JPS5826168B2 - 導電性電極パタ−ンを形成する方法 - Google Patents

導電性電極パタ−ンを形成する方法

Info

Publication number
JPS5826168B2
JPS5826168B2 JP47089674A JP8967472A JPS5826168B2 JP S5826168 B2 JPS5826168 B2 JP S5826168B2 JP 47089674 A JP47089674 A JP 47089674A JP 8967472 A JP8967472 A JP 8967472A JP S5826168 B2 JPS5826168 B2 JP S5826168B2
Authority
JP
Japan
Prior art keywords
platinum
layer
gold
photoresist
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47089674A
Other languages
English (en)
Japanese (ja)
Other versions
JPS4857577A (enExample
Inventor
ラス ニユーブイー ケネス
ロバート ターナー デニス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of JPS4857577A publication Critical patent/JPS4857577A/ja
Publication of JPS5826168B2 publication Critical patent/JPS5826168B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H10P14/6324—
    • H10P14/47—
    • H10P95/00—
    • H10W20/40—
    • H10W74/47—
    • H10P14/6939—

Landscapes

  • Electroplating Methods And Accessories (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Chemically Coating (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP47089674A 1971-09-10 1972-09-08 導電性電極パタ−ンを形成する方法 Expired JPS5826168B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US17928771A 1971-09-10 1971-09-10

Publications (2)

Publication Number Publication Date
JPS4857577A JPS4857577A (enExample) 1973-08-13
JPS5826168B2 true JPS5826168B2 (ja) 1983-06-01

Family

ID=22655944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47089674A Expired JPS5826168B2 (ja) 1971-09-10 1972-09-08 導電性電極パタ−ンを形成する方法

Country Status (11)

Country Link
US (1) US3700569A (enExample)
JP (1) JPS5826168B2 (enExample)
BE (1) BE788468A (enExample)
CA (1) CA954471A (enExample)
CH (1) CH571580A5 (enExample)
DE (1) DE2243682C2 (enExample)
FR (1) FR2152795B1 (enExample)
GB (1) GB1404033A (enExample)
IT (1) IT962298B (enExample)
NL (1) NL7212030A (enExample)
SE (1) SE372657B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3873428A (en) * 1974-02-19 1975-03-25 Bell Telephone Labor Inc Preferential gold electroplating
DE3446789A1 (de) * 1984-12-21 1986-07-03 SEMIKRON Gesellschaft für Gleichrichterbau u. Elektronik mbH, 8500 Nürnberg Verfahren zum herstellen von halbleiterbauelementen
DE3840226A1 (de) * 1988-11-29 1990-05-31 Siemens Ag Verfahren zur herstellung von selbstjustierten metallisierungen fuer fet
KR102109949B1 (ko) * 2018-12-14 2020-05-11 전남대학교산학협력단 염화물과 펄스 전원을 이용한 티타늄 임플란트 재료의 표면 처리 방법 및 그로부터 표면 처리된 티타늄 임플란트

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1600285A (enExample) * 1968-03-28 1970-07-20
DE1764148A1 (de) * 1968-04-10 1971-05-19 Itt Ind Gmbh Deutsche Spannungsabhaengiger Kondensator,insbesondere fuer Festkoerperschaltungen
GB1232126A (enExample) * 1968-12-23 1971-05-19

Also Published As

Publication number Publication date
FR2152795B1 (enExample) 1977-04-01
FR2152795A1 (enExample) 1973-04-27
CA954471A (en) 1974-09-10
CH571580A5 (enExample) 1976-01-15
JPS4857577A (enExample) 1973-08-13
DE2243682A1 (de) 1973-03-15
SE372657B (enExample) 1974-12-23
DE2243682C2 (de) 1983-08-04
NL7212030A (enExample) 1973-03-13
GB1404033A (en) 1975-08-28
BE788468A (fr) 1973-01-02
US3700569A (en) 1972-10-24
IT962298B (it) 1973-12-20

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