JPS58142206A - 歪センサ - Google Patents

歪センサ

Info

Publication number
JPS58142206A
JPS58142206A JP57024939A JP2493982A JPS58142206A JP S58142206 A JPS58142206 A JP S58142206A JP 57024939 A JP57024939 A JP 57024939A JP 2493982 A JP2493982 A JP 2493982A JP S58142206 A JPS58142206 A JP S58142206A
Authority
JP
Japan
Prior art keywords
insulating resin
film
creep
beam body
strain sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57024939A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0371641B2 (OSRAM
Inventor
Akira Nishikawa
西川 昶
Satoshi Suzuki
鈴木 「さとし」
Masanobu Hirata
平田 正信
Koichiro Sakamoto
孝一郎 坂本
Ikuo Fujisawa
藤沢 郁夫
Shozo Takeno
武野 尚三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Sanyo Electric Co Ltd
Toshiba Corp
Toshiba Tec Corp
Original Assignee
Tokyo Sanyo Electric Co Ltd
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Tokyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Sanyo Electric Co Ltd, Toshiba Corp, Tokyo Shibaura Electric Co Ltd, Tokyo Electric Co Ltd filed Critical Tokyo Sanyo Electric Co Ltd
Priority to JP57024939A priority Critical patent/JPS58142206A/ja
Priority to US06/465,344 priority patent/US4511877A/en
Priority to AU11306/83A priority patent/AU536998B2/en
Priority to DE8383101379T priority patent/DE3374602D1/de
Priority to EP83101379A priority patent/EP0087665B1/en
Priority to KR1019830000611A priority patent/KR860001781B1/ko
Priority to CA000421674A priority patent/CA1184051A/en
Publication of JPS58142206A publication Critical patent/JPS58142206A/ja
Publication of JPH0371641B2 publication Critical patent/JPH0371641B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49082Resistor making
    • Y10T29/49103Strain gauge making

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Force In General (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
JP57024939A 1982-02-18 1982-02-18 歪センサ Granted JPS58142206A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP57024939A JPS58142206A (ja) 1982-02-18 1982-02-18 歪センサ
US06/465,344 US4511877A (en) 1982-02-18 1983-02-09 Strain gauge with reduced creep phenomenon by improved insulation layering
AU11306/83A AU536998B2 (en) 1982-02-18 1983-02-10 Strain sensor
DE8383101379T DE3374602D1 (en) 1982-02-18 1983-02-14 Strain sensor
EP83101379A EP0087665B1 (en) 1982-02-18 1983-02-14 Strain sensor
KR1019830000611A KR860001781B1 (ko) 1982-02-18 1983-02-15 왜곡센서(Sensor)
CA000421674A CA1184051A (en) 1982-02-18 1983-02-16 Strain sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57024939A JPS58142206A (ja) 1982-02-18 1982-02-18 歪センサ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP25143388A Division JPH01124731A (ja) 1988-10-05 1988-10-05 歪センサ

Publications (2)

Publication Number Publication Date
JPS58142206A true JPS58142206A (ja) 1983-08-24
JPH0371641B2 JPH0371641B2 (OSRAM) 1991-11-14

Family

ID=12152018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57024939A Granted JPS58142206A (ja) 1982-02-18 1982-02-18 歪センサ

Country Status (7)

Country Link
US (1) US4511877A (OSRAM)
EP (1) EP0087665B1 (OSRAM)
JP (1) JPS58142206A (OSRAM)
KR (1) KR860001781B1 (OSRAM)
AU (1) AU536998B2 (OSRAM)
CA (1) CA1184051A (OSRAM)
DE (1) DE3374602D1 (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01124731A (ja) * 1988-10-05 1989-05-17 Tokyo Electric Co Ltd 歪センサ
KR100535897B1 (ko) * 1997-08-22 2006-03-22 알파 일렉트로닉스 가부시키가이샤 로드셀및그제조방법

