JPS58169044A - 定温度形ピラニ−真空計 - Google Patents

定温度形ピラニ−真空計

Info

Publication number
JPS58169044A
JPS58169044A JP57052557A JP5255782A JPS58169044A JP S58169044 A JPS58169044 A JP S58169044A JP 57052557 A JP57052557 A JP 57052557A JP 5255782 A JP5255782 A JP 5255782A JP S58169044 A JPS58169044 A JP S58169044A
Authority
JP
Japan
Prior art keywords
circuit
vacuum
output
resistor
gauging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57052557A
Other languages
English (en)
Japanese (ja)
Other versions
JPH029294B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Noboru Kuriyama
昇 栗山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuda Seisakusho Co Ltd
Original Assignee
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuda Seisakusho Co Ltd filed Critical Tokuda Seisakusho Co Ltd
Priority to JP57052557A priority Critical patent/JPS58169044A/ja
Publication of JPS58169044A publication Critical patent/JPS58169044A/ja
Publication of JPH029294B2 publication Critical patent/JPH029294B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00Vacuum gauges
    • G01L21/10Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Measuring Fluid Pressure (AREA)
JP57052557A 1982-03-31 1982-03-31 定温度形ピラニ−真空計 Granted JPS58169044A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57052557A JPS58169044A (ja) 1982-03-31 1982-03-31 定温度形ピラニ−真空計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57052557A JPS58169044A (ja) 1982-03-31 1982-03-31 定温度形ピラニ−真空計

Publications (2)

Publication Number Publication Date
JPS58169044A true JPS58169044A (ja) 1983-10-05
JPH029294B2 JPH029294B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-03-01

Family

ID=12918111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57052557A Granted JPS58169044A (ja) 1982-03-31 1982-03-31 定温度形ピラニ−真空計

Country Status (1)

Country Link
JP (1) JPS58169044A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01154441U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-04-18 1989-10-24
JPH0430056U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1990-06-29 1992-03-11
JP2009062096A (ja) * 2008-12-24 2009-03-26 Nitto Pack Kk 易開封性を有する袋状包装体

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01154441U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-04-18 1989-10-24
JPH0430056U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1990-06-29 1992-03-11
JP2009062096A (ja) * 2008-12-24 2009-03-26 Nitto Pack Kk 易開封性を有する袋状包装体

Also Published As

Publication number Publication date
JPH029294B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-03-01

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