JPS58118439U - photo mask - Google Patents

photo mask

Info

Publication number
JPS58118439U
JPS58118439U JP1982014869U JP1486982U JPS58118439U JP S58118439 U JPS58118439 U JP S58118439U JP 1982014869 U JP1982014869 U JP 1982014869U JP 1486982 U JP1486982 U JP 1486982U JP S58118439 U JPS58118439 U JP S58118439U
Authority
JP
Japan
Prior art keywords
pattern
photo mask
photomask
metal chromium
main patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1982014869U
Other languages
Japanese (ja)
Other versions
JPS6220843Y2 (en
Inventor
白川　明
Original Assignee
三洋電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三洋電機株式会社 filed Critical 三洋電機株式会社
Priority to JP1982014869U priority Critical patent/JPS58118439U/en
Publication of JPS58118439U publication Critical patent/JPS58118439U/en
Application granted granted Critical
Publication of JPS6220843Y2 publication Critical patent/JPS6220843Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は現存するマスクを模式的に示した正面図、第２
図は本考案マスクを模式的に示した正面図であって、２
は本パターン、３は連結パターン、を夫々示している。Figure 1 is a front view schematically showing an existing mask, Figure 2
The figure is a front view schematically showing the mask of the present invention.
3 shows the main pattern, and 3 shows the connected pattern.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 絶縁性ガラス基板上に金属クロミウムパターンを有する
フォトマスクに於て、転与パターンを構成する夫々島状
に独立している本パターンと、該各本パターン間をフォ
トレジストでは解像出来ない線巾で電気的に連結する金
属クロミウムから成る連結パターンと、から成り、この
連結パターンに依って各本パターンの帯電を防止する事
を特徴としたフォトマスク。In a photomask having a metal chromium pattern on an insulating glass substrate, the main patterns that constitute the transfer pattern are independent in the form of islands, and the line width that cannot be resolved with photoresist is used between the main patterns. and a connecting pattern made of metal chromium that is electrically connected to each other, and the photomask is characterized in that each pattern is prevented from being charged with electricity by the connecting pattern.
JP1982014869U 1982-02-04 1982-02-04 photo mask Granted JPS58118439U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982014869U JPS58118439U (en) 1982-02-04 1982-02-04 photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982014869U JPS58118439U (en) 1982-02-04 1982-02-04 photo mask

Publications (2)

Publication Number Publication Date
JPS58118439U true JPS58118439U (en) 1983-08-12
JPS6220843Y2 JPS6220843Y2 (en) 1987-05-27

Family

ID=30027322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982014869U Granted JPS58118439U (en) 1982-02-04 1982-02-04 photo mask

Country Status (1)

Country Link
JP (1) JPS58118439U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009086385A (en) * 2007-09-29 2009-04-23 Hoya Corp Photomask and method for manufacturing the same, and pattern transfer method
JP2011171465A (en) * 2010-02-18 2011-09-01 Nuflare Technology Inc Method for manufacturing exposure mask

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009086385A (en) * 2007-09-29 2009-04-23 Hoya Corp Photomask and method for manufacturing the same, and pattern transfer method
JP2011171465A (en) * 2010-02-18 2011-09-01 Nuflare Technology Inc Method for manufacturing exposure mask

Also Published As

Publication number Publication date
JPS6220843Y2 (en) 1987-05-27

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