JPS58138045A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS58138045A JPS58138045A JP57020812A JP2081282A JPS58138045A JP S58138045 A JPS58138045 A JP S58138045A JP 57020812 A JP57020812 A JP 57020812A JP 2081282 A JP2081282 A JP 2081282A JP S58138045 A JPS58138045 A JP S58138045A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor chip
- semiconductor
- adhesive
- pattern
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/2919—Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H01—ELECTRIC ELEMENTS
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
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- H—ELECTRICITY
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- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/859—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector involving monitoring, e.g. feedback loop
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
- H01L2224/922—Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
- H01L2224/9222—Sequential connecting processes
- H01L2224/92242—Sequential connecting processes the first connecting process involving a layer connector
- H01L2224/92247—Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/0665—Epoxy resin
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16195—Flat cap [not enclosing an internal cavity]
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
- Die Bonding (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
この発明は半導体テップのマウント部を改善した例えば
IC,LSIなどの半導体装置M6壽4111か社に関
する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a semiconductor device such as an IC or an LSI, which has an improved mounting portion of a semiconductor chip.
従来、半導体装置例えば(C,L8Iなどは。 Conventionally, semiconductor devices such as (C, L8I, etc.) have been used.
第1図に示すように構成される。11は、IC。It is constructed as shown in FIG. 11 is IC.
LSIなどの所定の機能を持ち/4ターニングされた半
導体チップであり、半導体装置の)譬ツケージJ2の凹
部JJにマウントされている。そしてこの半導体チップ
JJ上にノ青ターニングされた電極部(以下がンデイン
グノヤツド)14畠。It is a /4 turned semiconductor chip having a predetermined function such as an LSI, and is mounted in a recess JJ of a parallel cage J2 of a semiconductor device. Then, on this semiconductor chip JJ, there are 14 electrode portions (hereinafter referred to as turning electrodes).
J 4 b−・・はがンデイングワイヤ16畠、Ilb
。J 4 b--Haganding wire 16 Hatake, Ilb
.
・・・によって、リードフレームJFa、JFb=に電
気的に接続される一ン9ディンr部16m。. . , the one-in-nine-din r portion 16m is electrically connected to the lead frames JFa and JFb=.
11rb・・・が設けられている。また、この半導体テ
ップ11をマウントされたパッケージIJの凹部IJは
1図示されないキャップなどによって例えば気書封止法
、樹脂゛封止法などで封止される。11rb... are provided. Further, the recess IJ of the package IJ on which the semiconductor chip 11 is mounted is sealed with a cap (not shown) by, for example, a gas sealing method, a resin sealing method, or the like.
このように構成された半導体装置が例えば808型のも
のであり、半導体チツ7’JJがサファイヤなどの透明
体絶縁基板上に半導体膜を形成した構造のものとすると
、半導体膜が充分に薄いために、半導体チップ11の上
面からチップ裏向が透けて晃える。また、この半導体テ
ツブ11は1表面にアルミ合金による配線/昔ターンが
施され、裏面が導電性銀ペーストによってノ譬ツゲージ
12に接着されている。そして。If the semiconductor device configured in this way is, for example, an 808 type, and the semiconductor chip 7'JJ has a structure in which a semiconductor film is formed on a transparent insulating substrate such as sapphire, the semiconductor film is sufficiently thin. In addition, the back side of the semiconductor chip 11 can be seen through the top surface of the semiconductor chip 11. Further, this semiconductor tube 11 has aluminum alloy wiring/contours applied to one surface, and is bonded to the test gauge 12 on the back surface with conductive silver paste. and.
この導電性銀ペーストによる銀色と、アルミ合金による
パターンの色が同系統の色であり、上面から半導体テッ
プ11を見た場合、裏面の導電性銀ペーストの色のため
に配線/#ターンが識別しに(い。したがって、−ンデ
インダ/fツド14蟲、14b、・・・をlンデインダ
ヮイヤ15m。The silver color created by this conductive silver paste and the color of the pattern created by the aluminum alloy are the same color, and when looking at the semiconductor chip 11 from the top surface, the wiring/# turn can be identified due to the color of the conductive silver paste on the back surface. (I. Therefore, -ndeinda/f tsudo 14 insects, 14b,...) lndeindia 15m.
15b、・・・で接続するワイヤIンデインダ工程1行
511.配線)中ターン上の一ンデインダ/譬ツド14
m、14bがわかりに<<1作業能率と。15b, . . . wire I inductor process 1 row 511. Wiring) One index/parameter 14 on the middle turn
m, 14b is clearly <<1 work efficiency.
