JPH0942465A - Air spindle - Google Patents
Air spindleInfo
- Publication number
- JPH0942465A JPH0942465A JP21655595A JP21655595A JPH0942465A JP H0942465 A JPH0942465 A JP H0942465A JP 21655595 A JP21655595 A JP 21655595A JP 21655595 A JP21655595 A JP 21655595A JP H0942465 A JPH0942465 A JP H0942465A
- Authority
- JP
- Japan
- Prior art keywords
- spindle
- rotating
- air
- male screw
- screw groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000000356 contaminant Substances 0.000 claims abstract description 4
- 230000002093 peripheral effect Effects 0.000 abstract description 2
- 238000009434 installation Methods 0.000 abstract 3
- 238000007654 immersion Methods 0.000 abstract 2
- 102000018361 Contactin Human genes 0.000 abstract 1
- 108060003955 Contactin Proteins 0.000 abstract 1
- 238000011109 contamination Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002173 cutting fluid Substances 0.000 description 1
Landscapes
- Turning (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、精密切削装置等に
使用されるエアスピンドルに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air spindle used in precision cutting equipment and the like.
【０００２】[0002]
【従来の技術】従来、半導体ウェーハ等を切削する精密
切削装置にはエアスピンドルが設けられ、このエアスピ
ンドルの先端部に回転ブレードを装着し、この回転ブレ
ードを高速回転することにより半導体ウェーハ等を切削
する。このエアスピンドルは、高速回転するスピンドル
とそのスピンドルをエアベアリングによってエアで支持
するスピンドルハウジングとの間に非接触を保持するた
めの隙間が設けられているため、半導体ウェーハ等を切
削する時に切削水、コンタミ等が侵入してスピンドルや
スピンドルハウジングの内部を損傷することがある。こ
のような損傷を防止するために、スピンドルハウジング
の先端部にシール部材を取り付けたり或は切削水、コン
タミ等の侵入を防止するエアシール領域を設けたエアス
ピンドルが知られている（例えば、特開昭６１−２４８
１７号公報、実開平５−５４８２１号公報）。2. Description of the Related Art Conventionally, a precision cutting device for cutting a semiconductor wafer or the like is provided with an air spindle. A rotary blade is attached to the tip of the air spindle, and the rotary blade is rotated at a high speed to remove the semiconductor wafer or the like. To cut. This air spindle has a gap between the spindle that rotates at high speed and the spindle housing that supports the spindle with air by air bearings. , Contamination may invade the interior of the spindle or spindle housing. In order to prevent such damage, an air spindle is known in which a seal member is attached to the tip of the spindle housing, or an air seal area is provided to prevent intrusion of cutting water, contamination, etc. 61-248
No. 17, Japanese Utility Model Publication No. 5-54821).
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、前記従
来例によると、シール部材を必要としたり或はエアシー
ル領域を形成するためにエアスピンドルの内部構造が複
雑になって高価になる等の問題がある。そこで、本発明
はシール部材を必要とせず且つ簡単な構成で切削水、コ
ンタミ等の侵入を防止出来るようにした、エアスピンド
ルを提供することを課題とする。However, according to the above-mentioned conventional example, there is a problem that an internal structure of the air spindle becomes complicated and expensive because a sealing member is required or an air seal region is formed. . Therefore, it is an object of the present invention to provide an air spindle that does not require a seal member and can prevent the intrusion of cutting water, contamination, etc. with a simple structure.
【０００４】[0004]
【課題を解決するための手段】前記課題を技術的に解決
するための手段として、本発明は、スピンドルハウジン
グに形成されたエアベアリングによってエアで支持され
る回転スピンドルを含むエアスピンドルにおいて、回転
スピンドルとスピンドルハウジングとで形成される間隙
から切削水、コンタミ等が侵入しないように前記回転ス
ピンドルの外周に回転方向とは逆方向に雄ねじ溝を形成
し、この雄ねじ溝と前記スピンドルハウジングとでアル
キメデスのポンプを構成するようにした、エアスピンド
ルを要旨とするものである。As a means for technically solving the above problems, the present invention provides an air spindle including a rotary spindle supported by air by an air bearing formed in a spindle housing. A male screw groove is formed on the outer periphery of the rotary spindle in the direction opposite to the rotation direction so that cutting water, contaminants, etc. do not enter from a gap formed between the male screw groove and the spindle housing. The gist of the present invention is an air spindle that constitutes a pump.
