JPS5814839A - 投影露光装置 - Google Patents

投影露光装置

Info

Publication number
JPS5814839A
JPS5814839A JP56113310A JP11331081A JPS5814839A JP S5814839 A JPS5814839 A JP S5814839A JP 56113310 A JP56113310 A JP 56113310A JP 11331081 A JP11331081 A JP 11331081A JP S5814839 A JPS5814839 A JP S5814839A
Authority
JP
Japan
Prior art keywords
film
exposed
thickness
holes
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56113310A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0428099B2 (enrdf_load_stackoverflow
Inventor
Hide Miyazaki
宮崎　秀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Metal Mining Co Ltd
Original Assignee
Sumitomo Metal Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Mining Co Ltd filed Critical Sumitomo Metal Mining Co Ltd
Priority to JP56113310A priority Critical patent/JPS5814839A/ja
Publication of JPS5814839A publication Critical patent/JPS5814839A/ja
Publication of JPH0428099B2 publication Critical patent/JPH0428099B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Projection-Type Copiers In General (AREA)
JP56113310A 1981-07-20 1981-07-20 投影露光装置 Granted JPS5814839A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56113310A JPS5814839A (ja) 1981-07-20 1981-07-20 投影露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56113310A JPS5814839A (ja) 1981-07-20 1981-07-20 投影露光装置

Publications (2)

Publication Number Publication Date
JPS5814839A true JPS5814839A (ja) 1983-01-27
JPH0428099B2 JPH0428099B2 (enrdf_load_stackoverflow) 1992-05-13

Family

ID=14608989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56113310A Granted JPS5814839A (ja) 1981-07-20 1981-07-20 投影露光装置

Country Status (1)

Country Link
JP (1) JPS5814839A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6490099A (en) * 1987-10-01 1989-04-05 Kaneyuki Suzuki Night soil treating device
JPH0724837B2 (ja) * 1984-09-13 1995-03-22 アクセルロッド、バ−トン 廃棄物の処理方法および装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4720843U (enrdf_load_stackoverflow) * 1971-03-18 1972-11-09
JPS51942U (enrdf_load_stackoverflow) * 1974-03-30 1976-01-07
JPS513621A (en) * 1974-06-28 1976-01-13 Shigeru Usami Reriifusakuseihoho
JPS5636179U (enrdf_load_stackoverflow) * 1979-08-28 1981-04-07
JPS5667984A (en) * 1979-11-09 1981-06-08 Fujitsu Ltd Method of printing printed board

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4720843U (enrdf_load_stackoverflow) * 1971-03-18 1972-11-09
JPS51942U (enrdf_load_stackoverflow) * 1974-03-30 1976-01-07
JPS513621A (en) * 1974-06-28 1976-01-13 Shigeru Usami Reriifusakuseihoho
JPS5636179U (enrdf_load_stackoverflow) * 1979-08-28 1981-04-07
JPS5667984A (en) * 1979-11-09 1981-06-08 Fujitsu Ltd Method of printing printed board

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0724837B2 (ja) * 1984-09-13 1995-03-22 アクセルロッド、バ−トン 廃棄物の処理方法および装置
JPS6490099A (en) * 1987-10-01 1989-04-05 Kaneyuki Suzuki Night soil treating device

Also Published As

Publication number Publication date
JPH0428099B2 (enrdf_load_stackoverflow) 1992-05-13

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