JPS57147478A - Rotary type surface treating apparatus - Google Patents

Rotary type surface treating apparatus

Info

Publication number
JPS57147478A
JPS57147478A JP3149981A JP3149981A JPS57147478A JP S57147478 A JPS57147478 A JP S57147478A JP 3149981 A JP3149981 A JP 3149981A JP 3149981 A JP3149981 A JP 3149981A JP S57147478 A JPS57147478 A JP S57147478A
Authority
JP
Japan
Prior art keywords
base plate
rotary
back surface
plate
rotated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3149981A
Other languages
Japanese (ja)
Inventor
Mikio Shoda
Nobutoshi Ogami
Takeshi Takada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP3149981A priority Critical patent/JPS57147478A/en
Publication of JPS57147478A publication Critical patent/JPS57147478A/en
Pending legal-status Critical Current

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  • Coating Apparatus (AREA)

Abstract

PURPOSE: To prevent a treating liquid from creeping to the back surface of a base plate, in the spin spray type rotary surface treating apparatus used in the developing treatment or the like of a glass base plate, by providing a nozzle blowing up water to the back surface of the base plate in the vicinity of the outer periphery of a rotary disc provided to said apparatus.
CONSTITUTION: In order to subject the glass base plate of a photomaster to surface treatment by said apparatus, the glass base plate 6 is attracted to a vacuum chuck rotary plate 1 and a draft apparatus is operated so as to flow air stream from the opening part of a top plate to a discharge port 9. The base plate is rotated at about 500rpm and a developing liquid is injected to the base plate 6 for 20sec from an injection nozzle 10. Because a developing liquid layer on the outer edge of the base plate 6 becomes thin by centrifugal force, directly before the injection of the developing liquid is stopped, the rotary speed thereof is slowed down to about 100rpm and, after stopping, the base plate is rotated for about 20sec. In this case, because the liquid creeps to the back surface of the base plate 6, the rotary plate 1 is rotated and water is blown up mildly from a nozzle 15 and diffused to the outer edge part of the back surface of the base plate by adhesive force and surface tension thereof to drop the developing liquid therefrom.
COPYRIGHT: (C)1982,JPO&Japio
JP3149981A 1981-03-04 1981-03-04 Rotary type surface treating apparatus Pending JPS57147478A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3149981A JPS57147478A (en) 1981-03-04 1981-03-04 Rotary type surface treating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3149981A JPS57147478A (en) 1981-03-04 1981-03-04 Rotary type surface treating apparatus

Publications (1)

Publication Number Publication Date
JPS57147478A true JPS57147478A (en) 1982-09-11

Family

ID=12332921

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3149981A Pending JPS57147478A (en) 1981-03-04 1981-03-04 Rotary type surface treating apparatus

Country Status (1)

Country Link
JP (1) JPS57147478A (en)

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