 (en) |
-
1987
- 1987-10-28 JP JP1987165539U patent/JPH069500Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0170330U (en) | 1989-05-10 |
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