JPS58167450U - 高周波プラズマ分析装置 - Google Patents

高周波プラズマ分析装置

Info

Publication number
JPS58167450U
JPS58167450U JP6439782U JP6439782U JPS58167450U JP S58167450 U JPS58167450 U JP S58167450U JP 6439782 U JP6439782 U JP 6439782U JP 6439782 U JP6439782 U JP 6439782U JP S58167450 U JPS58167450 U JP S58167450U
Authority
JP
Japan
Prior art keywords
carrier gas
mass flow
frequency plasma
flow controller
plasma analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6439782U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6317001Y2 (enExample
Inventor
秀雄 服部
水上　治男
浅田　庄太郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP6439782U priority Critical patent/JPS58167450U/ja
Publication of JPS58167450U publication Critical patent/JPS58167450U/ja
Application granted granted Critical
Publication of JPS6317001Y2 publication Critical patent/JPS6317001Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP6439782U 1982-04-30 1982-04-30 高周波プラズマ分析装置 Granted JPS58167450U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6439782U JPS58167450U (ja) 1982-04-30 1982-04-30 高周波プラズマ分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6439782U JPS58167450U (ja) 1982-04-30 1982-04-30 高周波プラズマ分析装置

Publications (2)

Publication Number Publication Date
JPS58167450U true JPS58167450U (ja) 1983-11-08
JPS6317001Y2 JPS6317001Y2 (enExample) 1988-05-13

Family

ID=30074427

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6439782U Granted JPS58167450U (ja) 1982-04-30 1982-04-30 高周波プラズマ分析装置

Country Status (1)

Country Link
JP (1) JPS58167450U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61140950U (enExample) * 1985-02-22 1986-09-01
JP2007114063A (ja) * 2005-10-20 2007-05-10 Horiba Ltd ネブライザ及び試料液霧化装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61140950U (enExample) * 1985-02-22 1986-09-01
JP2007114063A (ja) * 2005-10-20 2007-05-10 Horiba Ltd ネブライザ及び試料液霧化装置

Also Published As

Publication number Publication date
JPS6317001Y2 (enExample) 1988-05-13

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