JPS58184841U - ウエ−ハ搬送装置 - Google Patents

ウエ−ハ搬送装置

Info

Publication number
JPS58184841U
JPS58184841U JP8239882U JP8239882U JPS58184841U JP S58184841 U JPS58184841 U JP S58184841U JP 8239882 U JP8239882 U JP 8239882U JP 8239882 U JP8239882 U JP 8239882U JP S58184841 U JPS58184841 U JP S58184841U
Authority
JP
Japan
Prior art keywords
wafer
passage hole
electrode
light passage
transfer device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8239882U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6214693Y2 (enrdf_load_html_response
Inventor
多田　啓司
勝義 工藤
福原　秀倶
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8239882U priority Critical patent/JPS58184841U/ja
Publication of JPS58184841U publication Critical patent/JPS58184841U/ja
Application granted granted Critical
Publication of JPS6214693Y2 publication Critical patent/JPS6214693Y2/ja
Granted legal-status Critical Current

Links

JP8239882U 1982-06-04 1982-06-04 ウエ−ハ搬送装置 Granted JPS58184841U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8239882U JPS58184841U (ja) 1982-06-04 1982-06-04 ウエ−ハ搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8239882U JPS58184841U (ja) 1982-06-04 1982-06-04 ウエ−ハ搬送装置

Publications (2)

Publication Number Publication Date
JPS58184841U true JPS58184841U (ja) 1983-12-08
JPS6214693Y2 JPS6214693Y2 (enrdf_load_html_response) 1987-04-15

Family

ID=30091465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8239882U Granted JPS58184841U (ja) 1982-06-04 1982-06-04 ウエ−ハ搬送装置

Country Status (1)

Country Link
JP (1) JPS58184841U (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0425151A (ja) * 1990-05-21 1992-01-28 Canon Inc 薄板検出装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49104569A (enrdf_load_html_response) * 1973-02-07 1974-10-03

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49104569A (enrdf_load_html_response) * 1973-02-07 1974-10-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0425151A (ja) * 1990-05-21 1992-01-28 Canon Inc 薄板検出装置

Also Published As

Publication number Publication date
JPS6214693Y2 (enrdf_load_html_response) 1987-04-15

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