JPS58107683A - 半導体圧力検出装置 - Google Patents

半導体圧力検出装置

Info

Publication number
JPS58107683A
JPS58107683A JP56208672A JP20867281A JPS58107683A JP S58107683 A JPS58107683 A JP S58107683A JP 56208672 A JP56208672 A JP 56208672A JP 20867281 A JP20867281 A JP 20867281A JP S58107683 A JPS58107683 A JP S58107683A
Authority
JP
Japan
Prior art keywords
sides
silicon diaphragm
electrode parts
diaphragm
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56208672A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6222541B2 (enrdf_load_stackoverflow
Inventor
Katsuhiko Fukumi
福見　勝彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP56208672A priority Critical patent/JPS58107683A/ja
Publication of JPS58107683A publication Critical patent/JPS58107683A/ja
Publication of JPS6222541B2 publication Critical patent/JPS6222541B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP56208672A 1981-12-21 1981-12-21 半導体圧力検出装置 Granted JPS58107683A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56208672A JPS58107683A (ja) 1981-12-21 1981-12-21 半導体圧力検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56208672A JPS58107683A (ja) 1981-12-21 1981-12-21 半導体圧力検出装置

Publications (2)

Publication Number Publication Date
JPS58107683A true JPS58107683A (ja) 1983-06-27
JPS6222541B2 JPS6222541B2 (enrdf_load_stackoverflow) 1987-05-19

Family

ID=16560141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56208672A Granted JPS58107683A (ja) 1981-12-21 1981-12-21 半導体圧力検出装置

Country Status (1)

Country Link
JP (1) JPS58107683A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63183567U (enrdf_load_stackoverflow) * 1987-05-18 1988-11-25

Also Published As

Publication number Publication date
JPS6222541B2 (enrdf_load_stackoverflow) 1987-05-19

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