JPS6363041B2 - - Google Patents

Info

Publication number
JPS6363041B2
JPS6363041B2 JP6605582A JP6605582A JPS6363041B2 JP S6363041 B2 JPS6363041 B2 JP S6363041B2 JP 6605582 A JP6605582 A JP 6605582A JP 6605582 A JP6605582 A JP 6605582A JP S6363041 B2 JPS6363041 B2 JP S6363041B2
Authority
JP
Japan
Prior art keywords
multilayer film
film
measuring
spectrum
layer material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6605582A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58182503A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6605582A priority Critical patent/JPS58182503A/ja
Publication of JPS58182503A publication Critical patent/JPS58182503A/ja
Publication of JPS6363041B2 publication Critical patent/JPS6363041B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP6605582A 1982-04-20 1982-04-20 多層フイルムの膜厚測定方法 Granted JPS58182503A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6605582A JPS58182503A (ja) 1982-04-20 1982-04-20 多層フイルムの膜厚測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6605582A JPS58182503A (ja) 1982-04-20 1982-04-20 多層フイルムの膜厚測定方法

Publications (2)

Publication Number Publication Date
JPS58182503A JPS58182503A (ja) 1983-10-25
JPS6363041B2 true JPS6363041B2 (enExample) 1988-12-06

Family

ID=13304799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6605582A Granted JPS58182503A (ja) 1982-04-20 1982-04-20 多層フイルムの膜厚測定方法

Country Status (1)

Country Link
JP (1) JPS58182503A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6366861B1 (en) * 1997-04-25 2002-04-02 Applied Materials, Inc. Method of determining a wafer characteristic using a film thickness monitor
JP5326174B2 (ja) * 2010-08-26 2013-10-30 独立行政法人日本原子力研究開発機構 亀裂開口幅と亀裂形状の同時測定方法及び装置
CN106123792A (zh) * 2016-08-25 2016-11-16 中冶北方（大连）工程技术有限公司 一种链篦机料层厚度成像系统及方法

Also Published As

Publication number Publication date
JPS58182503A (ja) 1983-10-25

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