JPS58167452A - 微小レンズ配列体の製造方法 - Google Patents
微小レンズ配列体の製造方法Info
- Publication number
- JPS58167452A JPS58167452A JP57050662A JP5066282A JPS58167452A JP S58167452 A JPS58167452 A JP S58167452A JP 57050662 A JP57050662 A JP 57050662A JP 5066282 A JP5066282 A JP 5066282A JP S58167452 A JPS58167452 A JP S58167452A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- refractive index
- ion
- substrate
- ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 claims abstract description 43
- 238000009826 distribution Methods 0.000 claims abstract description 12
- 150000002500 ions Chemical class 0.000 claims description 52
- 239000000758 substrate Substances 0.000 claims description 45
- 238000000034 method Methods 0.000 claims description 14
- 238000009792 diffusion process Methods 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 5
- 230000002265 prevention Effects 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 150000003839 salts Chemical class 0.000 abstract description 21
- 230000005684 electric field Effects 0.000 abstract description 7
- 239000000126 substance Substances 0.000 abstract description 2
- 230000002401 inhibitory effect Effects 0.000 abstract 1
- 238000005342 ion exchange Methods 0.000 description 6
- 239000013307 optical fiber Substances 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 4
- 239000010936 titanium Substances 0.000 description 3
- 229910002651 NO3 Inorganic materials 0.000 description 2
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 2
- -1 Tl+ ions Chemical class 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 239000004927 clay Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 235000010333 potassium nitrate Nutrition 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 2
- 229910000368 zinc sulfate Inorganic materials 0.000 description 2
- 239000011686 zinc sulphate Substances 0.000 description 2
- 235000009529 zinc sulphate Nutrition 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 1
- YTQVHRVITVLIRD-UHFFFAOYSA-L thallium sulfate Chemical compound [Tl+].[Tl+].[O-]S([O-])(=O)=O YTQVHRVITVLIRD-UHFFFAOYSA-L 0.000 description 1
- 229910000374 thallium(I) sulfate Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
- Surface Treatment Of Glass (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57050662A JPS58167452A (ja) | 1982-03-29 | 1982-03-29 | 微小レンズ配列体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57050662A JPS58167452A (ja) | 1982-03-29 | 1982-03-29 | 微小レンズ配列体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58167452A true JPS58167452A (ja) | 1983-10-03 |
| JPH0210783B2 JPH0210783B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-03-09 |
Family
ID=12865159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57050662A Granted JPS58167452A (ja) | 1982-03-29 | 1982-03-29 | 微小レンズ配列体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58167452A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60198501A (ja) * | 1983-12-05 | 1985-10-08 | ハネウエル・インコ−ポレ−テツド | 距離計用のオプトエレクトロニツク・パツケ−ジを製作する方法および距離計用のオプトエレクトロニツク・パツケ−ジ |
| JPS61168554A (ja) * | 1985-01-17 | 1986-07-30 | Seiko Epson Corp | 平板マイクロレンズの製造方法 |
| JPS61222943A (ja) * | 1985-03-29 | 1986-10-03 | Hoya Corp | 屈折率分布型レンズの製造法 |
| JPS61261238A (ja) * | 1985-05-13 | 1986-11-19 | Hoya Corp | 軸方向に屈折率分布を有するレンズの製造法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2643824C1 (ru) * | 2016-12-07 | 2018-02-06 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Кубанский государственный университет" (ФГБОУ ВО "КубГУ") | Способ изготовления интегральных микролинз |
-
1982
- 1982-03-29 JP JP57050662A patent/JPS58167452A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60198501A (ja) * | 1983-12-05 | 1985-10-08 | ハネウエル・インコ−ポレ−テツド | 距離計用のオプトエレクトロニツク・パツケ−ジを製作する方法および距離計用のオプトエレクトロニツク・パツケ−ジ |
| JPS61168554A (ja) * | 1985-01-17 | 1986-07-30 | Seiko Epson Corp | 平板マイクロレンズの製造方法 |
| JPS61222943A (ja) * | 1985-03-29 | 1986-10-03 | Hoya Corp | 屈折率分布型レンズの製造法 |
| JPS61261238A (ja) * | 1985-05-13 | 1986-11-19 | Hoya Corp | 軸方向に屈折率分布を有するレンズの製造法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0210783B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-03-09 |