JPS58120511A - シランの精製法 - Google Patents

シランの精製法

Info

Publication number
JPS58120511A
JPS58120511A JP57001453A JP145382A JPS58120511A JP S58120511 A JPS58120511 A JP S58120511A JP 57001453 A JP57001453 A JP 57001453A JP 145382 A JP145382 A JP 145382A JP S58120511 A JPS58120511 A JP S58120511A
Authority
JP
Japan
Prior art keywords
silane
impurities
adsorbent
gas
hydrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57001453A
Other languages
English (en)
Japanese (ja)
Other versions
JPS621566B2 (enExample
Inventor
Koji Gamo
孝治 蒲生
Yoshio Moriwaki
良夫 森脇
Nobuyuki Yanagihara
伸行 柳原
Tsutomu Iwaki
勉 岩城
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57001453A priority Critical patent/JPS58120511A/ja
Publication of JPS58120511A publication Critical patent/JPS58120511A/ja
Publication of JPS621566B2 publication Critical patent/JPS621566B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP57001453A 1982-01-07 1982-01-07 シランの精製法 Granted JPS58120511A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57001453A JPS58120511A (ja) 1982-01-07 1982-01-07 シランの精製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57001453A JPS58120511A (ja) 1982-01-07 1982-01-07 シランの精製法

Publications (2)

Publication Number Publication Date
JPS58120511A true JPS58120511A (ja) 1983-07-18
JPS621566B2 JPS621566B2 (enExample) 1987-01-14

Family

ID=11501860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57001453A Granted JPS58120511A (ja) 1982-01-07 1982-01-07 シランの精製法

Country Status (1)

Country Link
JP (1) JPS58120511A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6163515A (ja) * 1984-09-03 1986-04-01 Mitsui Toatsu Chem Inc モノシランの製造方法
JPS6163518A (ja) * 1984-09-03 1986-04-01 Mitsui Toatsu Chem Inc 高純度モノシラン
US4976942A (en) * 1988-09-26 1990-12-11 Japan Pionics, Ltd. Method for purifying gaseous hydrides
JPH03215310A (ja) * 1990-01-19 1991-09-20 Osaka Titanium Co Ltd 多結晶シリコンの製造方法
US5182089A (en) * 1990-02-20 1993-01-26 Mannesmann Aktiengesellschaft Chemisorptive metal alloy and method of using the same
CN109908892A (zh) * 2017-12-12 2019-06-21 中国科学院大连化学物理研究所 一种超纯氢气纯化吸附剂材料及应用

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6163515A (ja) * 1984-09-03 1986-04-01 Mitsui Toatsu Chem Inc モノシランの製造方法
JPS6163518A (ja) * 1984-09-03 1986-04-01 Mitsui Toatsu Chem Inc 高純度モノシラン
US4976942A (en) * 1988-09-26 1990-12-11 Japan Pionics, Ltd. Method for purifying gaseous hydrides
JPH03215310A (ja) * 1990-01-19 1991-09-20 Osaka Titanium Co Ltd 多結晶シリコンの製造方法
US5182089A (en) * 1990-02-20 1993-01-26 Mannesmann Aktiengesellschaft Chemisorptive metal alloy and method of using the same
CN109908892A (zh) * 2017-12-12 2019-06-21 中国科学院大连化学物理研究所 一种超纯氢气纯化吸附剂材料及应用

Also Published As

Publication number Publication date
JPS621566B2 (enExample) 1987-01-14

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