JPS58119147A - イオンポンプの自動起動回路装置 - Google Patents

イオンポンプの自動起動回路装置

Info

Publication number
JPS58119147A
JPS58119147A JP172482A JP172482A JPS58119147A JP S58119147 A JPS58119147 A JP S58119147A JP 172482 A JP172482 A JP 172482A JP 172482 A JP172482 A JP 172482A JP S58119147 A JPS58119147 A JP S58119147A
Authority
JP
Japan
Prior art keywords
circuit
ion pump
output voltage
pump
command signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP172482A
Other languages
English (en)
Japanese (ja)
Other versions
JPS612251B2 (enrdf_load_stackoverflow
Inventor
Nobuaki Yagi
信昭 八木
Masahiro Yamada
山田　政広
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP172482A priority Critical patent/JPS58119147A/ja
Publication of JPS58119147A publication Critical patent/JPS58119147A/ja
Publication of JPS612251B2 publication Critical patent/JPS612251B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps

Landscapes

  • Electron Tubes For Measurement (AREA)
JP172482A 1982-01-11 1982-01-11 イオンポンプの自動起動回路装置 Granted JPS58119147A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP172482A JPS58119147A (ja) 1982-01-11 1982-01-11 イオンポンプの自動起動回路装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP172482A JPS58119147A (ja) 1982-01-11 1982-01-11 イオンポンプの自動起動回路装置

Publications (2)

Publication Number Publication Date
JPS58119147A true JPS58119147A (ja) 1983-07-15
JPS612251B2 JPS612251B2 (enrdf_load_stackoverflow) 1986-01-23

Family

ID=11509506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP172482A Granted JPS58119147A (ja) 1982-01-11 1982-01-11 イオンポンプの自動起動回路装置

Country Status (1)

Country Link
JP (1) JPS58119147A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6053157U (ja) * 1983-09-20 1985-04-15 日本電子株式会社 イオンポンプ電源装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0239757U (enrdf_load_stackoverflow) * 1988-09-10 1990-03-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6053157U (ja) * 1983-09-20 1985-04-15 日本電子株式会社 イオンポンプ電源装置

Also Published As

Publication number Publication date
JPS612251B2 (enrdf_load_stackoverflow) 1986-01-23

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