JPS5822941A - 表面欠陥検査装置 - Google Patents

表面欠陥検査装置

Info

Publication number
JPS5822941A
JPS5822941A JP12209081A JP12209081A JPS5822941A JP S5822941 A JPS5822941 A JP S5822941A JP 12209081 A JP12209081 A JP 12209081A JP 12209081 A JP12209081 A JP 12209081A JP S5822941 A JPS5822941 A JP S5822941A
Authority
JP
Japan
Prior art keywords
signal
width
time width
defect
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12209081A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0239737B2 (enrdf_load_stackoverflow
Inventor
Mitsuhito Kamei
光仁 亀井
Toshiro Nakajima
利郎 中島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP12209081A priority Critical patent/JPS5822941A/ja
Publication of JPS5822941A publication Critical patent/JPS5822941A/ja
Publication of JPH0239737B2 publication Critical patent/JPH0239737B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP12209081A 1981-08-03 1981-08-03 表面欠陥検査装置 Granted JPS5822941A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12209081A JPS5822941A (ja) 1981-08-03 1981-08-03 表面欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12209081A JPS5822941A (ja) 1981-08-03 1981-08-03 表面欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS5822941A true JPS5822941A (ja) 1983-02-10
JPH0239737B2 JPH0239737B2 (enrdf_load_stackoverflow) 1990-09-06

Family

ID=14827398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12209081A Granted JPS5822941A (ja) 1981-08-03 1981-08-03 表面欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS5822941A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61198851U (enrdf_load_stackoverflow) * 1985-05-30 1986-12-12

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4848180A (enrdf_load_stackoverflow) * 1971-10-20 1973-07-07
JPS5312218A (en) * 1976-07-20 1978-02-03 Fujitsu Ltd Automatic detection range setting circuit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4848180A (enrdf_load_stackoverflow) * 1971-10-20 1973-07-07
JPS5312218A (en) * 1976-07-20 1978-02-03 Fujitsu Ltd Automatic detection range setting circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61198851U (enrdf_load_stackoverflow) * 1985-05-30 1986-12-12

Also Published As

Publication number Publication date
JPH0239737B2 (enrdf_load_stackoverflow) 1990-09-06

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