JPS58154280A - トンネル形ジヨセフソン素子の作製方法 - Google Patents
トンネル形ジヨセフソン素子の作製方法Info
- Publication number
- JPS58154280A JPS58154280A JP57037792A JP3779282A JPS58154280A JP S58154280 A JPS58154280 A JP S58154280A JP 57037792 A JP57037792 A JP 57037792A JP 3779282 A JP3779282 A JP 3779282A JP S58154280 A JPS58154280 A JP S58154280A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- thin film
- tunnel
- oxidation
- base electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000010409 thin film Substances 0.000 claims abstract description 42
- 230000003647 oxidation Effects 0.000 claims abstract description 35
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 35
- 230000004888 barrier function Effects 0.000 claims abstract description 34
- 238000000034 method Methods 0.000 claims abstract description 31
- 229910052733 gallium Inorganic materials 0.000 claims abstract description 7
- 238000004140 cleaning Methods 0.000 claims description 17
- 230000007547 defect Effects 0.000 abstract description 7
- 238000004544 sputter deposition Methods 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 4
- 229910020830 Sn-Bi Inorganic materials 0.000 abstract 1
- 229910018728 Sn—Bi Inorganic materials 0.000 abstract 1
- 229910052718 tin Inorganic materials 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 57
- 239000010408 film Substances 0.000 description 28
- 239000002585 base Substances 0.000 description 25
- 239000000758 substrate Substances 0.000 description 19
- 150000001875 compounds Chemical class 0.000 description 14
- 230000005641 tunneling Effects 0.000 description 13
- 230000000694 effects Effects 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000007796 conventional method Methods 0.000 description 7
- 239000002887 superconductor Substances 0.000 description 6
- 239000000956 alloy Substances 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- SMCVJROYJICEKJ-UHFFFAOYSA-N 2-hydroxypropanoic acid;nitric acid Chemical compound O[N+]([O-])=O.CC(O)C(O)=O SMCVJROYJICEKJ-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 241000254032 Acrididae Species 0.000 description 1
- 241000473391 Archosargus rhomboidalis Species 0.000 description 1
- 238000005773 Enders reaction Methods 0.000 description 1
- 229910019788 NbF3 Inorganic materials 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 229910000978 Pb alloy Inorganic materials 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 101150004141 Vcan gene Proteins 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 201000010099 disease Diseases 0.000 description 1
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002362 mulch Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 235000012149 noodles Nutrition 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 238000000527 sonication Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000011269 tar Substances 0.000 description 1
- 235000012976 tarts Nutrition 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57037792A JPS58154280A (ja) | 1982-03-10 | 1982-03-10 | トンネル形ジヨセフソン素子の作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57037792A JPS58154280A (ja) | 1982-03-10 | 1982-03-10 | トンネル形ジヨセフソン素子の作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58154280A true JPS58154280A (ja) | 1983-09-13 |
| JPS6258676B2 JPS6258676B2 (enrdf_load_stackoverflow) | 1987-12-07 |
Family
ID=12507341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57037792A Granted JPS58154280A (ja) | 1982-03-10 | 1982-03-10 | トンネル形ジヨセフソン素子の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58154280A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0311675A (ja) * | 1989-06-08 | 1991-01-18 | Agency Of Ind Science & Technol | ジョセフソン接合素子の製造方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04101917U (ja) * | 1991-02-04 | 1992-09-02 | 日本電信電話株式会社 | 磁気カード |
-
1982
- 1982-03-10 JP JP57037792A patent/JPS58154280A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0311675A (ja) * | 1989-06-08 | 1991-01-18 | Agency Of Ind Science & Technol | ジョセフソン接合素子の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6258676B2 (enrdf_load_stackoverflow) | 1987-12-07 |
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