JPS58182503A - 多層フイルムの膜厚測定方法 - Google Patents

多層フイルムの膜厚測定方法

Info

Publication number
JPS58182503A
JPS58182503A JP6605582A JP6605582A JPS58182503A JP S58182503 A JPS58182503 A JP S58182503A JP 6605582 A JP6605582 A JP 6605582A JP 6605582 A JP6605582 A JP 6605582A JP S58182503 A JPS58182503 A JP S58182503A
Authority
JP
Japan
Prior art keywords
film
multilayer film
thickness
layer
film thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6605582A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6363041B2 (enExample
Inventor
Shigeo Hachiki
茂男 蜂木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP6605582A priority Critical patent/JPS58182503A/ja
Publication of JPS58182503A publication Critical patent/JPS58182503A/ja
Publication of JPS6363041B2 publication Critical patent/JPS6363041B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP6605582A 1982-04-20 1982-04-20 多層フイルムの膜厚測定方法 Granted JPS58182503A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6605582A JPS58182503A (ja) 1982-04-20 1982-04-20 多層フイルムの膜厚測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6605582A JPS58182503A (ja) 1982-04-20 1982-04-20 多層フイルムの膜厚測定方法

Publications (2)

Publication Number Publication Date
JPS58182503A true JPS58182503A (ja) 1983-10-25
JPS6363041B2 JPS6363041B2 (enExample) 1988-12-06

Family

ID=13304799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6605582A Granted JPS58182503A (ja) 1982-04-20 1982-04-20 多層フイルムの膜厚測定方法

Country Status (1)

Country Link
JP (1) JPS58182503A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0874396A3 (en) * 1997-04-25 1999-05-19 Applied Materials, Inc. A method of determining a wafer characteristic using a film thickness monitor
JP2012047571A (ja) * 2010-08-26 2012-03-08 Japan Atomic Energy Agency 亀裂開口幅と亀裂形状の同時測定方法及び装置
CN106123792A (zh) * 2016-08-25 2016-11-16 中冶北方（大连）工程技术有限公司 一种链篦机料层厚度成像系统及方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0874396A3 (en) * 1997-04-25 1999-05-19 Applied Materials, Inc. A method of determining a wafer characteristic using a film thickness monitor
JP2012047571A (ja) * 2010-08-26 2012-03-08 Japan Atomic Energy Agency 亀裂開口幅と亀裂形状の同時測定方法及び装置
CN106123792A (zh) * 2016-08-25 2016-11-16 中冶北方（大连）工程技术有限公司 一种链篦机料层厚度成像系统及方法

Also Published As

Publication number Publication date
JPS6363041B2 (enExample) 1988-12-06

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