JPS58115383A - 反射電子検出器 - Google Patents

反射電子検出器

Info

Publication number
JPS58115383A
JPS58115383A JP56211567A JP21156781A JPS58115383A JP S58115383 A JPS58115383 A JP S58115383A JP 56211567 A JP56211567 A JP 56211567A JP 21156781 A JP21156781 A JP 21156781A JP S58115383 A JPS58115383 A JP S58115383A
Authority
JP
Japan
Prior art keywords
sample
electron
backscattered electron
detection element
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56211567A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0413674B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Yasunobu Tanaka
康信 田中
Takeshi Araki
武 荒木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP56211567A priority Critical patent/JPS58115383A/ja
Publication of JPS58115383A publication Critical patent/JPS58115383A/ja
Publication of JPH0413674B2 publication Critical patent/JPH0413674B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
JP56211567A 1981-12-29 1981-12-29 反射電子検出器 Granted JPS58115383A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56211567A JPS58115383A (ja) 1981-12-29 1981-12-29 反射電子検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56211567A JPS58115383A (ja) 1981-12-29 1981-12-29 反射電子検出器

Publications (2)

Publication Number Publication Date
JPS58115383A true JPS58115383A (ja) 1983-07-09
JPH0413674B2 JPH0413674B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-03-10

Family

ID=16607917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56211567A Granted JPS58115383A (ja) 1981-12-29 1981-12-29 反射電子検出器

Country Status (1)

Country Link
JP (1) JPS58115383A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001084593A3 (en) * 2000-05-04 2002-04-04 Univ Singapore A lens for a scanning electron microscope
JP2009505369A (ja) * 2005-08-18 2009-02-05 シーイービーティー・カンパニー・リミティッド 電子カラム用検出器および電子カラム用電子検出方法
JP7064218B1 (ja) * 2020-12-17 2022-05-10 ツィンファ ユニバーシティ 二次電子プローブ、二次電子検出装置及び走査型電子顕微鏡検出装置
JP2022096579A (ja) * 2020-12-17 2022-06-29 ツィンファ ユニバーシティ 電子黒体空洞及び二次電子検出装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS478874U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-02-27 1972-10-03
JPS52102891A (en) * 1976-02-25 1977-08-29 Doryokuro Kakunenryo Fluorescent substances for scintillation detectors
JPS5418269A (en) * 1977-07-11 1979-02-10 Jeol Ltd Electron beam detector
JPS553129A (en) * 1978-06-21 1980-01-10 Jeol Ltd X-ray analyzer for scanning electron microscope or the like

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS478874U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-02-27 1972-10-03
JPS52102891A (en) * 1976-02-25 1977-08-29 Doryokuro Kakunenryo Fluorescent substances for scintillation detectors
JPS5418269A (en) * 1977-07-11 1979-02-10 Jeol Ltd Electron beam detector
JPS553129A (en) * 1978-06-21 1980-01-10 Jeol Ltd X-ray analyzer for scanning electron microscope or the like

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001084593A3 (en) * 2000-05-04 2002-04-04 Univ Singapore A lens for a scanning electron microscope
US6906335B2 (en) 2000-05-04 2005-06-14 National University Of Singapore Lens for a scanning electron microscope
JP2009505369A (ja) * 2005-08-18 2009-02-05 シーイービーティー・カンパニー・リミティッド 電子カラム用検出器および電子カラム用電子検出方法
JP7064218B1 (ja) * 2020-12-17 2022-05-10 ツィンファ ユニバーシティ 二次電子プローブ、二次電子検出装置及び走査型電子顕微鏡検出装置
JP2022096579A (ja) * 2020-12-17 2022-06-29 ツィンファ ユニバーシティ 電子黒体空洞及び二次電子検出装置

Also Published As

Publication number Publication date
JPH0413674B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-03-10

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