JPH0332722B2 - - Google Patents
Info
- Publication number
- JPH0332722B2 JPH0332722B2 JP6276582A JP6276582A JPH0332722B2 JP H0332722 B2 JPH0332722 B2 JP H0332722B2 JP 6276582 A JP6276582 A JP 6276582A JP 6276582 A JP6276582 A JP 6276582A JP H0332722 B2 JPH0332722 B2 JP H0332722B2
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- circuit
- defect
- scratches
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007547 defect Effects 0.000 claims description 43
- 238000000605 extraction Methods 0.000 claims description 26
- 239000000284 extract Substances 0.000 claims description 5
- 230000002950 deficient Effects 0.000 claims 2
- 206010070245 Foreign body Diseases 0.000 description 13
- 238000007689 inspection Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000011179 visual inspection Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57062765A JPS58179304A (ja) | 1982-04-14 | 1982-04-14 | 表面欠陥抽出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57062765A JPS58179304A (ja) | 1982-04-14 | 1982-04-14 | 表面欠陥抽出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58179304A JPS58179304A (ja) | 1983-10-20 |
| JPH0332722B2 true JPH0332722B2 (OSRAM) | 1991-05-14 |
Family
ID=13209805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57062765A Granted JPS58179304A (ja) | 1982-04-14 | 1982-04-14 | 表面欠陥抽出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58179304A (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0541551Y2 (OSRAM) * | 1987-02-16 | 1993-10-20 |
-
1982
- 1982-04-14 JP JP57062765A patent/JPS58179304A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58179304A (ja) | 1983-10-20 |
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