JPS5820708A - 主としてβ型結晶よりなる超微細炭化珪素粉末の製造方法 - Google Patents

主としてβ型結晶よりなる超微細炭化珪素粉末の製造方法

Info

Publication number
JPS5820708A
JPS5820708A JP56113615A JP11361581A JPS5820708A JP S5820708 A JPS5820708 A JP S5820708A JP 56113615 A JP56113615 A JP 56113615A JP 11361581 A JP11361581 A JP 11361581A JP S5820708 A JPS5820708 A JP S5820708A
Authority
JP
Japan
Prior art keywords
silicon carbide
particles
heating zone
reaction
silica
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56113615A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6327286B2 (enExample
Inventor
Akira Enomoto
亮 榎本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Ibigawa Electric Industry Co Ltd
Original Assignee
Ibiden Co Ltd
Ibigawa Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd, Ibigawa Electric Industry Co Ltd filed Critical Ibiden Co Ltd
Priority to JP56113615A priority Critical patent/JPS5820708A/ja
Publication of JPS5820708A publication Critical patent/JPS5820708A/ja
Publication of JPS6327286B2 publication Critical patent/JPS6327286B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Carbon And Carbon Compounds (AREA)
JP56113615A 1981-07-22 1981-07-22 主としてβ型結晶よりなる超微細炭化珪素粉末の製造方法 Granted JPS5820708A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56113615A JPS5820708A (ja) 1981-07-22 1981-07-22 主としてβ型結晶よりなる超微細炭化珪素粉末の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56113615A JPS5820708A (ja) 1981-07-22 1981-07-22 主としてβ型結晶よりなる超微細炭化珪素粉末の製造方法

Publications (2)

Publication Number Publication Date
JPS5820708A true JPS5820708A (ja) 1983-02-07
JPS6327286B2 JPS6327286B2 (enExample) 1988-06-02

Family

ID=14616698

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56113615A Granted JPS5820708A (ja) 1981-07-22 1981-07-22 主としてβ型結晶よりなる超微細炭化珪素粉末の製造方法

Country Status (1)

Country Link
JP (1) JPS5820708A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6096517A (ja) * 1983-10-27 1985-05-30 Shin Etsu Chem Co Ltd 超微粒子状炭化けい素

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6096517A (ja) * 1983-10-27 1985-05-30 Shin Etsu Chem Co Ltd 超微粒子状炭化けい素

Also Published As

Publication number Publication date
JPS6327286B2 (enExample) 1988-06-02

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