−ンデイング部の精度に悪影響を与えていた。- This had a negative effect on the accuracy of the modeling part.
この発明は、上記のような点に鑑みなされたもので、透
明体絶縁基板を用いた半導体デツプの表面ノ譬ターンが
より鮮明に見えるようにして。The present invention was made in view of the above-mentioned points, and it is possible to more clearly see the pattern on the surface of a semiconductor depth using a transparent insulating substrate.
lンディング作業をしやすくした半導体装置を提供しよ
うとするものである。The present invention is intended to provide a semiconductor device that is easy to perform a loading operation.
すなわちこの発明に係る半導体装置は、透明体絶縁基板
上に半導体膜が形成されている半導体チップにおいて、
この半導体チップ上の配線ノfターンとは異なる色彩の
接着剤を用いて〆イがンデイング(マウンF)がなされ
るようなものである。That is, the semiconductor device according to the present invention includes a semiconductor chip in which a semiconductor film is formed on a transparent insulating substrate.
It is like mounting (mounting) the wiring on the semiconductor chip using an adhesive of a different color from that of the wiring F-turn.
以下図面を参照して、この発明の一実施例をその組立て
工程に基き説明する。第2図の(1)〜(d)は、その
組み立て工程を説明するもので、第2図(1)において
12はリードフレーム11゜11′と一体的に形成され
た例えばセラミックによるノ譬ツケージである。/量ツ
ケージ11の凹部13にはリードフレームJ F 、
J F’と電気的に接続してパターニングされた一ンデ
イング部J 6 、 J 6’が設けられている。また
、この凹部11の底面には図に示すように黒色工4キシ
による接着剤11を塗る。An embodiment of the present invention will be described below based on its assembly process with reference to the drawings. 2 (1) to (d) explain the assembly process. In FIG. 2 (1), 12 is a miniature cage made of, for example, ceramic, which is integrally formed with the lead frame 11° 11'. It is. /In the recess 13 of the cage 11, a lead frame JF,
Patterned binding portions J6 and J6' are provided to be electrically connected to JF'. Further, the bottom surface of the recess 11 is coated with an adhesive 11 made of black lacquer 4, as shown in the figure.
次に第2図(b)に示すように上記接着剤IIの塗られ
た向上に半導体テツfxsv装置し、〆イがンデインダ
を行なう。この半導体チップ11は、前記したようにサ
ファイヤなどの透明体絶縁基板1#上に、半導体膜1−
が形成されており、ここに例えばアルミ合金によるパタ
ーンが施されている。アルミ合金によるパターンは半導
体膜jOの上面にのみ施されている場合もあれば、多層
構造となっている場合もあり。Next, as shown in FIG. 2(b), the surface coated with the adhesive II is applied to a semiconductor TFT fxsv device, and a final step is performed to perform indinder. As described above, this semiconductor chip 11 is made of a semiconductor film 1-1 on a transparent insulating substrate 1# made of sapphire or the like.
is formed, and a pattern made of, for example, an aluminum alloy is applied thereto. The aluminum alloy pattern may be applied only to the upper surface of the semiconductor film jO, or may have a multilayer structure.
この/昔ターンの一部は金属面の露出した一ンデインダ
Ifツドとなっている。A part of this turn is an exposed metal surface.
このようにして坐導体テツ7’JJがマクントされると
、第2図(c)に示すように半導体デッ111の一ンデ
ィンダ/4ツドJ 4 、 J 4’と、/4ツケツジ
11の凹部11の周囲に並んだリードフレームの一ンデ
ィンダ部J # 、 J #’とを極細アルミ線あるい
は極細金線による一ンディンダヮイヤJ j 、 J
J’で接続するがンディンダが行なわれる。この−ンデ
ィングが終了すると、第2図(−)のようにノ臂ツヶー
ジ11にキャラfl/1がかぶせられ、封止される。そ
して1図には示されていないが、!−rフレームsr、
srIの不要な枠体を切り、リードフレームJ F 、
J F’を曲げるなどして組立てを完了する。When the seat conductor strips 7'JJ are mounded in this manner, the semiconductor deck 111 has one-way diagonal/fourth dots J4, J4' and the recessed portion 11 of the four-way foot 11, as shown in FIG. 2(c). The one-dinder parts J#, J#' of the lead frame lined up around the lead frame are connected with one-dinder parts Jj, J made of ultra-fine aluminum wire or ultra-fine gold wire.
Connection is made with J', but undinda is performed. When this ending is completed, the character fl/1 is placed over the armpit cage 11 and sealed as shown in FIG. 2 (-). And although it is not shown in Figure 1,! −r frame sr,
Cut the unnecessary frame of srI, and make the lead frame JF,
Complete the assembly by bending JF'.
