JPS5823584B2 - ブツタイケツカンカンソクホウ - Google Patents

ブツタイケツカンカンソクホウ

Info

Publication number
JPS5823584B2
JPS5823584B2 JP49028795A JP2879574A JPS5823584B2 JP S5823584 B2 JPS5823584 B2 JP S5823584B2 JP 49028795 A JP49028795 A JP 49028795A JP 2879574 A JP2879574 A JP 2879574A JP S5823584 B2 JPS5823584 B2 JP S5823584B2
Authority
JP
Japan
Prior art keywords
defect
defects
observed
observation
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP49028795A
Other languages
English (en)
Japanese (ja)
Other versions
JPS50122981A (tr
Inventor
稲垣雄史
池田弘之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP49028795A priority Critical patent/JPS5823584B2/ja
Publication of JPS50122981A publication Critical patent/JPS50122981A/ja
Publication of JPS5823584B2 publication Critical patent/JPS5823584B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP49028795A 1974-03-12 1974-03-12 ブツタイケツカンカンソクホウ Expired JPS5823584B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49028795A JPS5823584B2 (ja) 1974-03-12 1974-03-12 ブツタイケツカンカンソクホウ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49028795A JPS5823584B2 (ja) 1974-03-12 1974-03-12 ブツタイケツカンカンソクホウ

Publications (2)

Publication Number Publication Date
JPS50122981A JPS50122981A (tr) 1975-09-26
JPS5823584B2 true JPS5823584B2 (ja) 1983-05-16

Family

ID=12258345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49028795A Expired JPS5823584B2 (ja) 1974-03-12 1974-03-12 ブツタイケツカンカンソクホウ

Country Status (1)

Country Link
JP (1) JPS5823584B2 (tr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62156506A (ja) * 1985-12-27 1987-07-11 Kansai Electric Power Co Inc:The 回転機械の間隙測定方法
JPS62157968A (ja) * 1985-12-28 1987-07-13 Sony Corp 自由曲面作成方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3160752A (en) * 1963-02-19 1964-12-08 Harold E Bennett Reflectometer for measuring surface finishes

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3160752A (en) * 1963-02-19 1964-12-08 Harold E Bennett Reflectometer for measuring surface finishes

Also Published As

Publication number Publication date
JPS50122981A (tr) 1975-09-26

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