JPS5815936B2 - シユウセキカイロ ノ マスクセツケイソウチ - Google Patents

シユウセキカイロ ノ マスクセツケイソウチ

Info

Publication number
JPS5815936B2
JPS5815936B2 JP47033265A JP3326572A JPS5815936B2 JP S5815936 B2 JPS5815936 B2 JP S5815936B2 JP 47033265 A JP47033265 A JP 47033265A JP 3326572 A JP3326572 A JP 3326572A JP S5815936 B2 JPS5815936 B2 JP S5815936B2
Authority
JP
Japan
Prior art keywords
mask
light
information processing
data
diffusion process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47033265A
Other languages
English (en)
Japanese (ja)
Other versions
JPS48101883A (enrdf_load_stackoverflow
Inventor
杉山尚志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP47033265A priority Critical patent/JPS5815936B2/ja
Publication of JPS48101883A publication Critical patent/JPS48101883A/ja
Publication of JPS5815936B2 publication Critical patent/JPS5815936B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP47033265A 1972-04-03 1972-04-03 シユウセキカイロ ノ マスクセツケイソウチ Expired JPS5815936B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47033265A JPS5815936B2 (ja) 1972-04-03 1972-04-03 シユウセキカイロ ノ マスクセツケイソウチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47033265A JPS5815936B2 (ja) 1972-04-03 1972-04-03 シユウセキカイロ ノ マスクセツケイソウチ

Publications (2)

Publication Number Publication Date
JPS48101883A JPS48101883A (enrdf_load_stackoverflow) 1973-12-21
JPS5815936B2 true JPS5815936B2 (ja) 1983-03-28

Family

ID=12381677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47033265A Expired JPS5815936B2 (ja) 1972-04-03 1972-04-03 シユウセキカイロ ノ マスクセツケイソウチ

Country Status (1)

Country Link
JP (1) JPS5815936B2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5030465B2 (enrdf_load_stackoverflow) * 1971-09-28 1975-10-01
JPS522758B2 (enrdf_load_stackoverflow) * 1972-04-21 1977-01-24

Also Published As

Publication number Publication date
JPS48101883A (enrdf_load_stackoverflow) 1973-12-21

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