JPS58165312A - Method of producing laminated ceramic condenser - Google Patents

Method of producing laminated ceramic condenser

Info

Publication number
JPS58165312A
JPS58165312A JP4849282A JP4849282A JPS58165312A JP S58165312 A JPS58165312 A JP S58165312A JP 4849282 A JP4849282 A JP 4849282A JP 4849282 A JP4849282 A JP 4849282A JP S58165312 A JPS58165312 A JP S58165312A
Authority
JP
Japan
Prior art keywords
laminated
green sheets
ceramic
laminate
reduced pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4849282A
Other languages
Japanese (ja)
Inventor
秀男 高見沢
布田 良明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP4849282A priority Critical patent/JPS58165312A/en
Publication of JPS58165312A publication Critical patent/JPS58165312A/en
Pending legal-status Critical Current

Links

Landscapes

  • Ceramic Capacitors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 本発明は積層セラミックコンデンサーの製造方法に関し
、さらに、詳細には、セラミック未焼成積層圧着体の製
造方@に関するものである。。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a laminated ceramic capacitor, and more particularly, to a method for manufacturing a pressed ceramic unfired laminated body. .

従来、積層セラミックコンデンサーにおける未焼成積層
圧着体の製造方法は、パンチングされたセラミックグリ
ーンシートとほぼ同一寸法の金製内に、セラミックグリ
ーンシートのダミ一層を上。
Conventionally, the method for manufacturing a green pressed laminated body for a laminated ceramic capacitor is to place a dummy layer of ceramic green sheets on top of a gold plate with approximately the same dimensions as the punched ceramic green sheets.

)として、その中間に内部電極パターンを有するセラミ
ッククリーンシートを所要の枚数、互いに対向電極とな
る橡に積層し、しかる後圧、金製内部の積層体を上、下
の可動バンチを介して機械的に加圧し、積層圧着体とす
るのが一般的であシ、圧着性向上のため加圧と同時に加
熱する場合が多い。次Kllられた積層圧着体を所定の
形状に切断し、焼成、外部電極焼付は処理を施して、積
層セライックコンデンナーを得る。
), the required number of ceramic clean sheets with an internal electrode pattern in the middle are laminated on the squares that serve as opposing electrodes, and after applying pressure, the laminated body made of gold inside is machined through upper and lower movable bunches. It is common to apply pressure to form a laminated press-bonded body, and in many cases heat is applied at the same time as pressurization to improve the pressability. Next, the pressed laminated body is cut into a predetermined shape, and subjected to firing and external electrode baking to obtain a laminated ceric condenser.

通常、セラミックグリーンシートは、セラばツク黴扮末
を有**脂成分で結合させたもので、数重量う、の有−
バインダーが含まれ、セラミッククリーンシート自体に
通気性はない。したがって、金!内への竜うZツクグリ
ーンシートのセツティングの際、各積層シート間に、空
気)k!INした状態で積層した場合、次の加熱、加圧
による積層圧着体内部工11&Cおいても圧着体内部の
シート間隙に空気が残留する場合がある。この様な残留
空気は、積層圧着体内部で部分的な圧着不良(デラミネ
ーシ■ン)箇所とな)、仁のデラずネーシ■yは焼成後
、クラック状を呈し、最終的に積層セライックコンデン
サーの検査工程で不良品となり、製造歩留り、および信
頼性が低下するという欠点があった。
Ceramic green sheets are usually made of ceramic powder bound with a fat component, and contain several weight particles.
Contains a binder, and the ceramic clean sheet itself has no air permeability. Therefore, gold! When setting up the inward Z-tsuku green sheets, there is air between each laminated sheet)k! When laminated in the IN state, air may remain in the sheet gap inside the crimped body even during the next internal processing of the laminate crimped body 11&C by heating and pressurizing. Such residual air may cause partial crimping failure (delamination) inside the laminated crimped body, and cracks will appear after firing, eventually causing damage to the laminated ceramic capacitor. This had the disadvantage that it resulted in defective products during the inspection process, lowering manufacturing yield and reliability.