【０００５】[0005]
【発明の実施の形態】以下、本発明の実施の形態を添付
図面に基づいて詳説する。図１は精密切削装置の切削手
段を示すもので、スピンドルハウジング１の内部に回転
スピンドル２がエアベアリングによって非接触に支持さ
れ、この回転スピンドル２の先端部には回転ブレード５
が装着される。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 shows a cutting means of a precision cutting device. A rotary spindle 2 is supported inside a spindle housing 1 by an air bearing in a non-contact manner, and a rotary blade 5 is attached to the tip of the rotary spindle 2.
Is attached.
【０００６】回転スピンドル２の先端部には図２に示す
ように取付部２ａが形成され、この取付部２ａにフラン
ジ３、４で挟持された環状の回転ブレード５を嵌合し、
更に締付用ナット６を取付部２ａのねじに螺着すること
で回転ブレード５を固定してある。As shown in FIG. 2, a mounting portion 2a is formed at the tip of the rotary spindle 2, and an annular rotary blade 5 sandwiched by flanges 3 and 4 is fitted into the mounting portion 2a.
Further, the rotating blade 5 is fixed by screwing the tightening nut 6 onto the screw of the mounting portion 2a.
【０００７】前記回転スピンドル２は図３に示すよう
に、スピンドルハウジング１の先端部の内壁１ａに対面
する外周部に回転スピンドルの回転方向とは逆方向の雄
ねじ溝２ｂ、例えばスピンドルが右回転ならば左ねじ溝
を形成してある。As shown in FIG. 3, the rotary spindle 2 has a male screw groove 2b in the outer peripheral portion facing the inner wall 1a of the tip portion of the spindle housing 1 in a direction opposite to the rotational direction of the rotary spindle, for example, if the spindle rotates clockwise. For example, a left-hand thread groove is formed.
【０００８】上記のように構成されたエアスピンドル
は、図１に示すようにチャックテーブルＴ上に吸引保持
されたウェーハＷ等を前記回転ブレード５で切削する
が、この際回転ブレード５の両側に配設された切削液供
給ノズルＮから切削水７が噴射される。The air spindle constructed as described above cuts the wafer W sucked and held on the chuck table T by the rotary blade 5 as shown in FIG. Cutting water 7 is jetted from the provided cutting fluid supply nozzle N.
【０００９】切削時に前記回転スピンドル２は高速回転
し、雄ねじ溝２ｂとスピンドルハウジング１の先端部内
壁１ａとで所謂アルキメデスのポンプが形成され、スピ
ンドルハウジング１の先端隙間から外部にエア８が噴出
される。従って、切削時に切削水、コンタミ等がスピン
ドルハウジング１の先端隙間から内部に侵入するのを未
然に防止することが出来る。At the time of cutting, the rotary spindle 2 rotates at a high speed, a so-called Archimedean pump is formed by the male screw groove 2b and the inner wall 1a of the tip portion of the spindle housing 1, and air 8 is ejected from the tip clearance of the spindle housing 1 to the outside. It Therefore, it is possible to prevent cutting water, contaminants, and the like from entering the inside of the spindle housing 1 through the clearance between the tips of the spindle housing 1 during cutting.
