JPS58221282A - エツチングマシンのシヤワ−装置 - Google Patents
エツチングマシンのシヤワ−装置Info
- Publication number
- JPS58221282A JPS58221282A JP10351282A JP10351282A JPS58221282A JP S58221282 A JPS58221282 A JP S58221282A JP 10351282 A JP10351282 A JP 10351282A JP 10351282 A JP10351282 A JP 10351282A JP S58221282 A JPS58221282 A JP S58221282A
- Authority
- JP
- Japan
- Prior art keywords
- shower
- bodies
- liquid
- shower device
- nozzles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 title description 22
- 239000007788 liquid Substances 0.000 claims abstract description 38
- 238000000034 method Methods 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 239000011889 copper foil Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000005406 washing Methods 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10351282A JPS58221282A (ja) | 1982-06-15 | 1982-06-15 | エツチングマシンのシヤワ−装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10351282A JPS58221282A (ja) | 1982-06-15 | 1982-06-15 | エツチングマシンのシヤワ−装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13416782A Division JPS58221280A (ja) | 1982-07-31 | 1982-07-31 | エツチングマシンによるシヤワ−方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58221282A true JPS58221282A (ja) | 1983-12-22 |
| JPH0242905B2 JPH0242905B2 (enExample) | 1990-09-26 |
Family
ID=14356010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10351282A Granted JPS58221282A (ja) | 1982-06-15 | 1982-06-15 | エツチングマシンのシヤワ−装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58221282A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02153081A (ja) * | 1988-12-05 | 1990-06-12 | Fuji Plant Kogyo Kk | エッチング方法および装置 |
| JP2015040336A (ja) * | 2013-08-22 | 2015-03-02 | 株式会社Ｊｃｕ | エッチング装置用スプレー配管ユニット |
| JP2016500923A (ja) * | 2012-10-30 | 2016-01-14 | エスエムシー カンパニー リミテッド | 微細回路の製造方法 |
-
1982
- 1982-06-15 JP JP10351282A patent/JPS58221282A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02153081A (ja) * | 1988-12-05 | 1990-06-12 | Fuji Plant Kogyo Kk | エッチング方法および装置 |
| JP2016500923A (ja) * | 2012-10-30 | 2016-01-14 | エスエムシー カンパニー リミテッド | 微細回路の製造方法 |
| JP2015040336A (ja) * | 2013-08-22 | 2015-03-02 | 株式会社Ｊｃｕ | エッチング装置用スプレー配管ユニット |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0242905B2 (enExample) | 1990-09-26 |
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