さらに、製造コストダウンに伴なうグリーンシートや金
型内径の大面積化および、積層上クイックコンデンサー
の大容量化の要求に伴なう積層数の増加は、前述の積層
工程において、グリーンシート間隙に残留する空気の積
層圧着体内部への残留確率を大きくする事は必然であり
、デラミネーシ田−ンによる製造歩留シ、信頼性の低下
を助長する結果となる。
Furthermore, the increase in the number of laminated layers due to the increase in the inner diameter of green sheets and molds due to the reduction in manufacturing costs, as well as the demand for large capacity quick capacitors on lamination, has resulted in the gap between green sheets being increased in the above-mentioned lamination process. It is inevitable that the probability that air remaining in the laminate will remain inside the laminate is increased, resulting in a reduction in manufacturing yield and reliability due to delamination fields.

本発明は、積層圧着体内部の残留空気に起因するデラミ
ネーシ習ンを解消し、製造歩留り、信頼性の良好な積層
セラミックコンデンサーの製造方法を提供するものであ
る。
The present invention provides a method for manufacturing a multilayer ceramic capacitor with good manufacturing yield and reliability by eliminating delamination caused by residual air inside the laminated crimped body.

本発明は、まず、金型内にセラミックグリーンシートと
内部電極パターンを有するセラミックグリーンシートを
所要の枚数′帯層した後、金型全体を真空容器へ入れて
これを減圧状態に一定時間保持する。ここで、減圧状態
が高真空である根、残留空気の除去に効果があるので、
101腸H#以下O真空度が曹ましい。又、保持時間は
、長時間である程効果的なので、sO分以上とすること
が望ましい。次に、減圧雰囲気下において、金型の上下
可動パンチを介して積層体に機械的圧力を加え、積層圧
着体を製造する0機械的圧力の強さは、金一単位面積当
シー50−〜450(−の範囲が圧着性が良好であり、
又、加圧と同w#に2Ill熱する場合、グリーンシー
ト中の有機物質の種類、量に影響されるもので69.8
0℃〜120℃位が圧着性に対し効果がある。また、減
圧雰囲気から、常圧雰囲気に戻す通機で積層されたグリ
ーンシート間隙に空気の侵入を防止すれば、常圧雰囲気
に戻してから機械的圧力を加えても、減圧雰囲気におけ
るのと同様の効果が得られる。
In the present invention, first, a required number of ceramic green sheets and ceramic green sheets having internal electrode patterns are layered in a mold, and then the entire mold is placed in a vacuum container and kept in a reduced pressure state for a certain period of time. . Here, the reduced pressure state is a high vacuum, so it is effective in removing residual air.
101 intestine H# or less O vacuum degree is poor. Further, since the longer the retention time is, the more effective it is, it is desirable to set it to sO minutes or more. Next, in a reduced pressure atmosphere, mechanical pressure is applied to the laminate through the vertically movable punch of the mold to produce a laminate crimped body. 450 (− range means good crimpability,
Also, when heating 2Ill to the same w# as pressurizing, it is 69.8 as it is affected by the type and amount of organic substances in the green sheet.
A temperature of about 0°C to 120°C is effective for pressure bonding properties. In addition, if air is prevented from entering the gap between the stacked green sheets by passing through a machine that returns from a reduced pressure atmosphere to a normal pressure atmosphere, even if mechanical pressure is applied after returning to a normal pressure atmosphere, it will be the same as in a reduced pressure atmosphere. The effect of this can be obtained.

以下、本実@を実施例によ)説明する。Hereinafter, the actual results will be explained using examples.

セラミックー一体としてFb(Fe郊(−(1)(Pb
牙Nbち)卵!への組成を有す本質14費末を、有機ベ
ヒクル中に均一1、 分散し、泥漿とし、ドクターブレード法によシ巾150
 m厚みSOIkxmのセライックグリーンシートを作
成した。
Fb (Fe-(1) (Pb
Fang Nbchi) Egg! The essence having the composition of
A ceramic green sheet with a thickness of SOIkxm was prepared.

泥漿及びグリーンシート組成をIIEI表に示す。The slurry and green sheet compositions are shown in Table IIII.

