JPS63243644A - Air shower room - Google Patents
Air shower roomInfo
- Publication number
- JPS63243644A JPS63243644A JP7406187A JP7406187A JPS63243644A JP S63243644 A JPS63243644 A JP S63243644A JP 7406187 A JP7406187 A JP 7406187A JP 7406187 A JP7406187 A JP 7406187A JP S63243644 A JPS63243644 A JP S63243644A
- Authority
- JP
- Japan
- Prior art keywords
- air shower
- room
- shower room
- space
- floor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ventilation (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はクリーンルーム等に付随するエアシヤワに係り
、特に多数の作業者が同時に利用するのに好適なエアシ
ヤワに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an air shower attached to a clean room or the like, and particularly to an air shower suitable for simultaneous use by a large number of workers.
従来のエアシヤワ室は１人の作業者がシャツ室内に入る
と一端シャワ室のドアを閉めてから約３０秒〜１分程度
の間清浄空気を噴出後、別のドアから作業者がシャツ室
外へ出るといった構造になっていた。In conventional air shower rooms, when a worker enters the shirt room, the door to the shower room is closed, clean air is blown out for about 30 seconds to 1 minute, and then the worker exits the shirt room through another door. It was structured so that it would come out.
なお、この種従来技術としては、発明協会発行の「発明
Ｊ （１９８６年１１月号）第６４頁〜第７０頁に記
載されたものがある。This type of prior art is described in "Invention J (November 1986 issue), pages 64 to 70," published by Japan Institute of Invention and Innovation.
上記従来技術は一時に多数の作業者がエアシヤワ室に集
中した場合の配慮がなされておらず、例えば出退勤時な
どに大きな混雑が発生するという問題があった。The above-mentioned conventional technology does not take into account the situation where a large number of workers are concentrated in the air shower room at the same time, and there is a problem in that large congestion occurs, for example, when workers come to and leave work.
本発明の目的は多数の作業者がエアシヤワ室を ・同
時に利用できる様にし、この混雑を緩和することにある
。The purpose of the present invention is to allow a large number of workers to use the air shower room at the same time, thereby alleviating this congestion.
上記目的は、エアシヤワ室を円筒状構造とし、エアシヤ
ワ室の床を円形とし、この床に多くのしきり板を設け、
床及びしきり板を回転させる事により達成される。The above purpose is to make the air shower room a cylindrical structure, make the floor of the air shower room circular, and install many partition plates on this floor.
This is achieved by rotating the floor and partition plates.
エアシヤワ室の床及び放射状のしきり板は多数の個室を
構成するので、多くの作業者が同時にエアシヤワ室に入
る事が可能になり、さらにこの個室を回転させる事によ
り作業者が連続的にエアシヤワ室を利用する事が可能と
なる。The floor of the air shower room and radial partition plates form a large number of individual rooms, allowing many workers to enter the air shower room at the same time.Furthermore, by rotating these rooms, workers can continuously access the air shower room. It becomes possible to use.
以下、本発明の一実施例として本発明をクリーンルーム
のエアシヤワ室に適用した例について第１図〜第３図に
より説明する。第１図はその縦断面図であり、図中Ａ側
がクリーンルーム外側、Ｂ側が同内側である。シャフト
１は軸受５を介して天球２に保持されており、ギア７を
介してモーター６の駆動力を受は回転可能となっている
。また。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention in which the present invention is applied to an air shower room of a clean room will be described below with reference to FIGS. 1 to 3. FIG. 1 is a longitudinal sectional view of the clean room, and side A in the figure is the outside of the clean room, and side B is the inside of the clean room. The shaft 1 is held by the celestial sphere 2 via a bearing 5, and is rotatable by receiving the driving force of a motor 6 via a gear 7. Also.
シャフト１にはグレーチング８及びしきり板１４が取り
つけられており、これらは加圧室１２の内壁と供に回転
する複数の個室を構成する。一方、加圧室１２の内壁に
は多数の噴出孔１３が設けられており、ここから、コン
プレッサ９により昇圧されフィルタ１０により塵埃を除
去された清浄空気が噴出す゛る。噴出孔１３から噴出し
た空気は前記個室内の塵埃とともにグレーチング８を通
り床３ｉ？ＩＴ−ヒにＷＱ ＩＶＩされた排気ダクト１
６により集められコンプレッサ９へと導かれる。以上の
構成とすることにより回転する複数個のエアシヤワ室が
構成されろ。第２図は第１図のＸ−Ｘ線断面図である。A grating 8 and a partition plate 14 are attached to the shaft 1, and these constitute a plurality of private chambers that rotate together with the inner wall of the pressurizing chamber 12. On the other hand, a large number of blow-off holes 13 are provided on the inner wall of the pressurizing chamber 12, from which clean air whose pressure has been increased by the compressor 9 and from which dust has been removed by the filter 10 is jetted out. The air ejected from the ejection hole 13 passes through the grating 8 together with the dust in the private room and passes through the floor 3i? IT-hi WQ IVI exhaust duct 1
6 and guided to a compressor 9. With the above configuration, a plurality of rotating air shower chambers are constructed. FIG. 2 is a sectional view taken along the line X--X in FIG. 1.
