JPS5817689A - ジヨセフソン回路の製造方法 - Google Patents

ジヨセフソン回路の製造方法

Info

Publication number
JPS5817689A
JPS5817689A JP56115923A JP11592381A JPS5817689A JP S5817689 A JPS5817689 A JP S5817689A JP 56115923 A JP56115923 A JP 56115923A JP 11592381 A JP11592381 A JP 11592381A JP S5817689 A JPS5817689 A JP S5817689A
Authority
JP
Japan
Prior art keywords
film
thin
coating film
etching
superconducting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56115923A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334675B2 (enExample
Inventor
Takeshi Imamura
健 今村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56115923A priority Critical patent/JPS5817689A/ja
Publication of JPS5817689A publication Critical patent/JPS5817689A/ja
Publication of JPH0334675B2 publication Critical patent/JPH0334675B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Drying Of Semiconductors (AREA)
JP56115923A 1981-07-24 1981-07-24 ジヨセフソン回路の製造方法 Granted JPS5817689A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56115923A JPS5817689A (ja) 1981-07-24 1981-07-24 ジヨセフソン回路の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56115923A JPS5817689A (ja) 1981-07-24 1981-07-24 ジヨセフソン回路の製造方法

Publications (2)

Publication Number Publication Date
JPS5817689A true JPS5817689A (ja) 1983-02-01
JPH0334675B2 JPH0334675B2 (enExample) 1991-05-23

Family

ID=14674542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56115923A Granted JPS5817689A (ja) 1981-07-24 1981-07-24 ジヨセフソン回路の製造方法

Country Status (1)

Country Link
JP (1) JPS5817689A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61263181A (ja) * 1985-05-17 1986-11-21 Agency Of Ind Science & Technol 超電導線路の形成方法
JPS61271880A (ja) * 1985-05-27 1986-12-02 Agency Of Ind Science & Technol 超電導線路の形成方法
US4790696A (en) * 1987-12-03 1988-12-13 The Stanley Works Chuck key mounting and ejector arrangement

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54158870A (en) * 1978-06-06 1979-12-15 Matsushita Electric Ind Co Ltd Etching method
JPS5658247A (en) * 1979-10-17 1981-05-21 Fujitsu Ltd Production of semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54158870A (en) * 1978-06-06 1979-12-15 Matsushita Electric Ind Co Ltd Etching method
JPS5658247A (en) * 1979-10-17 1981-05-21 Fujitsu Ltd Production of semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61263181A (ja) * 1985-05-17 1986-11-21 Agency Of Ind Science & Technol 超電導線路の形成方法
JPS61271880A (ja) * 1985-05-27 1986-12-02 Agency Of Ind Science & Technol 超電導線路の形成方法
US4790696A (en) * 1987-12-03 1988-12-13 The Stanley Works Chuck key mounting and ejector arrangement

Also Published As

Publication number Publication date
JPH0334675B2 (enExample) 1991-05-23

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