JPS58147610A - Optical measuring device - Google Patents
Optical measuring deviceInfo
- Publication number
- JPS58147610A JPS58147610A JP3091382A JP3091382A JPS58147610A JP S58147610 A JPS58147610 A JP S58147610A JP 3091382 A JP3091382 A JP 3091382A JP 3091382 A JP3091382 A JP 3091382A JP S58147610 A JPS58147610 A JP S58147610A
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical waveguide
- optical
- signal
- glass fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 32
- 239000006096 absorbing agent Substances 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 239000003365 glass fiber Substances 0.000 abstract description 7
- 239000011521 glass Substances 0.000 abstract description 4
- 239000000758 substrate Substances 0.000 abstract description 4
- 239000002360 explosive Substances 0.000 abstract description 3
- 239000013307 optical fiber Substances 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 238000009530 blood pressure measurement Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
Abstract
Description
【発明の詳細な説明】 本発明は光学的測定装置に駒する。[Detailed description of the invention] The present invention applies to an optical measuring device.
本発明の目的は圧力、温度等の物理酌量を、電気的、磁
気的な外来ノイズの影智を受けず、また、爆発性雰囲気
中においても安全に測定できる、光学的手段による物理
量測定装置を提供することである。The object of the present invention is to provide a physical quantity measuring device using optical means, which can safely measure physical extenuating quantities such as pressure and temperature without being influenced by external electrical or magnetic noise, and even in an explosive atmosphere. It is to provide.
本発明は光導波路と、光導波路へ光源より光を導入する
手段と、光導波路を通過した光を導出する光導出手段と
、この光導出手段より導出された光を入力信号とする光
電気変換手段と、上記光導波路に接近して設けられた光
吸収体とを有し、その光吸収体に作用する物理量により
上記入力信号の大きさが変化するよう構成されている。The present invention relates to an optical waveguide, a means for introducing light from a light source into the optical waveguide, a light deriving means for deriving the light that has passed through the optical waveguide, and a photoelectric conversion using the light derived from the light deriving means as an input signal. and a light absorber provided close to the optical waveguide, and is configured such that the magnitude of the input signal changes depending on a physical quantity acting on the light absorber.
以下に、本発明を圧力測定に応用した場合の実施例を図
に基づいて説明する。第１図は本実施例の構成図である
。図において発光ダイオードを用いた光源ｌより光ファ
イバを通じて光導波Ｍ３に導入された光は、光導波路表
面に接する空間およびガラス基板５との境界面で、全反
射を繰り返しなから光導出手段であるガラスファイバー
７へ向って進行するか、全反射に際して光導波路３の上
方９間部と、下方ガラス基板５の中へ、僅かな光の浸み
出しが生じる（第２Ｊｌ！Ｊｏ図番こおいて２は空間座
標、Ｘは光の強度を示す。）。空間側へ浸み出した元は
この光浸み出し領域へはみ出した形で設けられた、光吸
収体から成る感圧ダイアフラム４にその一部が吸収され
る。光浸み出し像域への感圧ダイアフラム４のはみ出し
ｈは感圧ダイアフラムにかかる圧力ｒに依存するので、
光導波路３をガラスファイバー７に向う光の量は圧力に
よって変化する。第３図は感圧ダイアフラム４の、光浸
み出し領域のはみ出しを説明する模式図である。An example in which the present invention is applied to pressure measurement will be described below with reference to the drawings. FIG. 1 is a configuration diagram of this embodiment. In the figure, the light introduced into the optical waveguide M3 through the optical fiber from the light source l using a light emitting diode is repeatedly totally reflected in the space in contact with the optical waveguide surface and the interface with the glass substrate 5, so it is a light guiding means. A slight amount of light leaks out into the upper part of the optical waveguide 3 and into the lower glass substrate 5 when it travels toward the glass fiber 7 or is totally reflected. 2 indicates the spatial coordinate, and X indicates the intensity of light.) A portion of the light that has leaked out into the space is absorbed by the pressure sensitive diaphragm 4, which is made of a light absorber and is provided so as to protrude into this light leakage region. Since the protrusion h of the pressure sensitive diaphragm 4 into the light seepage image area depends on the pressure r applied to the pressure sensitive diaphragm,
The amount of light passing through the optical waveguide 3 toward the glass fiber 7 changes depending on the pressure. FIG. 3 is a schematic diagram illustrating the protrusion of the light seepage area of the pressure sensitive diaphragm 4.
図において１０は光浸み出し領域を示す。この光信号は
、光導出手段である上記のガラスファイバー７を通じて
導比され、光ダイオード８で電気信号に変換された後、
増幅器９で増幅され、圧力測定信号として取り出される
。In the figure, 10 indicates a light seepage area. This optical signal is guided through the above-mentioned glass fiber 7, which is a light guiding means, and converted into an electric signal by a photodiode 8, and then
It is amplified by an amplifier 9 and taken out as a pressure measurement signal.
