JPS6096822U - spinner head - Google Patents

spinner head

Info

Publication number
JPS6096822U
JPS6096822U JP18933583U JP18933583U JPS6096822U JP S6096822 U JPS6096822 U JP S6096822U JP 18933583 U JP18933583 U JP 18933583U JP 18933583 U JP18933583 U JP 18933583U JP S6096822 U JPS6096822 U JP S6096822U
Authority
JP
Japan
Prior art keywords
spinner head
wafer
fixing pins
outer circumference
spinner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18933583U
Other languages
Japanese (ja)
Inventor
水出　久
Original Assignee
沖電気工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 沖電気工業株式会社 filed Critical 沖電気工業株式会社
Priority to JP18933583U priority Critical patent/JPS6096822U/en
Publication of JPS6096822U publication Critical patent/JPS6096822U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はウェハ両面にレジスト塗布しエツチングした状
態を示す断面図、第２図は従来のスピナーヘッドを示す
正面図、第３図は本考案スピナーヘッドの一実施例を示
す側面図、第４区は同じくその平面図である。 ６・・・ウェハ、１０・・・スピナーヘッド、１１・・
・オリエンテーションフラット、１２□〜１２９・・・
固定ピン、１３□〜１３３・・・突起、１４・・・切込
み。FIG. 1 is a cross-sectional view showing a state where resist is coated and etched on both sides of a wafer, FIG. 2 is a front view showing a conventional spinner head, FIG. 3 is a side view showing an embodiment of the spinner head of the present invention, and FIG. The ward is also its floor plan. 6... Wafer, 10... Spinner head, 11...
・Orientation flat, 12□~129...
Fixed pin, 13□~133...Protrusion, 14...Notch.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ウェハの外周よりやや大きいスピナーヘッドの上面に、
ウェハのオリエンテーションフラットを含むその外周に
接するよう複数個の固定ピンを、またウェハの周辺部を
僅かな間隔をおいて支持する突起を設けると共に、固定
ピンの外側にレジストの回り込みを防止するための切込
みを設けたことを特徴とするスピナーヘッド。On the top of the spinner head, which is slightly larger than the outer circumference of the wafer,
A plurality of fixing pins are provided so as to touch the outer circumference of the wafer including the orientation flat, and protrusions are provided to support the periphery of the wafer at a slight interval, and a plurality of fixing pins are provided to prevent the resist from wrapping around the outside of the fixing pins. A spinner head characterized by a notch.
JP18933583U 1983-12-09 1983-12-09 spinner head Pending JPS6096822U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18933583U JPS6096822U (en) 1983-12-09 1983-12-09 spinner head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18933583U JPS6096822U (en) 1983-12-09 1983-12-09 spinner head

Publications (1)

Publication Number Publication Date
JPS6096822U true JPS6096822U (en) 1985-07-02

Family

ID=30408233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18933583U Pending JPS6096822U (en) 1983-12-09 1983-12-09 spinner head

Country Status (1)

Country Link
JP (1) JPS6096822U (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5652065B2 (en) * 1974-01-17 1981-12-09
JPS58132930A (en) * 1982-02-03 1983-08-08 Nec Corp Photoresist coating device
JPS58178358A (en) * 1982-04-13 1983-10-19 Mitsubishi Electric Corp Device for applying photosensitive material

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5652065B2 (en) * 1974-01-17 1981-12-09
JPS58132930A (en) * 1982-02-03 1983-08-08 Nec Corp Photoresist coating device
JPS58178358A (en) * 1982-04-13 1983-10-19 Mitsubishi Electric Corp Device for applying photosensitive material

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