JPS58193094U - タ−ボ分子ポンプ - Google Patents

タ−ボ分子ポンプ

Info

Publication number
JPS58193094U
JPS58193094U JP9273882U JP9273882U JPS58193094U JP S58193094 U JPS58193094 U JP S58193094U JP 9273882 U JP9273882 U JP 9273882U JP 9273882 U JP9273882 U JP 9273882U JP S58193094 U JPS58193094 U JP S58193094U
Authority
JP
Japan
Prior art keywords
blade group
rotor
molecular pump
casing
impeller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9273882U
Other languages
English (en)
Japanese (ja)
Other versions
JPS647269Y2 (enExample
Inventor
小寺　節夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP9273882U priority Critical patent/JPS58193094U/ja
Publication of JPS58193094U publication Critical patent/JPS58193094U/ja
Application granted granted Critical
Publication of JPS647269Y2 publication Critical patent/JPS647269Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP9273882U 1982-06-20 1982-06-20 タ−ボ分子ポンプ Granted JPS58193094U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9273882U JPS58193094U (ja) 1982-06-20 1982-06-20 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9273882U JPS58193094U (ja) 1982-06-20 1982-06-20 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS58193094U true JPS58193094U (ja) 1983-12-22
JPS647269Y2 JPS647269Y2 (enExample) 1989-02-27

Family

ID=30100675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9273882U Granted JPS58193094U (ja) 1982-06-20 1982-06-20 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPS58193094U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02259297A (ja) * 1989-03-30 1990-10-22 Shimadzu Corp 真空ポンプ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5363709U (enExample) * 1977-10-18 1978-05-29

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5363709U (enExample) * 1977-10-18 1978-05-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02259297A (ja) * 1989-03-30 1990-10-22 Shimadzu Corp 真空ポンプ

Also Published As

Publication number Publication date
JPS647269Y2 (enExample) 1989-02-27

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