JPS58179304A - 表面欠陥抽出装置 - Google Patents

表面欠陥抽出装置

Info

Publication number
JPS58179304A
JPS58179304A JP57062765A JP6276582A JPS58179304A JP S58179304 A JPS58179304 A JP S58179304A JP 57062765 A JP57062765 A JP 57062765A JP 6276582 A JP6276582 A JP 6276582A JP S58179304 A JPS58179304 A JP S58179304A
Authority
JP
Japan
Prior art keywords
circuit
information
defect
inspected
foreign matter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57062765A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332722B2 (OSRAM
Inventor
Masayuki Shibano
正行 芝野
Kunihiko Mototani
本谷　邦彦
Minoru Katsuyama
実 勝山
Taketoshi Yonezawa
米澤　武敏
Shigeru Kondo
茂 近藤
Masahiro Shimizu
正博 清水
Tetsuo Hanaoka
花岡　哲郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57062765A priority Critical patent/JPS58179304A/ja
Publication of JPS58179304A publication Critical patent/JPS58179304A/ja
Publication of JPH0332722B2 publication Critical patent/JPH0332722B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP57062765A 1982-04-14 1982-04-14 表面欠陥抽出装置 Granted JPS58179304A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57062765A JPS58179304A (ja) 1982-04-14 1982-04-14 表面欠陥抽出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57062765A JPS58179304A (ja) 1982-04-14 1982-04-14 表面欠陥抽出装置

Publications (2)

Publication Number Publication Date
JPS58179304A true JPS58179304A (ja) 1983-10-20
JPH0332722B2 JPH0332722B2 (OSRAM) 1991-05-14

Family

ID=13209805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57062765A Granted JPS58179304A (ja) 1982-04-14 1982-04-14 表面欠陥抽出装置

Country Status (1)

Country Link
JP (1) JPS58179304A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63128730U (OSRAM) * 1987-02-16 1988-08-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63128730U (OSRAM) * 1987-02-16 1988-08-23

Also Published As

Publication number Publication date
JPH0332722B2 (OSRAM) 1991-05-14

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