JPS58178358A - Device for applying photosensitive material - Google Patents
Device for applying photosensitive materialInfo
- Publication number
- JPS58178358A JPS58178358A JP6302282A JP6302282A JPS58178358A JP S58178358 A JPS58178358 A JP S58178358A JP 6302282 A JP6302282 A JP 6302282A JP 6302282 A JP6302282 A JP 6302282A JP S58178358 A JPS58178358 A JP S58178358A
- Authority
- JP
- Japan
- Prior art keywords
- photosensitive material
- bottom plate
- substrate
- side wall
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
Description
【発明の詳細な説明】
この艶用は、スピン回転を用いてプラグインタイブの基
板上に感光性材料を塗布するための装置に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION This application relates to an apparatus for applying photosensitive materials onto plug-in type substrates using spin rotation.
従来上の種の装置として第1図に示すものがあった。図
において、(1)はプラグインタイブの基板、(2)は
そのビンであシ、(3)はこの基板(1)を固定して回
転させるスピナーヘッドであり、(4)は上記基板(1
)のビン(2)をさし込むための穴、(5)はスピナー
ヘッド(3)の回転軸である。A conventional type of device is shown in FIG. In the figure, (1) is a plug-in type board, (2) is its bottle, (3) is a spinner head that fixes and rotates this board (1), and (4) is a plug-in type board ( 1
) is the hole for inserting the bottle (2), and (5) is the rotation axis of the spinner head (3).
次に動作について説明する。蒸着工程等により金属薄膜
を形成されたプラグインタイブの基板(1)を、そのビ
ン(2)が穴(4)にさし込まれるようにしてスピナー
ヘッド(3)に固定させ、基板(1)上面に感光性材料
を滴下し、回転軸(5)を回転駆動してスピナーヘッド
(3)を回転させることによってプラグイン基板(1)
を回転させ、基板(1)上に感光性材料の薄膜を形成す
る。Next, the operation will be explained. A plug-in type substrate (1) on which a metal thin film has been formed by a vapor deposition process etc. is fixed to the spinner head (3) by inserting the bottle (2) into the hole (4), and the substrate (1) ) Plug-in substrate (1) is created by dropping a photosensitive material onto the top surface and rotating the spinner head (3) by rotating the rotating shaft (5).
is rotated to form a thin film of photosensitive material on the substrate (1).
従来の感光性材料塗布装置は以上のように構成されてい
るので、基板のビンを穴にさし込む時に曲がったビンの
形状を矯正せねばならず、回転時に感光性材料が周囲に
飛び散ってスピナーヘッド上に付着し、スピナーヘッド
の連続使用が困難になり、また、基板の連続搬送が出来
なくて自動化が不可能であるなどの欠点があった。Conventional photosensitive material coating equipment is constructed as described above, so when inserting the bottle of the substrate into the hole, it is necessary to correct the bent shape of the bottle, and the photosensitive material is scattered around when rotating. There were drawbacks such as adhesion on the spinner head, making continuous use of the spinner head difficult, and continuous conveyance of substrates impossible, making automation impossible.
この発明は上記のような従来のものの欠点を除去するた
めになされたもので、Aを吸着可能な紙板と、基板を位
置決めする突起と、周囲に側壁を形成することにより、
基板の位置決めが容易で、感光性材料の飛散を防止して
ハンドリングが容易となり、基板の連続搬送が出来て自
動化が可能な感光性材料塗布装置を提供することを目的
としている。This invention was made in order to eliminate the drawbacks of the conventional ones as described above, and by forming a paper board capable of adsorbing A, a protrusion for positioning the substrate, and a side wall around it,
It is an object of the present invention to provide a photosensitive material coating device that allows easy positioning of a substrate, prevents scattering of the photosensitive material, facilitates handling, allows continuous conveyance of the substrate, and can be automated.
以下、この発明の一実施例を図について説明する。第2
図において、(6)はプラグイン基板(1)を装着する
感光性材料塗布装置の本体、(7〕はその底面が真空吸
着可能な状態に仕上げられた底抜、(8)は底板(7J
の中央に基板(1)を位置決めするための突起、(9)
は基板(1)の装着部位の周囲に形成された側壁、Qq
は底板(5)の底面を真空吸着して回転するスビナーヘ
ンド、ton−tその回転軸である。An embodiment of the present invention will be described below with reference to the drawings. Second
In the figure, (6) is the main body of the photosensitive material coating device to which the plug-in board (1) is mounted, (7) is a bottom plate whose bottom surface is finished to allow vacuum suction, and (8) is the bottom plate (7J
a protrusion (9) for positioning the board (1) in the center of the
is the side wall formed around the mounting part of the board (1), Qq
ton-t is the axis of rotation of the spinner hand which rotates by vacuum suctioning the bottom surface of the bottom plate (5).