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59230131A (ja) * 1983-06-13 1984-12-24 Tokyo Electric Co Ltd ロ−ドセル
EP0150878B1 (de) * 1984-01-28 1990-09-12 Philips Patentverwaltung GmbH Verfahren zur Herstellung eines Dünnfilmmessstreifensystems
DE3403042A1 (de) * 1984-01-30 1985-08-01 Philips Patentverwaltung Gmbh, 2000 Hamburg Duennfilm-dehnungsmessstreifen-system und verfahren zu seiner herstellung
DE3404936A1 (de) * 1984-02-11 1985-08-14 Bizerba-Werke Wilhelm Kraut GmbH & Co KG, 7460 Balingen Elektromechanische waegezelle mit biegemesskoerper
EP0251563A3 (en) * 1986-06-17 1991-01-09 Tokyo Electric Co. Ltd. Photoelectric conversion device
JPS63165725A (ja) * 1986-12-26 1988-07-09 Aisin Seiki Co Ltd 圧力センサ−用歪ゲ−ジ
JPH0731091B2 (ja) * 1987-05-27 1995-04-10 日本碍子株式会社 歪検出器
US4821583A (en) * 1987-07-14 1989-04-18 E. I. Du Pont De Nemours And Company Tension measuring apparatus
FR2622008B1 (fr) * 1987-10-15 1990-01-19 Commissariat Energie Atomique Jauges de contrainte a fluage reglable et procede d'obtention de telles jauges
US5184520A (en) * 1989-10-18 1993-02-09 Ishida Scales Mfg. Co., Ltd. Load sensor
US5154247A (en) * 1989-10-31 1992-10-13 Teraoka Seiko Co., Limited Load cell
US5306873A (en) * 1990-09-26 1994-04-26 Ishida Scales Mfg. Co., Ltd. Load cell with strain gauges having low temperature dependent coefficient of resistance
EP0544934B1 (de) * 1991-11-30 1996-10-02 Endress U. Hauser Gmbh U. Co. Verfahren zum Stabilisieren der Oberflächeneigenschaften von in Vakuum temperaturzubehandelnden Gegenständen
FR2685080B1 (fr) * 1991-12-17 1995-09-01 Thomson Csf Capteur mecanique comprenant un film de polymere.
FR2693795B1 (fr) * 1992-07-15 1994-08-19 Commissariat Energie Atomique Jauge de contrainte sur support souple et capteur muni de ladite jauge.
JPH115364A (ja) * 1997-04-24 1999-01-12 Tec Corp ノンインパクト記録方法
US6647797B2 (en) * 1997-11-06 2003-11-18 Powerco, S.P.A. Strain gauge strip and applications thereof
DE19814261A1 (de) * 1998-03-31 1999-10-14 Mannesmann Vdo Ag Dehnungsempfindlicher Widerstand
US6453748B1 (en) 1999-12-15 2002-09-24 Wayne State University Boron nitride piezoresistive device
US6680668B2 (en) * 2001-01-19 2004-01-20 Vishay Intertechnology, Inc. Fast heat rise resistor using resistive foil
DE10156160B4 (de) * 2001-11-15 2007-06-14 Siemens Ag Mechanisch-elektrischer Wandler
WO2003058160A1 (en) * 2002-01-13 2003-07-17 Zbigniew Drazek Method for measuring the pipeline creeping
FR2867275B1 (fr) 2004-03-03 2006-05-19 Seb Sa Capteur de poids
US7231803B2 (en) * 2004-06-11 2007-06-19 Robert Bosch Gmbh Hybrid impact sensor
US7188511B2 (en) * 2004-06-11 2007-03-13 Robert Bosch Gmbh Stress wave sensor
ITTO20120293A1 (it) 2012-04-03 2013-10-04 Metallux Sa Procedimento per tarare un elemento di calibrazione, e relativo dispositivo
JPWO2014188678A1 (ja) * 2013-05-21 2017-02-23 パナソニックIpマネジメント株式会社 荷重検出装置
JP2017067764A (ja) * 2015-09-29 2017-04-06 ミネベアミツミ株式会社 ひずみゲージ、荷重センサ、及びひずみゲージの製造方法
CN115030942B (zh) * 2022-06-08 2023-08-18 深圳市力合鑫源智能技术有限公司 导热膜基底金属电阻应变计及其制备方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA689756A (en) * 1964-06-30 The Budd Company Bending-strain transducer
DE1648788A1 (de) * 1968-01-05 1971-07-22 Tech Physikalische Werkstaette Dehnungsmessstreifen mit Traeger aus Kunststoff
US4050976A (en) * 1976-01-27 1977-09-27 Bofors America, Inc. Strain gage application
US4104605A (en) * 1976-09-15 1978-08-01 General Electric Company Thin film strain gauge and method of fabrication
DE2728916A1 (de) * 1977-06-27 1979-01-18 Hottinger Messtechnik Baldwin Verfahren und vorrichtung zum abdecken eines dehnungsmesstreifens
DE2916427C2 (de) * 1979-04-23 1987-02-12 Hottinger Baldwin Messtechnik Gmbh, 6100 Darmstadt Meßumformer mit einer Feder und einer darauf applizierten Dehnungsmeßstreifenanordnung
DE2916425C2 (de) * 1979-04-23 1981-04-09 Siemens AG, 1000 Berlin und 8000 München Dehnungsmeßstreifen und Verfahren zu seiner Herstellung
DE3176209D1 (en) * 1980-11-29 1987-06-25 Tokyo Electric Co Ltd Load cell and method of manufacturing the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01124731A (ja) * 1988-10-05 1989-05-17 Tokyo Electric Co Ltd 歪センサ
KR100535897B1 (ko) * 1997-08-22 2006-03-22 알파 일렉트로닉스 가부시키가이샤 로드셀및그제조방법