第  1−!R 次に、120纒x150腸の寸法にパンチングされたグ
リーンシート上に、パラジウム15重量饅−銀残部を金
属成分とする電極ペーストをスクリーン印祠する事によ
シ、内部電極パターンを便数個形成した。金型内への積
層は、上、下台10枚のセラミックグリーンシートとそ
の中間に内部電極パターンを有するセラミックグリーン
シートを51枝とした。本発明による減圧雰囲気及び機
械的加圧装置の概略を第1図に示す。−置は真空系と機
械的加圧系に大別でき、それぞれ市販品を利用できる。
1st-! R Next, several internal electrode patterns were formed by screen-imprinting an electrode paste containing 15% palladium and the rest silver as metal components on a green sheet punched to a size of 120mm x 150mm. did. The stacking inside the mold consisted of 10 upper and lower ceramic green sheets and 51 ceramic green sheets having an internal electrode pattern in the middle. FIG. 1 schematically shows a reduced pressure atmosphere and mechanical pressurization device according to the present invention. - The equipment can be broadly divided into vacuum systems and mechanical pressure systems, and commercially available products are available for each.

第1図において、支持台す上に設置された真空谷器a内
に、セラミックグリーンシートな積層させた金層ダイf
を七ットし、容Daの上方のパルプを通して排気して5
×10″−Htの真空度でSO分間保持後、金層下部ヒ
ーターにより、金型全体を120℃に2IEI熟し、単
位面積当シ2504/cslの機械的圧力を、圧力支持
台dK支見られた上パンチ@に向けてプレス機のラムc
K’4i付けられた下バンチXtl−移動させることに
よシ1両セライックグリーンシートからなる積層体hK
加え、50分間保持する事によ〕、積層圧着体とした。
In Fig. 1, a gold layer die f laminated with ceramic green sheets is placed in a vacuum valley device a installed on a support stand.
7 tons and exhaust through the pulp above the volume Da.
After holding the SO for a minute at a vacuum level of ×10″-Ht, the entire mold was heated to 120°C for 2IEI using a heater below the gold layer, and a mechanical pressure of 2504/csl per unit area was applied to the pressure support stand dK. The ram of the press towards the upper punch @c
K'4i lower bunch
In addition, by holding for 50 minutes], a laminated and pressed body was obtained.

次に切断工程で、積層圧着体1セツトを40分割し、未
焼成積層セ5う(ツクコンデンサーとし、大気中?00
℃×5時間焼成し、外部電極を焼付けて積層セラ建ツク
コンデンナーとした。これの一層当シの内部型1m面積
は、14・■X &4amで積層数50層よ)算出した
設計審■値は#J70μFである。
Next, in the cutting process, one set of laminated crimped bodies was divided into 40 parts, and the unfired laminated bodies were cut into 5 pieces (as condensers) and placed in the atmosphere.
C. for 5 hours, and the external electrodes were baked to form a laminated ceramic condenser. The 1m area of this inner mold is 14 x &4am, and the number of layers is 50.)The calculated design evaluation value is #J70μF.

本発@による―途方機と比験して従来法による製造の紬
11vII2111に示す。製造数量は各水準。
According to the original @ - In comparison with Doubunki, Tsumugi 11vII 2111 manufactured by the conventional method is shown. Manufacturing quantity varies at each level.

積層圧着体て10セツト、積層セラミツクコンデンナ−
として番400ケである。
10 sets of laminated crimped bodies, laminated ceramic condenser
The number is 400.

#I2表 ぽ 表から明らかに、本発明のal・遣方法によれば、切断
工程や焼成工程においてリデラミネーシ謬ンやクラック
による不良発生が皆無であ)、趣終倹食工mKおける特
性不良数も減少した。これは明らかに減圧雰囲気による
積層体外部への空気の除で発生する不良は、セラミック
グリーンシート内部の微小欠陥が原因と考えられるので
、本発明の製造方法の効果の及ばない範囲で、不良発生
率は。
#I2 It is clear from Table 1 that according to the aluminum/dispensing method of the present invention, there is no occurrence of defects due to redelamining errors or cracks in the cutting process or firing process), and the number of characteristic defects in the end-of-life process mK. It also decreased. This clearly indicates that the defects that occur due to the removal of air to the outside of the laminate due to the reduced pressure atmosphere are thought to be caused by minute defects inside the ceramic green sheets. The rate is.

従来法と同等である。It is equivalent to the conventional method.

以上述べたよう忙、本実明忙よる製造方法によれば、積
層圧着体内部の残留空気忙起因するデラミネーシ習ンや
クラックを解消でき、製造歩留シ、及び信頼性の向上し
た積層セラミックコンデンサーを提供することができる
効果を有するものである。
As described above, according to the manufacturing method according to the present invention, delamination and cracks caused by residual air inside the laminated crimped body can be eliminated, and the manufacturing yield and reliability are improved. It has the effect of providing the following benefits.

