JPS58196025A - 半導体等のエ−ジング装置 - Google Patents

半導体等のエ−ジング装置

Info

Publication number
JPS58196025A
JPS58196025A JP57078167A JP7816782A JPS58196025A JP S58196025 A JPS58196025 A JP S58196025A JP 57078167 A JP57078167 A JP 57078167A JP 7816782 A JP7816782 A JP 7816782A JP S58196025 A JPS58196025 A JP S58196025A
Authority
JP
Japan
Prior art keywords
box
heater
cooler
sample chamber
aging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57078167A
Other languages
English (en)
Japanese (ja)
Other versions
JPS637627B2 (enrdf_load_stackoverflow
Inventor
Tatsuo Hayashida
林田　辰雄
Takeshi Fukushiro
福代　毅
Teruaki Kojima
小島　輝昭
Ryuichi Takagi
隆一 高木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57078167A priority Critical patent/JPS58196025A/ja
Publication of JPS58196025A publication Critical patent/JPS58196025A/ja
Publication of JPS637627B2 publication Critical patent/JPS637627B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2642—Testing semiconductor operation lifetime or reliability, e.g. by accelerated life tests

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
JP57078167A 1982-05-12 1982-05-12 半導体等のエ−ジング装置 Granted JPS58196025A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57078167A JPS58196025A (ja) 1982-05-12 1982-05-12 半導体等のエ−ジング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57078167A JPS58196025A (ja) 1982-05-12 1982-05-12 半導体等のエ−ジング装置

Publications (2)

Publication Number Publication Date
JPS58196025A true JPS58196025A (ja) 1983-11-15
JPS637627B2 JPS637627B2 (enrdf_load_stackoverflow) 1988-02-17

Family

ID=13654373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57078167A Granted JPS58196025A (ja) 1982-05-12 1982-05-12 半導体等のエ−ジング装置

Country Status (1)

Country Link
JP (1) JPS58196025A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS619853U (ja) * 1984-06-21 1986-01-21 株式会社 藤田製作所 バ−ンイン処理装置
JPS62199682U (enrdf_load_stackoverflow) * 1986-06-09 1987-12-19
JPH0310277U (enrdf_load_stackoverflow) * 1989-06-16 1991-01-31
CN103487697A (zh) * 2013-09-24 2014-01-01 浙江恒泰皇冠园林工具有限公司 一种新型老化柜
JP2015079970A (ja) * 2009-07-03 2015-04-23 株式会社半導体エネルギー研究所 半導体装置の作製方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS619853U (ja) * 1984-06-21 1986-01-21 株式会社 藤田製作所 バ−ンイン処理装置
JPS62199682U (enrdf_load_stackoverflow) * 1986-06-09 1987-12-19
JPH0310277U (enrdf_load_stackoverflow) * 1989-06-16 1991-01-31
JP2015079970A (ja) * 2009-07-03 2015-04-23 株式会社半導体エネルギー研究所 半導体装置の作製方法
CN103487697A (zh) * 2013-09-24 2014-01-01 浙江恒泰皇冠园林工具有限公司 一种新型老化柜

Also Published As

Publication number Publication date
JPS637627B2 (enrdf_load_stackoverflow) 1988-02-17

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