【００１０】[0010]
【発明の効果】以上説明したように、本発明によれば、
精密切削装置において、回転スピンドルにその回転方向
と逆方向の雄ねじ溝を形成し、スピンドルハウジングの
先端部内壁との間隙にアルキメデスのポンプを形成した
ので、切削時にその間隙から外部にエアを噴出させるこ
とが出来、これによりシール部材を必要とせず且つ簡単
な構成により切削水、コンタミ等の侵入を未然に防止す
る効果を奏する。As described above, according to the present invention,
In the precision cutting device, a male screw groove is formed in the rotating spindle in the opposite direction to the rotating direction, and an Archimedean pump is formed in the gap between the inner wall of the spindle housing and the tip of the spindle housing. As a result, it is possible to prevent cutting water, contamination, etc. from entering in advance with a simple structure that does not require a sealing member.
【図１】 本発明の実施の形態を示す要部の側面図であ
る。FIG. 1 is a side view of a main part showing an embodiment of the present invention.
【図２】 同、回転ブレード装着部の分解斜視図であ
る。FIG. 2 is an exploded perspective view of a rotary blade mounting portion of the same.
【図３】 回転スピンドルとスピンドルハウジングとに
より形成されるアルキメデスのポンプ説明図である。FIG. 3 is an explanatory view of an Archimedes pump formed by a rotary spindle and a spindle housing.
１…スピンドルハウジング １ａ…内壁 ２…回転スピンドル ２ａ…取付部 ２ｂ…雄ねじ溝 ３、４…フランジ ５…回転ブレード ６…締付用ナット ７…切削水 ８…エア 1 ... Spindle housing 1a ... Inner wall 2 ... Rotating spindle 2a ... Mounting part 2b ... Male screw groove 3, 4 ... Flange 5 ... Rotating blade 6 ... Tightening nut 7 ... Cutting water 8 ... Air
Claims (1)
ベアリングによってエアで支持される回転スピンドルを
含むエアスピンドルにおいて、回転スピンドルとスピン
ドルハウジングとで形成される間隙から切削水、コンタ
ミ等が侵入しないように前記回転スピンドルの外周に回
転方向とは逆方向に雄ねじ溝を形成し、この雄ねじ溝と
前記スピンドルハウジングとでアルキメデスのポンプを
構成するようにした、エアスピンドル。1. An air spindle including a rotary spindle supported by air by an air bearing formed in the spindle housing, wherein the cutting water, contaminants and the like are prevented from entering through a gap formed between the rotary spindle and the spindle housing. An air spindle in which an external thread groove is formed on the outer periphery of the rotary spindle in a direction opposite to the rotational direction, and the external thread groove and the spindle housing form an Archimedes pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21655595A JPH0942465A (en) | 1995-08-03 | 1995-08-03 | Air spindle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21655595A JPH0942465A (en) | 1995-08-03 | 1995-08-03 | Air spindle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0942465A true JPH0942465A (en) | 1997-02-14 |
Family
ID=16690279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21655595A Pending JPH0942465A (en) | 1995-08-03 | 1995-08-03 | Air spindle |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0942465A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009085359A (en) * | 2007-10-01 | 2009-04-23 | Canon Inc | Non-contact seal apparatus |
| KR100947113B1 (en) * | 2008-01-21 | 2010-04-01 | (주) 테크노라이즈 | Air spindle |
| JP2010131716A (en) * | 2008-12-05 | 2010-06-17 | Komatsu Ntc Ltd | Main spindle device |
| JP2020066090A (en) * | 2018-10-24 | 2020-04-30 | 株式会社北川鉄工所 | Method for manufacturing non-contact seal structure, and rotary machine |
-
1995
- 1995-08-03 JP JP21655595A patent/JPH0942465A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009085359A (en) * | 2007-10-01 | 2009-04-23 | Canon Inc | Non-contact seal apparatus |
| KR100947113B1 (en) * | 2008-01-21 | 2010-04-01 | (주) 테크노라이즈 | Air spindle |
| JP2010131716A (en) * | 2008-12-05 | 2010-06-17 | Komatsu Ntc Ltd | Main spindle device |
| JP2020066090A (en) * | 2018-10-24 | 2020-04-30 | 株式会社北川鉄工所 | Method for manufacturing non-contact seal structure, and rotary machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A02 | Decision of refusal |
Effective date: 20040427 Free format text: JAPANESE INTERMEDIATE CODE: A02 |