JPS62242131A - Rotary bearing mechanism with mist discharge port - Google Patents

Abstract

PURPOSE:To prevent an oil mist from being splashed in a clean room by keeping a cover and a housing for covering an exhaust guide ring which is fitted and fixed on a rotary shaft airtight and providing an air suction port in the housing and an air exhaust port in the cover. CONSTITUTION:An exhaust guide ring 7 of an angular section form is fitted and fixed on a rotary shaft 1, an a gap is formed with said ring 7 and the surface of the rotary shaft 1. Further, a cover 8 in which an exhaust port 9 is provided in the radial direction is airtightly mounted on the side of a housing 3 by means of an O-ring 10-1, and a suction port 11 is provided in the housing 3. An oil mist is washed and exhausted from an exhaust port 9 hereupon by flowing air which is sucked from the suction port 11 around the rotary shaft 1 with the help of rotation of the rotary shaft 1 when an air pump is connected to the exhaust port 9 to be driven. Accordingly, an oil mist is prevented from being scattered in the clean room.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] This invention relates to a rotary bearing mechanism with a dust discharge hole for discharging dust such as oil mist generated in the rotary bearing mechanism to the outside.

[Conventional technology] As the integration density of semiconductor products such as ICs increases, dust control in manufacturing plants becomes increasingly strict, and it is important to eliminate dust generation from devices and equipment used in clean rooms. . In particular, rotating equipment generates oil mist due to bearing lubricant, which requires countermeasures.

FIG. 2 shows a cross section of a rotary bearing mechanism conventionally used in clean rooms. A rotary shaft 1 is supported by a bearing 2 and rotates as shown by the arrow.

These outer peripheries are covered with a housing 3, and a stopper 4 is used to prevent movement of the bearing 2. The side surface of the housing is covered with a lid 5. Here, the housing 3 and the lid 5 are mainly for protection of the mechanism and safety for the workers, and dust such as oil mist generated by the bearing 2 is removed from the lid 5.
It flows out and scatters to the outside through the gap 6 of the rotating shaft 1 along the path shown by arrow A. In order to maintain the cleanliness of a clean room, it is necessary to prevent such scattering of dust.

[Object of the Invention] An object of the present invention is to provide a rotary bearing mechanism with a dust discharge hole that prevents dust from being scattered by conventional rotary bearing mechanisms.

[Means for Solving the Problems] The concept of a rotary bearing mechanism with a dust discharge hole according to the present invention will be explained with reference to FIG. 1(a).

An exhaust guide ring 7 having a protrusion with a chevron-shaped cross section is fitted onto the rotating shaft 1 and fixed at a position close to the bearing 2. The outer periphery of the rotary bearing mechanism is covered with an airtight housing 3, and the housing 3 is placed at an appropriate position opposite to the exhaust guide ring 7 with respect to the bearing.
An air suction hole 11 is provided in the. In addition, a lid 8 is attached to cover the circumference of the exhaust guide ring 7, and an air exhaust hole 9 connected to the air pump is provided in the M8 in a radial direction from the center of the rotation shaft 1. Grooves are provided to form air gaps 6 between each of the surfaces of the grooves 1 and 1.

[Function] As described above, in the present invention, the oil mist generated in the bearing 2 passes through the gap 6 together with the air sucked in from the suction hole 11, and is discharged from the discharge pipe 1 through the discharge hole 9.
2 and is discharged by an air pump. At this time, the air in the vicinity of the bearing 2 circulates around the shaft surface due to the rotation of the rotary shaft 1, washes out oil mist thoroughly, and carries it to the discharge hole 9. Note that, as shown by arrow C, external air is sucked in through the gap between the rotating shaft 1 and the lid 8, but is exhausted together with the above air. Since the portion other than the air passage is made airtight by the housing 3 and the lid 8, oil mist will not be scattered around.

[Embodiment] FIG. 1(a) shows a structural cross-section of one embodiment of a rotary bearing mechanism with a dust discharge hole according to the present invention. , the housing 3 is provided with a suction hole 11 . However, bearing 2
The location is one that allows air to pass through. On the right side of the bearing 2, a discharge guide ring 7 having a protrusion having a chevron-shaped cross section is fitted and fixed onto the rotary shaft 1, and a gap 6 is formed between the protrusion and the surface of the rotary shaft 1. The lid 8 is airtightly attached to the side surface of the end of the housing 3 using an O-ring 10-1. This lid 8 is provided with a discharge hole 9 in the radial direction, and a discharge pipe 12 is connected thereto and led to an air pump (not shown).

As described above, the operation of the above structure is such that the air sucked through the suction hole 11 circulates around the shaft due to the rotation of the rotary shaft 1, thoroughly washes out the oil mist, and is sucked out from the exhaust hole 9 by the air pump. be discharged. Here, since the air circulates around the rotation axis l, it is sufficient to provide one suction hole 11 and one discharge hole 9. In this embodiment, the lid 8 has two halves 8-1 and 8-2 bolted together with an O-ring 10-2 in between.

FIG. 1(b) shows another embodiment of the rotary bearing mechanism with a dust discharge hole according to the present invention, which is made by cutting M8 as one body, and the structure of the other parts,
The action is the same as in Figure (a).

Generally, bearings are often used on both sides of the rotating shaft.
In that case, the mechanism shown in FIG. 1(a) or (b) may be applied to both bearings, and the suction hole may be provided on one side of the common housing. It goes without saying that the mechanism according to the present invention can be applied to other configurations as well.

[Effects of the Invention] As is clear from the explanation in 1- below, in the rotary bearing mechanism with a dust discharge hole according to the present invention, the entire mechanism is kept airtight by the housing and the lid, and the suction hole is provided in the upper housing, and the suction hole is provided in the lid. Equipped with a discharge hole, the air sucked in effectively washes out the oil mist generated by the bearings, which is then discharged by the air pump, which eliminates the damage caused by the oil mist that was previously generated scattering into the clean room. There is a big one.

[Brief explanation of drawings]

FIG. 1(a) is an axial cross-sectional view of one embodiment of a rotary bearing mechanism with a dust discharge hole according to the present invention, and FIG.
) is an axial cross-sectional view of another embodiment of the rotary bearing mechanism with a dust discharge hole according to the present invention, and FIG. 2 is an axial cross-sectional view of a conventional rotary bearing mechanism. 1... Rotating shaft, 2... Bearing, 3...
Housing, 4... Market fitting, 5.8... Lid, 6... Gap, 7... Discharge hole ring, 9... Discharge hole, IO... 0 ring, 11
... Suction hole, 12... Discharge pipe.

Claims (1)

[Claims] In a rotating bearing mechanism consisting of a rotating shaft and a bearing, an exhaust guide ring having a protrusion with a chevron-shaped cross section is fitted onto the rotating shaft and fixed at a position close to the bearing, and the outer periphery of the rotating bearing mechanism is airtight. It consists of a housing that covers and a lid that covers the circumference of the exhaust guide ring, an air suction hole is provided in the housing on the side opposite to the exhaust guide ring with respect to the bearing, and an air suction hole is provided in the housing in a radial direction from the center, and an air suction hole is provided in the housing on the side opposite to the exhaust guide ring with respect to the bearing. A rotary bearing mechanism with a dust discharge hole, characterized in that a connected air discharge hole is provided, and grooves are provided for forming air gaps between the lid, the protrusion, and the surface of the rotating shaft, respectively.