JPS5831855B2 - 圧力測定装置の製造方法 - Google Patents

圧力測定装置の製造方法

Info

Publication number
JPS5831855B2
JPS5831855B2 JP7335877A JP7335877A JPS5831855B2 JP S5831855 B2 JPS5831855 B2 JP S5831855B2 JP 7335877 A JP7335877 A JP 7335877A JP 7335877 A JP7335877 A JP 7335877A JP S5831855 B2 JPS5831855 B2 JP S5831855B2
Authority
JP
Japan
Prior art keywords
housings
insulator
pressure
cylindrical
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7335877A
Other languages
English (en)
Japanese (ja)
Other versions
JPS548572A (en
Inventor
毅 安原
満 玉井
忠徳 湯原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP7335877A priority Critical patent/JPS5831855B2/ja
Priority to DE19782827725 priority patent/DE2827725A1/de
Publication of JPS548572A publication Critical patent/JPS548572A/ja
Publication of JPS5831855B2 publication Critical patent/JPS5831855B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
JP7335877A 1977-06-22 1977-06-22 圧力測定装置の製造方法 Expired JPS5831855B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP7335877A JPS5831855B2 (ja) 1977-06-22 1977-06-22 圧力測定装置の製造方法
DE19782827725 DE2827725A1 (de) 1977-06-22 1978-06-22 Druckmessgeraet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7335877A JPS5831855B2 (ja) 1977-06-22 1977-06-22 圧力測定装置の製造方法

Publications (2)

Publication Number Publication Date
JPS548572A JPS548572A (en) 1979-01-22
JPS5831855B2 true JPS5831855B2 (ja) 1983-07-08

Family

ID=13515857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7335877A Expired JPS5831855B2 (ja) 1977-06-22 1977-06-22 圧力測定装置の製造方法

Country Status (2)

Country Link
JP (1) JPS5831855B2 (de)
DE (1) DE2827725A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS606638U (ja) * 1983-06-24 1985-01-18 トヨタ車体株式会社 車両用座席

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4370890A (en) * 1980-10-06 1983-02-01 Rosemount Inc. Capacitive pressure transducer with isolated sensing diaphragm
US4358814A (en) * 1980-10-27 1982-11-09 Setra Systems, Inc. Capacitive pressure sensor
DE3523104A1 (de) * 1985-06-28 1987-01-22 Leybold Heraeus Gmbh & Co Kg Anordnung mit einer messelektrode, der in festen abstaenden eine erste und eine zweite felderzeugende elektrode zugeordnet sind
US4875368A (en) * 1987-09-08 1989-10-24 Panex Corporation Pressure sensor system
DE4206675C2 (de) * 1992-02-28 1995-04-27 Siemens Ag Verfahren zum Herstellen von Druckdifferenz-Sensoren
US5911162A (en) * 1997-06-20 1999-06-08 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support
CN102346084B (zh) * 2010-07-29 2014-05-14 福建上润精密仪器有限公司 差动电容膜盒的悬浮结构
US11041773B2 (en) * 2019-03-28 2021-06-22 Rosemount Inc. Sensor body cell of a pressure sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS606638U (ja) * 1983-06-24 1985-01-18 トヨタ車体株式会社 車両用座席

Also Published As

Publication number Publication date
JPS548572A (en) 1979-01-22
DE2827725A1 (de) 1979-01-11

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