JPS58168137U - Fixed probe board - Google Patents
Fixed probe boardInfo
- Publication number
- JPS58168137U JPS58168137U JP6593782U JP6593782U JPS58168137U JP S58168137 U JPS58168137 U JP S58168137U JP 6593782 U JP6593782 U JP 6593782U JP 6593782 U JP6593782 U JP 6593782U JP S58168137 U JPS58168137 U JP S58168137U
- Authority
- JP
- Japan
- Prior art keywords
- probes
- fixed probe
- probe board
- board
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、従来の固定プローブ・ボードの一例を示す下
面図、第２図は、半導体ウェハの表面図、第３図は、こ
の考案の固定プローブ・ボードの一実施例を示す下面図
、第４図は、そのＡ−Ｂ断面図、第５図は、そのプロー
ブの取付片の一実施例を示す支持表面図、第６図は、上
記取付片の他の一実施例を示す断面図である。 ′
１・・・プリント基板、２・・・配線、３・・・プロー
ブ、４・・・取付片、５・・・開口、６・・・固着層、
７・・・半田、８・・・半導体ウェハ。−
第３図
第５図FIG. 1 is a bottom view showing an example of a conventional fixed probe board, FIG. 2 is a surface view of a semiconductor wafer, and FIG. 3 is a bottom view showing an example of the fixed probe board of this invention. FIG. 4 is a sectional view taken along the line A-B, FIG. 5 is a support surface view showing one embodiment of the mounting piece of the probe, and FIG. 6 is a sectional view showing another embodiment of the above-mentioned mounting piece. It is. ' 1... Printed circuit board, 2... Wiring, 3... Probe, 4... Mounting piece, 5... Opening, 6... Fixed layer,
7...Solder, 8...Semiconductor wafer. - Figure 3 Figure 5
Claims (1)
隣接した２つの半導体チップの電極に、その接触端が位
置合され、全体として放射錐状に配列された複数のプロ
ーブと、上記複数のプローブの接続端がその配線に接続
され、上記プローブの接触端に対応する位置に１つの開
口が設けられたプリント基板と、上記プリント基板の下
面に設けられ、上記配列の下に複数のプローブを固定支
持する１つの取付片とを含むことを特徴とする固定プロ
ーブ・ボード。 ２ 上記取付片は、２つの円形のリングがそれぞれ半円
周より大きな円弧に切除されその切除部分で結合された
形状からなり、上記プリント基板の下面に対して一定の
鋭角とされたプローブ支持表面を有するものであること
を特徴とする実用新案登録請求の範囲第１項記載の固定
プローブ・ボード。[Claims for Utility Model Registration] 1. A plurality of probes formed on a semiconductor wafer, the contact ends of which are aligned with the electrodes of two diagonally adjacent semiconductor chips, and the probes are arranged in a radial cone shape as a whole. a printed circuit board having connection ends of the plurality of probes connected to the wiring and one opening provided at a position corresponding to the contact end of the probe; A fixed probe board comprising: a mounting piece for fixedly supporting a plurality of probes; 2 The mounting piece has a shape in which two circular rings are cut into arcs larger than a semicircle and joined together at the cut parts, and the probe support surface is formed at a certain acute angle with respect to the lower surface of the printed circuit board. A fixed probe board according to claim 1, characterized in that the fixed probe board has the following features.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6593782U JPS58168137U (en) | 1982-05-06 | 1982-05-06 | Fixed probe board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6593782U JPS58168137U (en) | 1982-05-06 | 1982-05-06 | Fixed probe board |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58168137U true JPS58168137U (en) | 1983-11-09 |
Family
ID=30075857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6593782U Pending JPS58168137U (en) | 1982-05-06 | 1982-05-06 | Fixed probe board |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58168137U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6428565A (en) * | 1987-05-29 | 1989-01-31 | Teradyne Inc | Probe for inspection of electronic component |
-
1982
- 1982-05-06 JP JP6593782U patent/JPS58168137U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6428565A (en) * | 1987-05-29 | 1989-01-31 | Teradyne Inc | Probe for inspection of electronic component |
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