JPS58178358A - Device for applying photosensitive material - Google Patents

Abstract

PURPOSE:To prevent scattering of a photosensitive material, to facilitate its handling, and to obtain an automatically operable photosensitive material application device, by providing the vacuum fixable bottom plate of a spinner with a positioning protuberances, a side wall, etc. CONSTITUTION:An evacuation fixable bottom plate 7 rotatable together with spinner head 10 is provided with a side wall 9 and protuberances 8 for positioning the base plate 1 on which a photosensitive material is applied. Said material is dropped, spread over the base 1, thus applied, and excess of the material is prevented from scattering with the wall 9. Therefore, this photosensitive material application device makes it possible to continuously convey the bases 1 by easy handling, and to automate its operation.

Description

DETAILED DESCRIPTION OF THE INVENTION This application relates to an apparatus for applying photosensitive materials onto plug-in type substrates using spin rotation.

A conventional type of device is shown in FIG. In the figure, (1) is a plug-in type board, (2) is its bottle, (3) is a spinner head that fixes and rotates this board (1), and (4) is a plug-in type board ( 1
) is the hole for inserting the bottle (2), and (5) is the rotation axis of the spinner head (3).

Next, the operation will be explained. A plug-in type substrate (1) on which a metal thin film has been formed by a vapor deposition process etc. is fixed to the spinner head (3) by inserting the bottle (2) into the hole (4), and the substrate (1) ) Plug-in substrate (1) is created by dropping a photosensitive material onto the top surface and rotating the spinner head (3) by rotating the rotating shaft (5).
is rotated to form a thin film of photosensitive material on the substrate (1).

Conventional photosensitive material coating equipment is constructed as described above, so when inserting the bottle of the substrate into the hole, it is necessary to correct the bent shape of the bottle, and the photosensitive material is scattered around when rotating. There were drawbacks such as adhesion on the spinner head, making continuous use of the spinner head difficult, and continuous conveyance of substrates impossible, making automation impossible.

This invention was made in order to eliminate the drawbacks of the conventional ones as described above, and by forming a paper board capable of adsorbing A, a protrusion for positioning the substrate, and a side wall around it,
It is an object of the present invention to provide a photosensitive material coating device that allows easy positioning of a substrate, prevents scattering of the photosensitive material, facilitates handling, allows continuous conveyance of the substrate, and can be automated.

An embodiment of the present invention will be described below with reference to the drawings. Second
In the figure, (6) is the main body of the photosensitive material coating device to which the plug-in board (1) is mounted, (7) is a bottom plate whose bottom surface is finished to allow vacuum suction, and (8) is the bottom plate (7J
a protrusion (9) for positioning the board (1) in the center of the
is the side wall formed around the mounting part of the board (1), Qq
ton-t is the axis of rotation of the spinner hand which rotates by vacuum suctioning the bottom surface of the bottom plate (5).

Next, the operation will be explained. A substrate (1) on which a metal thin film has been formed by a vapor deposition process or the like is attached to the center of the device main body (6) so that its outer periphery is in contact with the protrusion (8), and the bottom plate (7) is attached.
) is vacuum-adsorbed using a spinner head q, and the photosensitive material is dropped onto the substrate (1) and rotated.
A thin film of photosensitive material is formed on top.

Note that, although all of the above embodiments have circular side walls, rectangular side walls may also be provided.

As described above, according to the present invention, since the protrusions are provided for positioning, mounting of the substrate is facilitated, and since the bottom plate is provided which can be vacuum-adsorbed with the side wall, scattering of the photosensitive material to the outside is prevented. This has the effect of facilitating hand-linking, enabling automatic conveyance of the substrate, and automating the photosensitive material coating process.

[Brief explanation of the drawing]

Figure 1 is a perspective view showing a conventional photosensitive material coating device, Figure 2 is a perspective view showing a conventional photosensitive material coating device;
The figure is a perspective view showing a photosensitive material coating device according to an embodiment of the present invention. In the figure, (1) is the substrate to be coated, (7) is the bottom plate, and (8) is the substrate to be coated.
) indicates the protrusion, (9) indicates the side wall, and the reference symbol indicates the spinner head. 0 The same reference numerals in the figures indicate the same or corresponding parts. 0 Agent: Makoto Kuzuno (1 other person) Continued from page 1 0 Inventor Jun Mitsuhashi - 3-24-2 Satsukidai Nakayama, Takarazuka City Mr. Commissioner of the Japan Patent Office 1. Indication of the case: Japanese Patent Application No. 5'1-650214 2. Title of the invention: Photosensitive material coating device 3. Person making the correction: SN::; Oath. 5. Beyond the detailed description of the invention in the specification subject to amendment

Claims (1)

[Claims] (1) a bottom plate having a protrusion on its surface for positioning a substrate to be coated placed on a predetermined portion and a side wall surrounding the predetermined portion, and a bottom plate having a flatness that allows vacuum suction on the back surface; A photosensitive material coating device comprising a spinner head that vacuum-chucks and rotates the bottom plate on its back surface.