JPS58146806A - 平面度測定装置 - Google Patents
平面度測定装置Info
- Publication number
- JPS58146806A JPS58146806A JP2962182A JP2962182A JPS58146806A JP S58146806 A JPS58146806 A JP S58146806A JP 2962182 A JP2962182 A JP 2962182A JP 2962182 A JP2962182 A JP 2962182A JP S58146806 A JPS58146806 A JP S58146806A
- Authority
- JP
- Japan
- Prior art keywords
- image sensor
- flatness
- interference fringes
- data
- address
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012545 processing Methods 0.000 claims abstract description 15
- 230000003287 optical effect Effects 0.000 claims description 35
- 238000004364 calculation method Methods 0.000 claims description 16
- 238000012360 testing method Methods 0.000 claims description 5
- 230000008602 contraction Effects 0.000 claims 1
- 230000004907 flux Effects 0.000 abstract 2
- 238000005259 measurement Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 5
- 230000000007 visual effect Effects 0.000 description 4
- 230000008034 disappearance Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 241000282472 Canis lupus familiaris Species 0.000 description 1
- 229910052774 Proactinium Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 210000003323 beak Anatomy 0.000 description 1
- 235000015278 beef Nutrition 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Supporting Of Heads In Record-Carrier Devices (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2962182A JPS58146806A (ja) | 1982-02-24 | 1982-02-24 | 平面度測定装置 |
| US06/449,733 US4627733A (en) | 1981-12-25 | 1982-12-14 | Flatness measuring apparatus |
| DE19823247238 DE3247238A1 (de) | 1981-12-25 | 1982-12-21 | Ebenheitsmessgeraet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2962182A JPS58146806A (ja) | 1982-02-24 | 1982-02-24 | 平面度測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58146806A true JPS58146806A (ja) | 1983-09-01 |
| JPS6364721B2 JPS6364721B2 (enrdf_load_stackoverflow) | 1988-12-13 |
Family
ID=12281152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2962182A Granted JPS58146806A (ja) | 1981-12-25 | 1982-02-24 | 平面度測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58146806A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61160004A (ja) * | 1985-01-09 | 1986-07-19 | Toshiba Corp | パタ−ンエツジ測定方法および装置 |
| JPH0591293U (ja) * | 1992-05-19 | 1993-12-14 | 勝造商事株式会社 | 育苗トレイ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS632446A (ja) * | 1986-06-20 | 1988-01-07 | Matsushita Electric Ind Co Ltd | Ｄｐｓｋ変調デ−タの復調回路 |
-
1982
- 1982-02-24 JP JP2962182A patent/JPS58146806A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS632446A (ja) * | 1986-06-20 | 1988-01-07 | Matsushita Electric Ind Co Ltd | Ｄｐｓｋ変調デ−タの復調回路 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61160004A (ja) * | 1985-01-09 | 1986-07-19 | Toshiba Corp | パタ−ンエツジ測定方法および装置 |
| JPH0591293U (ja) * | 1992-05-19 | 1993-12-14 | 勝造商事株式会社 | 育苗トレイ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6364721B2 (enrdf_load_stackoverflow) | 1988-12-13 |
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