JPS5830161A - Ｍｉｓ型半導体装置の製造方法 - Google Patents

Ｍｉｓ型半導体装置の製造方法

Info

Publication number
JPS5830161A
JPS5830161A JP56128452A JP12845281A JPS5830161A JP S5830161 A JPS5830161 A JP S5830161A JP 56128452 A JP56128452 A JP 56128452A JP 12845281 A JP12845281 A JP 12845281A JP S5830161 A JPS5830161 A JP S5830161A
Authority
JP
Japan
Prior art keywords
layer
manufacturing
silicon
film
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56128452A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0547980B2 (enrdf_load_stackoverflow
Inventor
Yoshitaka Sasaki
芳高 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56128452A priority Critical patent/JPS5830161A/ja
Publication of JPS5830161A publication Critical patent/JPS5830161A/ja
Publication of JPH0547980B2 publication Critical patent/JPH0547980B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
JP56128452A 1981-08-17 1981-08-17 Ｍｉｓ型半導体装置の製造方法 Granted JPS5830161A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56128452A JPS5830161A (ja) 1981-08-17 1981-08-17 Ｍｉｓ型半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56128452A JPS5830161A (ja) 1981-08-17 1981-08-17 Ｍｉｓ型半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5830161A true JPS5830161A (ja) 1983-02-22
JPH0547980B2 JPH0547980B2 (enrdf_load_stackoverflow) 1993-07-20

Family

ID=14985053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56128452A Granted JPS5830161A (ja) 1981-08-17 1981-08-17 Ｍｉｓ型半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5830161A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59145572A (ja) * 1983-02-09 1984-08-21 Matsushita Electronics Corp 半導体装置およびその製造方法
JPH01114501A (ja) * 1987-10-27 1989-05-08 Sumitomo Rubber Ind Ltd 安全タイヤ
JPH0376126A (ja) * 1989-08-18 1991-04-02 Oki Electric Ind Co Ltd 半導体装置の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5444482A (en) * 1977-09-14 1979-04-07 Matsushita Electric Ind Co Ltd Mos type semiconductor device and its manufacture
JPS57107070A (en) * 1980-12-17 1982-07-03 Ibm Method of producing high speed and high density mos dynamic ram integrated circuit structure with lightly doped-drain

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5444482A (en) * 1977-09-14 1979-04-07 Matsushita Electric Ind Co Ltd Mos type semiconductor device and its manufacture
JPS57107070A (en) * 1980-12-17 1982-07-03 Ibm Method of producing high speed and high density mos dynamic ram integrated circuit structure with lightly doped-drain

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59145572A (ja) * 1983-02-09 1984-08-21 Matsushita Electronics Corp 半導体装置およびその製造方法
JPH01114501A (ja) * 1987-10-27 1989-05-08 Sumitomo Rubber Ind Ltd 安全タイヤ
JPH0376126A (ja) * 1989-08-18 1991-04-02 Oki Electric Ind Co Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0547980B2 (enrdf_load_stackoverflow) 1993-07-20

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