JPS5814039A - 電子ビ−ムマクロアナライザ装置 - Google Patents

電子ビ−ムマクロアナライザ装置

Info

Publication number
JPS5814039A
JPS5814039A JP56112578A JP11257881A JPS5814039A JP S5814039 A JPS5814039 A JP S5814039A JP 56112578 A JP56112578 A JP 56112578A JP 11257881 A JP11257881 A JP 11257881A JP S5814039 A JPS5814039 A JP S5814039A
Authority
JP
Japan
Prior art keywords
rays
detector
spectral
sample
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56112578A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332737B2 (enrdf_load_stackoverflow
Inventor
Mitsuyoshi Sato
佐藤　光義
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Nippon Steel Corp
Original Assignee
Seiko Instruments Inc
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc, Nippon Steel Corp filed Critical Seiko Instruments Inc
Priority to JP56112578A priority Critical patent/JPS5814039A/ja
Publication of JPS5814039A publication Critical patent/JPS5814039A/ja
Publication of JPH0332737B2 publication Critical patent/JPH0332737B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP56112578A 1981-07-17 1981-07-17 電子ビ−ムマクロアナライザ装置 Granted JPS5814039A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56112578A JPS5814039A (ja) 1981-07-17 1981-07-17 電子ビ−ムマクロアナライザ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56112578A JPS5814039A (ja) 1981-07-17 1981-07-17 電子ビ−ムマクロアナライザ装置

Publications (2)

Publication Number Publication Date
JPS5814039A true JPS5814039A (ja) 1983-01-26
JPH0332737B2 JPH0332737B2 (enrdf_load_stackoverflow) 1991-05-14

Family

ID=14590222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56112578A Granted JPS5814039A (ja) 1981-07-17 1981-07-17 電子ビ−ムマクロアナライザ装置

Country Status (1)

Country Link
JP (1) JPS5814039A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60135850A (ja) * 1983-12-26 1985-07-19 Shimadzu Corp 状態マツプ方法及びその装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5610237A (en) * 1979-07-04 1981-02-02 Seiko Instr & Electronics Ltd Track element analyzer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5610237A (en) * 1979-07-04 1981-02-02 Seiko Instr & Electronics Ltd Track element analyzer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60135850A (ja) * 1983-12-26 1985-07-19 Shimadzu Corp 状態マツプ方法及びその装置

Also Published As

Publication number Publication date
JPH0332737B2 (enrdf_load_stackoverflow) 1991-05-14

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