JPS58110051A - 半導体素子の位置認識方法 - Google Patents

半導体素子の位置認識方法

Info

Publication number
JPS58110051A
JPS58110051A JP21174781A JP21174781A JPS58110051A JP S58110051 A JPS58110051 A JP S58110051A JP 21174781 A JP21174781 A JP 21174781A JP 21174781 A JP21174781 A JP 21174781A JP S58110051 A JPS58110051 A JP S58110051A
Authority
JP
Japan
Prior art keywords
chip
memory cell
detected
semiconductor element
carsors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21174781A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6146053B2 (enExample
Inventor
Toshio Murata
利雄 村田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP21174781A priority Critical patent/JPS58110051A/ja
Publication of JPS58110051A publication Critical patent/JPS58110051A/ja
Publication of JPS6146053B2 publication Critical patent/JPS6146053B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
JP21174781A 1981-12-23 1981-12-23 半導体素子の位置認識方法 Granted JPS58110051A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21174781A JPS58110051A (ja) 1981-12-23 1981-12-23 半導体素子の位置認識方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21174781A JPS58110051A (ja) 1981-12-23 1981-12-23 半導体素子の位置認識方法

Publications (2)

Publication Number Publication Date
JPS58110051A true JPS58110051A (ja) 1983-06-30
JPS6146053B2 JPS6146053B2 (enExample) 1986-10-11

Family

ID=16610909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21174781A Granted JPS58110051A (ja) 1981-12-23 1981-12-23 半導体素子の位置認識方法

Country Status (1)

Country Link
JP (1) JPS58110051A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0276238A (ja) * 1988-09-12 1990-03-15 Toshiba Corp 樹脂封止装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0237939A (ja) * 1988-07-28 1990-02-07 Mazda Motor Corp 鋳型造型装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5197372A (enExample) * 1975-02-24 1976-08-26
JPS54152965A (en) * 1978-05-24 1979-12-01 Mitsubishi Electric Corp Position detection system for commodity

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5197372A (enExample) * 1975-02-24 1976-08-26
JPS54152965A (en) * 1978-05-24 1979-12-01 Mitsubishi Electric Corp Position detection system for commodity

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0276238A (ja) * 1988-09-12 1990-03-15 Toshiba Corp 樹脂封止装置

Also Published As

Publication number Publication date
JPS6146053B2 (enExample) 1986-10-11

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