次に動作について説明する。蒸着工程等により金属薄膜
を形成した基板(1)を、その外周が突起(8)に接す
るようにして装置本体(6)の中央に装着し、底板(7
)の底面をスピナーへッドリqにより真空吸着し、基板
(1)上に感光性材料を滴下して回転させ、基板(1)
上に感光性材料の薄膜を形成する。Next, the operation will be explained. A substrate (1) on which a metal thin film has been formed by a vapor deposition process or the like is attached to the center of the device main body (6) so that its outer periphery is in contact with the protrusion (8), and the bottom plate (7) is attached.
) is vacuum-adsorbed using a spinner head q, and the photosensitive material is dropped onto the substrate (1) and rotated.
A thin film of photosensitive material is formed on top.
なお・、上記実施例では円形の側壁を設けたもの全示し
たが、矩形の側壁を設けてもよい。Note that, although all of the above embodiments have circular side walls, rectangular side walls may also be provided.
以上のように、この発明によれば、位置決め用に突起を
構成したので基板の装着が容易になり、側壁と真空吸着
可能な底板を構成したので、感光性材料の外部への飛散
を防止して−・ンドリンクが容易となり、基板の自動搬
送が可能となって感光性材料塗布工程を自動化できる効
果がある。As described above, according to the present invention, since the protrusions are provided for positioning, mounting of the substrate is facilitated, and since the bottom plate is provided which can be vacuum-adsorbed with the side wall, scattering of the photosensitive material to the outside is prevented. This has the effect of facilitating hand-linking, enabling automatic conveyance of the substrate, and automating the photosensitive material coating process.
第1図は従来の感光性材料塗布装置を示す斜視図、第2
図はこの発明の一実施例による感光性材料塗布装置を示
す斜視図である。
図において、(1)は被塗布基板、(7)は底板、(8
)は突起、(9)は側壁、叫はスピンナーヘッドである
0なお、図中同一符号は同一または相当部分を示す0
代理人 葛野信−(外1名)
第1頁の続き
0発 明 者 三橋順−
宝塚市中山五月台3−24−2
特許庁長官殿
1、事件の表示 特願昭5’l−650214号
2、発明の名称 感光性材料塗布装置3、補正をす
る者
SN::;誓。
5・補正の対象
明細書の発明の詳細な説明の欄
以上Figure 1 is a perspective view showing a conventional photosensitive material coating device, Figure 2 is a perspective view showing a conventional photosensitive material coating device;
The figure is a perspective view showing a photosensitive material coating device according to an embodiment of the present invention. In the figure, (1) is the substrate to be coated, (7) is the bottom plate, and (8) is the substrate to be coated.
) indicates the protrusion, (9) indicates the side wall, and the reference symbol indicates the spinner head. 0 The same reference numerals in the figures indicate the same or corresponding parts. 0 Agent: Makoto Kuzuno (1 other person) Continued from page 1 0 Inventor Jun Mitsuhashi - 3-24-2 Satsukidai Nakayama, Takarazuka City Mr. Commissioner of the Japan Patent Office 1. Indication of the case: Japanese Patent Application No. 5'1-650214 2. Title of the invention: Photosensitive material coating device 3. Person making the correction: SN::; Oath. 5. Beyond the detailed description of the invention in the specification subject to amendment
Claims (1)
置決めする突起と上記所定部位を囲む側壁とが設けられ
裏面は真空吸着可能な平面度を有するように形成された
底板、および、上記底板をその裏面において真空吸着し
て回転させるスピンナーヘッドを備えたことを特徴とす
る感光性材料塗布装置。(1) a bottom plate having a protrusion on its surface for positioning a substrate to be coated placed on a predetermined portion and a side wall surrounding the predetermined portion, and a bottom plate having a flatness that allows vacuum suction on the back surface; A photosensitive material coating device comprising a spinner head that vacuum-chucks and rotates the bottom plate on its back surface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6302282A JPS58178358A (en) | 1982-04-13 | 1982-04-13 | Device for applying photosensitive material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6302282A JPS58178358A (en) | 1982-04-13 | 1982-04-13 | Device for applying photosensitive material |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58178358A true JPS58178358A (en) | 1983-10-19 |
JPH0314171B2 JPH0314171B2 (en) | 1991-02-26 |
Family
ID=13217275
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6302282A Granted JPS58178358A (en) | 1982-04-13 | 1982-04-13 | Device for applying photosensitive material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58178358A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6096822U (en) * | 1983-12-09 | 1985-07-02 | 沖電気工業株式会社 | spinner head |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8334132B2 (en) | 2006-11-09 | 2012-12-18 | Mitsubishi Rayon Co., Ltd. | Process for production of a betaine such as carnitine |
-
1982
- 1982-04-13 JP JP6302282A patent/JPS58178358A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6096822U (en) * | 1983-12-09 | 1985-07-02 | 沖電気工業株式会社 | spinner head |
Also Published As
Publication number | Publication date |
---|---|
JPH0314171B2 (en) | 1991-02-26 |
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