作業者は遮閉板１５と加圧室１２との間の間ＶＸＣから
前記個室内に入り、しきり板１４と供に１１９矢印方向
へと徐々に回転していき１反対側の間ＶＸＤの位置まで
来たときクリーンルーム内へ出る。この間作業者は噴出
孔１３から噴出される清浄空気により塵埃が除去される
。１人の作業者が本エアージャワ室入室後、次の個室が
間隙Ｃの位置に到着した直後ならいつでも次の作業者が
エアシヤワ室に入室することができるので、多数の作業
者の連続利用が可能となる。また、作業者がクリーンル
ーム内から退室する場合は、間隙りからジャワ室内に入
り間隙Ｃからジャワ室外へ出ればよい。第３図は第１図
のＹ−ＹＩｖＡ断面図であるが、間隙りと間隙Ｃの間（
劣弧部分）は加圧室１２に取り付けられた遮閉板１５に
より上、下面及び円筒面が覆われているのでクリーンル
ーム外の汚染空気がクリーンルーム内に侵入するのを防
止できる。The worker enters the private room from VXC between the shielding plate 15 and the pressurizing chamber 12, gradually rotates along with the partition plate 14 in the direction of arrow 119, and reaches the position VXD between 1 and the opposite side. When you reach that point, go out into the clean room. During this time, dust is removed from the worker by clean air blown out from the blowout hole 13. After one worker enters the air shower room, the next worker can enter the air shower room at any time immediately after the next individual room arrives at the gap C, making it possible for a large number of workers to use the room continuously. It becomes possible. Furthermore, when a worker leaves the clean room, he or she only has to enter the Java room through the gap and exit out of the Java room through the gap C. FIG. 3 is a Y-YIvA sectional view of FIG. 1, and between the gap and the gap C (
The upper, lower and cylindrical surfaces of the lower arc portion) are covered by a shielding plate 15 attached to the pressurizing chamber 12, thereby preventing contaminated air from outside the clean room from entering the clean room.
本発明によれば、多数の作業者が連続的にエアシヤワを
利用できるという効果がある。According to the present invention, there is an effect that a large number of workers can use the air shower continuously.
第１図は本発明の一実施例の縦断面図、第２図は第１図
のＸ−Ｘ線断面図、第３図は第１図のＹ−Ｙ線断面図で
ある。
１・・シャフト、２・・・天球、３・・・床、４・・・
壁、５・・・軸受、６・・・モーター、７・・・ギア、
８・・・グレーチング、９・・・コンプレッサ、１０・
・・フィルタ、１１・・・供給パイプ、１２・・・加圧
室、１３・・・噴出孔、１４・・・しきり板、１５・・
・遮閉板、１６・・・排気ダクト。1 is a longitudinal cross-sectional view of an embodiment of the present invention, FIG. 2 is a cross-sectional view taken along the line X-X in FIG. 1, and FIG. 3 is a cross-sectional view taken along the Y-Y line in FIG. 1...shaft, 2...celestial sphere, 3...floor, 4...
Wall, 5...Bearing, 6...Motor, 7...Gear,
8... Grating, 9... Compressor, 10.
...filter, 11...supply pipe, 12...pressurizing chamber, 13...spout hole, 14...stop plate, 15...
- Shielding plate, 16...exhaust duct.
Claims (1)
の空間、前記空間に清浄空気を噴出する吹出し孔、前記
空間を外界と遮断する壁を有するエアシヤワ室において
、前記空間を円筒状構造とし、前記空間を構成する床を
円形状とし前記床に放射状のしきり板を設け、前記床及
びしきり板を回転させる駆動系を設けたことを特徴とす
るエアシヤワ室。1. In an air shower room that has a space for removing dust adhering to workers' clothes, etc., a blow-off hole that blows clean air into the space, and a wall that isolates the space from the outside world, the space is shaped into a cylindrical shape. An air shower room having a structure, characterized in that a floor constituting the space is circular, a radial partition plate is provided on the floor, and a drive system for rotating the floor and the partition plate is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7406187A JPS63243644A (en) | 1987-03-30 | 1987-03-30 | Air shower room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7406187A JPS63243644A (en) | 1987-03-30 | 1987-03-30 | Air shower room |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63243644A true JPS63243644A (en) | 1988-10-11 |
Family
ID=13536303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7406187A Pending JPS63243644A (en) | 1987-03-30 | 1987-03-30 | Air shower room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63243644A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5278787A (en) * | 1991-12-13 | 1994-01-11 | Nippon Steel Corporation | Semiconductor device and method of manufacturing the same |
| JP2008064403A (en) * | 2006-09-08 | 2008-03-21 | Hitachi Plant Technologies Ltd | Air shower equipment |
| KR101411484B1 (en) * | 2013-05-03 | 2014-06-24 | 삼성중공업 주식회사 | Clean room system |
| JP2020165617A (en) * | 2019-03-29 | 2020-10-08 | 株式会社熊谷組 | Air shower device |
-
1987
- 1987-03-30 JP JP7406187A patent/JPS63243644A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5278787A (en) * | 1991-12-13 | 1994-01-11 | Nippon Steel Corporation | Semiconductor device and method of manufacturing the same |
| JP2008064403A (en) * | 2006-09-08 | 2008-03-21 | Hitachi Plant Technologies Ltd | Air shower equipment |
| KR101411484B1 (en) * | 2013-05-03 | 2014-06-24 | 삼성중공업 주식회사 | Clean room system |
| JP2020165617A (en) * | 2019-03-29 | 2020-10-08 | 株式会社熊谷組 | Air shower device |
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