【図面の簡単な説明】[Brief explanation of the drawing]

早1図は1本発明による製造方法で使用された減圧雰囲
気および機械的加圧装置の概略を示す。 1′・ aは真空容器、ヤは全体の支持台、Cは1!I緘的圧力
を加えるブレ、:へ機のラム、dは圧力支持台、eは金
型上パンチ、fは金型ダイ、gは金型下パンチ、hは積
層体を示す。
Figure 1 schematically shows the reduced pressure atmosphere and mechanical pressurization device used in the manufacturing method according to the present invention. 1'・a is the vacuum container, y is the entire support base, and C is 1! I: The ram of the machine, d: pressure support, e: punch above the mold, f: die, g: punch below the mold, h: laminate.

Claims (1)

【特許請求の範囲】[Claims] (υセラミックグリーンシート及び内部電極パターンを
有するセラミックグリーンシート突うなる積層体を減圧
雰囲気中に一定時間置き、しかる後に、減圧又は常圧3
111気中で、積層体を機械的に加圧することを特徴と
する積層セラきツクコンデ −ンサーの製造方法。
(υ Ceramic green sheets and a laminate of ceramic green sheets having internal electrode patterns are placed in a reduced pressure atmosphere for a certain period of time, and then the laminate is placed in a reduced pressure atmosphere or at normal pressure.
1. A method for manufacturing a laminated ceramic capacitor, which comprises mechanically pressurizing a laminated body in air.
JP4849282A 1982-03-25 1982-03-25 Method of producing laminated ceramic condenser Pending JPS58165312A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4849282A JPS58165312A (en) 1982-03-25 1982-03-25 Method of producing laminated ceramic condenser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4849282A JPS58165312A (en) 1982-03-25 1982-03-25 Method of producing laminated ceramic condenser

Publications (1)

Publication Number Publication Date
JPS58165312A true JPS58165312A (en) 1983-09-30

Family

ID=12804877

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4849282A Pending JPS58165312A (en) 1982-03-25 1982-03-25 Method of producing laminated ceramic condenser

Country Status (1)

Country Link
JP (1) JPS58165312A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60257509A (en) * 1984-06-04 1985-12-19 松下電器産業株式会社 Method of laminating sheet

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60257509A (en) * 1984-06-04 1985-12-19 松下電器産業株式会社 Method of laminating sheet
JPH0423810B2 (en) * 1984-06-04 1992-04-23 Matsushita Electric Ind Co Ltd

Similar Documents

Publication Publication Date Title
KR920009176B1 (en) Method of manufacturing multi-layer capacitor
EP0137565B1 (en) Multilayer ceramic capacitor
JP4359914B2 (en) Multilayer electronic component and manufacturing method thereof
JPH07122455A (en) Manufacture of multilayered ceramic electronic component
JP2742414B2 (en) Manufacturing method of multilayer ceramic electronic component
JPS58165312A (en) Method of producing laminated ceramic condenser
JPH0766076A (en) Manufacture of laminated chip component and laminated chip component
JP2003347146A (en) Multilayer ceramic capacitor and its manufacturing method
JP2018113300A (en) Manufacturing method of multilayer electronic component
JPH0997733A (en) Manufacture of laminated ceramic component
TWI752895B (en) Method for manufacturing multi-layer ceramic capacitor
JP2969670B2 (en) Manufacturing method of multilayer ceramic capacitor
JPS61253811A (en) Manufacture of laminate ceramic capacitor
JPS63188927A (en) Manufacture of laminated ceramic electronic component
JPH08316093A (en) Laminated ceramic electronic component manufacturing method
JPS607711A (en) Laminated ceramic condenser and method of producing same
JP3094769B2 (en) Manufacturing method of multilayer ceramic capacitor
JPS63188926A (en) Manufacture of laminated porcelain capacitor
JP2996049B2 (en) Manufacturing method of multilayer ceramic electronic component
JP4321200B2 (en) Manufacturing method of multilayer ceramic electronic component
JPH0234162B2 (en)
JPH04282811A (en) Manufacture of laminated ceramic capacitor
JP4617691B2 (en) Manufacturing method of multilayer ceramic electronic component
JP2964689B2 (en) Manufacturing method of multilayer ceramic capacitor
JPS6149842A (en) Manufacture of laminating type ceramic part