また本発明を温度測定用に応用した場合の実施例を第４
図および第５図に基づいて説明する。第４図は、本発明
を圧力測定用に実施した場合のダイアフラムに代って、
バイメタル１３を光導波路に接近して設けた状態を示し
ている。本実施例においてバイメタル１３は、第５因に
示すように温度上昇に伴って光導波路３に凸面を向けて
一曲するよう取り付けられている。バイメタル１３の、
この凸面側表面には光吸収体１４が貼着されていて、こ
の部分か光導波ｗ１１３の光浸み出し領域１０にはみ出
している。尚、図において１１および１２はバイメタル
１３を構成する２種類の金属を示している。以上の構成
において、光吸収体１４の、光浸み出し領域１０へのは
み出し量か温度によって変化し、これが光導岐路３を通
過する光量に変化を与える。この光信号を電気信号に変
換して温度測定か行われる。In addition, the fourth embodiment shows an example in which the present invention is applied to temperature measurement.
This will be explained based on the figure and FIG. FIG. 4 shows, in place of the diaphragm, when the invention is implemented for pressure measurement.
A state in which the bimetal 13 is provided close to the optical waveguide is shown. In this embodiment, the bimetal 13 is attached so that the convex surface faces the optical waveguide 3 and bends as the temperature rises, as shown in the fifth factor. bimetal 13,
A light absorber 14 is attached to this convex surface, and this portion protrudes into the light seepage region 10 of the optical waveguide w113. In the figure, 11 and 12 indicate two types of metals forming the bimetal 13. In the above configuration, the amount of protrusion of the light absorber 14 into the light seepage region 10 changes depending on the temperature, and this changes the amount of light passing through the light guide path 3. This optical signal is converted into an electrical signal to measure temperature.
以上のように、本発明によれは、電気的および磁気的な
外来ノイズに影脅されることもなく、また、有害性また
は爆発性の雰囲気中でも安全に物理量の測定かできる、
光学的測定装置が得られる。As described above, according to the present invention, physical quantities can be measured safely even in a toxic or explosive atmosphere without being affected by external electrical and magnetic noise.
An optical measuring device is obtained.
第１図および第４図は本発明実施例の構成図、第３図お
よび第５図は本発明実施例の作用、説明図、第２図は、
光導波路内外の光強度分布を示す図である。
ｌ・・・光源、２．７・・・ガラスファイバー、３・・
・光導岐路、４・・・感圧ダイアフラム、５・・・光導
波路ガラス基板、８・・・九ダイオード、９・・・増幅
器、１０・−・導波路の光浸み出し領域、１１．１２・
−・バイメタル構成金属、１３・−・バイメタル、１４
・−・光吸収体。
特許出願人
株式会社島津製作所
代理人 西１）新1 and 4 are configuration diagrams of the embodiment of the present invention, FIGS. 3 and 5 are operation and explanatory diagrams of the embodiment of the present invention, and FIG.
FIG. 3 is a diagram showing a light intensity distribution inside and outside an optical waveguide. l...Light source, 2.7...Glass fiber, 3...
- Optical branch, 4... Pressure sensitive diaphragm, 5... Optical waveguide glass substrate, 8... Nine diodes, 9... Amplifier, 10... Light seepage area of waveguide, 11.12・
- Bimetal constituent metal, 13 - Bimetal, 14
・−・Light absorber. Patent applicant Shimadzu Corporation Agent Nishi 1) Arata
Claims (1)
光導波路を通過した光を導出する光導出手段と、この光
導出手段より導出された光を入力光信号とする光電気変
換手段と、上記光導波路に接近して設けられた光吸収体
とを有し、その光吸収体に作用する物理量により上記入
力信号の大きさか変化するよう構成された光学的測定装
置。an optical waveguide, a means for introducing light from a light source into the optical waveguide,
A light guiding means for guiding the light that has passed through the optical waveguide, a photoelectric conversion means that uses the light guided by the light guiding means as an input optical signal, and a light absorber provided close to the optical waveguide. an optical measuring device comprising: an optical measuring device configured such that the magnitude of the input signal changes depending on a physical quantity acting on the light absorber;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3091382A JPS58147610A (en) | 1982-02-26 | 1982-02-26 | Optical measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3091382A JPS58147610A (en) | 1982-02-26 | 1982-02-26 | Optical measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58147610A true JPS58147610A (en) | 1983-09-02 |
Family
ID=12316934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3091382A Pending JPS58147610A (en) | 1982-02-26 | 1982-02-26 | Optical measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58147610A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5199049A (en) * | 1975-02-10 | 1976-09-01 | Shiro Okamura | |
| JPS55166799A (en) * | 1979-06-12 | 1980-12-26 | Matsushita Electric Ind Co Ltd | Optical detector |
-
1982
- 1982-02-26 JP JP3091382A patent/JPS58147610A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5199049A (en) * | 1975-02-10 | 1976-09-01 | Shiro Okamura | |
| JPS55166799A (en) * | 1979-06-12 | 1980-12-26 | Matsushita Electric Ind Co Ltd | Optical detector |
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