JPS55152045U - - Google Patents
Info
- Publication number
- JPS55152045U JPS55152045U JP5161979U JP5161979U JPS55152045U JP S55152045 U JPS55152045 U JP S55152045U JP 5161979 U JP5161979 U JP 5161979U JP 5161979 U JP5161979 U JP 5161979U JP S55152045 U JPS55152045 U JP S55152045U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979051619U JPS583297Y2 (ja) | 1979-04-18 | 1979-04-18 | 防塵形乾燥装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979051619U JPS583297Y2 (ja) | 1979-04-18 | 1979-04-18 | 防塵形乾燥装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55152045U true JPS55152045U (enExample) | 1980-11-01 |
| JPS583297Y2 JPS583297Y2 (ja) | 1983-01-20 |
Family
ID=28941302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979051619U Expired JPS583297Y2 (ja) | 1979-04-18 | 1979-04-18 | 防塵形乾燥装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS583297Y2 (enExample) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50138076U (enExample) * | 1974-04-27 | 1975-11-13 | ||
| JPS50138676U (enExample) * | 1974-04-30 | 1975-11-14 | ||
| JPS5394766A (en) * | 1977-01-31 | 1978-08-19 | Toshiba Corp | Rotation-system processor of semiconductor wafer |
-
1979
- 1979-04-18 JP JP1979051619U patent/JPS583297Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50138076U (enExample) * | 1974-04-27 | 1975-11-13 | ||
| JPS50138676U (enExample) * | 1974-04-30 | 1975-11-14 | ||
| JPS5394766A (en) * | 1977-01-31 | 1978-08-19 | Toshiba Corp | Rotation-system processor of semiconductor wafer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS583297Y2 (ja) | 1983-01-20 |