JPS5799361A - Coater for organic resin film - Google Patents
Coater for organic resin filmInfo
- Publication number
- JPS5799361A JPS5799361A JP17563280A JP17563280A JPS5799361A JP S5799361 A JPS5799361 A JP S5799361A JP 17563280 A JP17563280 A JP 17563280A JP 17563280 A JP17563280 A JP 17563280A JP S5799361 A JPS5799361 A JP S5799361A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- flowed
- fine
- organic resin
- resin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To easily form an uniform hot resist film free of pin hole on the surface of a substrate by a method in which gas is introduced from a gas inlet hole provided in the central part of the upper cover of an organic resin film coater and flowed in a laminar flow state on the surface of the substrate.
CONSTITUTION: A glass substrate 1 on which a resist liquid is coated is placed on a substrate base 2 by using a vacuum chuck and then the base 2 is turned at at given revolving speed. At the same time, dry air deprived of fine dust an air filter, etc., is introduced through a gas inlet hole 5 and flowed in a laminar flow state in the direction of arrow A or B on the surface of the substrate 3 through fine holes 6. Thus, the air flow coming toward the rotation center due to swirl flow produced by high-speed rotation is prevented, so that the entanglement of fine resist liquid particles scattered around the substrate 1 can be eliminated. Therefore, an uniform and pin hole-free resist film can be formed.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17563280A JPS5799361A (en) | 1980-12-12 | 1980-12-12 | Coater for organic resin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17563280A JPS5799361A (en) | 1980-12-12 | 1980-12-12 | Coater for organic resin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5799361A true JPS5799361A (en) | 1982-06-21 |
Family
ID=15999471
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17563280A Pending JPS5799361A (en) | 1980-12-12 | 1980-12-12 | Coater for organic resin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5799361A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS607959A (en) * | 1983-06-29 | 1985-01-16 | Fujitsu Ltd | Rotary coater |
-
1980
- 1980-12-12 JP JP17563280A patent/JPS5799361A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS607959A (en) * | 1983-06-29 | 1985-01-16 | Fujitsu Ltd | Rotary coater |
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