Also Published As

Publication number Publication date
AU536998B2 (en) 1984-05-31
EP0087665A2 (en) 1983-09-07
DE3374602D1 (en) 1987-12-23
JPH0371641B2 (OSRAM) 1991-11-14
KR840003838A (ko) 1984-10-04
AU1130683A (en) 1983-08-25
EP0087665B1 (en) 1987-11-19
KR860001781B1 (ko) 1986-10-22
CA1184051A (en) 1985-03-19
US4511877A (en) 1985-04-16
EP0087665A3 (en) 1983-10-19

Similar Documents

Publication Publication Date Title
JPS58142206A (ja) 歪センサ
KR100959005B1 (ko) 금속 압력다이어프램이 구비된 압력측정센서 및 상기압력측정센서의 제조방법
CN109825809A (zh) 一种聚酰亚胺基电阻式薄膜应变传感器及其制备方法与应用
Garcia-Alonso et al. Strain sensitivity and temperature influence on sputtered thin films for piezoresistive sensors
US3826130A (en) Electro-mechanical power or pressure measuring transformer
DE4300084A1 (de) Widerstandsthermometer mit einem Meßwiderstand
CN119573965A (zh) 一种压力传感器、量程调整方法及电子设备
US6684487B2 (en) Method of producing a load cell
JP2585681B2 (ja) 金属薄膜抵抗ひずみゲ―ジ
DE3118306C2 (OSRAM)
JPS56164582A (en) Semiconductor piezo-electric element and manufacture thereof
Bethe et al. Thin-film strain-gage transducers
JP2001110602A (ja) 薄膜抵抗体形成方法及びセンサ
KR860000047B1 (ko) 로오드셀 및 그 제조방법
JPH01124731A (ja) 歪センサ
JPH07335911A (ja) 受圧管一体型圧力センサ
JPH033882B2 (OSRAM)
JPH0258303A (ja) 薄膜白金温度センサ
DE3902628A1 (de) Duennschichtmaterial fuer sensoren oder aktuatoren und verfahren zu dessen herstellung
JPH0276201A (ja) 歪ゲージ用薄膜抵抗体
JPS5552936A (en) Humidity detector
JPS5846693B2 (ja) オンドセンサ
SU924765A1 (ru) Резистивный материал дл высокоомных тонкопленочных резисторов
JPH08297056A (ja) 高抵抗値抵抗器及びその製造方法並びにそれを用いた焦電型赤外線センサー
AT405688B (de) Widerstandsthermometer mit einem messwiderstand