このようにこの実施例では導伝性黒色ニーキシを〆イ一
ンディンダの接着剤11として用いており、上面より半
導体tツf1Jを見るとアルミ合金による/譬ターンの
裏面にある地が黒(見え、)譬ターンが容易に識別でき
るようになる。As described above, in this embodiment, conductive black resin is used as the adhesive 11 of the finishing plate, and when looking at the semiconductor T-T-F1J from the top surface, the base on the back side of the aluminum alloy plate is black (not visible). ,) The parable turns can be easily identified.
したがって、ワイヤがンデインダ作業の能率が向上し、
その際の位置決めなどを正確に行なうことができるよう
になる。Therefore, the efficiency of wire-induring work is improved,
At that time, positioning etc. can be performed accurately.
なお、〆イがンディンダに用いる接着剤は。In addition, what kind of adhesive is used for the closing part?
アルミ合金など半導体膜表面のパターン用金属の色と興
なる色の接着剤を用いればよ(、たとえば黒色エポキシ
系接着剤などは表面の/臂ターンが、より鮮明になるの
で最も良いが、一般に明度彩度の低い色であれば他のも
のでも容易なワイヤーンディンダ作業が可能である。。It is best to use an adhesive with a color that matches the color of the pattern metal on the surface of the semiconductor film, such as aluminum alloy (for example, black epoxy adhesive is best because it makes the surface/arm turn more clear, but in general Wire-and-dinder work is possible with other colors as long as they have low brightness and saturation.
以上のようにこの発明では、IC,L8Iなとの半導体
装置のグイーンディンダ工程で、半導体チップの配線/
臂ターンと興なる色彩の導電性接着剤を用いて半導体チ
ップを接着することにより、ワイヤがンデインダ作業の
能率およびワイヤーンデインダの信頼性の向上した半導
体装置を提供することができる。As described above, in this invention, wiring/
By bonding semiconductor chips using a conductive adhesive of a color that differs from the arm turn, it is possible to provide a semiconductor device in which the efficiency of the wire winding work and the reliability of the wire winding work are improved.
なお、上記実施例では、DIP[半導体装置について説
明したが、透明体基板上に形成され)譬ターニングされ
た半導体チップを用いるものであれば、他の型のものや
、IC,L8I以外のものにも適用できる。In addition, in the above embodiment, as long as a DIP (a semiconductor device was explained, but it is formed on a transparent substrate) and a turned semiconductor chip is used, other types or devices other than IC and L8I may be used. It can also be applied to
第1図は半導体装置の構造を説明する斜視図。
第2図(a)〜(d)はこの発明の一実施例に係る半導
体装置の組み立て工程を説明する断面図である。
11・・・半導体チップ、11−/譬ツケージ。
11.11’、Iim、11b=dlンデイン/ 1フ
イヤ、J−,31’、J#11.Jξ−・−一ンデイン
ダノダツド、1m−接着剤。FIG. 1 is a perspective view illustrating the structure of a semiconductor device. FIGS. 2(a) to 2(d) are cross-sectional views illustrating the assembly process of a semiconductor device according to an embodiment of the present invention. 11...Semiconductor chip, 11-/analogue. 11.11', Iim, 11b=dlundein/1fire, J-, 31', J#11. Jξ-・-1 indiandanodatsud, 1m-adhesive.
Claims (1)
有する半導体チップと、この半導体チップのがンデイン
ダパッドに〆ンデインダワイヤで接続されたリードを含
み上記半導体テップを取り付けられる/lツケージとを
備え、この・豐ツケージに対して上記半導体テップをそ
の配線/fターンとは興なる色彩の接着剤によって接着
するようにしたことを特徴とする半導体装置。The present invention comprises a semiconductor chip having a semiconductor film having a wiring pattern on a transparent insulating substrate, and a cage to which the semiconductor chip is attached, and the semiconductor chip includes leads connected to conductor pads with conductor wires. - A semiconductor device characterized in that the above-mentioned semiconductor chip is adhered to the support cage using an adhesive of a different color from that of the wiring/f-turn.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57020812A JPS58138045A (en) | 1982-02-12 | 1982-02-12 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57020812A JPS58138045A (en) | 1982-02-12 | 1982-02-12 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS58138045A true JPS58138045A (en) | 1983-08-16 |
Family
ID=12037444
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57020812A Pending JPS58138045A (en) | 1982-02-12 | 1982-02-12 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58138045A (en) |
-
1982
- 1982-02-12 JP JP57020812A patent/JPS58138045A/en active Pending
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