JPS5796516A - Manufacture of bubble memory chip - Google Patents

Manufacture of bubble memory chip

Info

Publication number
JPS5796516A
JPS5796516A JP17359280A JP17359280A JPS5796516A JP S5796516 A JPS5796516 A JP S5796516A JP 17359280 A JP17359280 A JP 17359280A JP 17359280 A JP17359280 A JP 17359280A JP S5796516 A JPS5796516 A JP S5796516A
Authority
JP
Japan
Prior art keywords
shape
conductor pattern
layer
ion etching
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17359280A
Other languages
Japanese (ja)
Inventor
Hideki Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP17359280A priority Critical patent/JPS5796516A/en
Publication of JPS5796516A publication Critical patent/JPS5796516A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
    • H01F41/34—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To prevent occurrence of poor bubble transfer operation by forming a resin layer on a conductor pattern, approximating the shape of the cross section of the layer to the shape after the formation of the conductor pattern by ion etching, and forming a driving pattern. CONSTITUTION:The conductor pattern 3 on a wafer is coated by resin solution by a spinner and the resin insulating layer 6 is formed. The shape of the cross section of the layer is approximated to the shape after the formation of the conductor pattern by the ion etching. In the ion etching, Ar is used as a gas, and DC sputtering is performed in the atomosphere of 10<-4>-10<-5> Torr in vacuum degree with the potential difference of 500-1,600eV being imparted. Ar ions are vertically implanted into the chip surface. In this method, the etching is performed to a broken line 9, a gentle slope is corrected fairly well, and an ideal cross sectional structure is obtained. A driving pattern comprising Permalloy is formed thereon.
JP17359280A 1980-12-09 1980-12-09 Manufacture of bubble memory chip Pending JPS5796516A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17359280A JPS5796516A (en) 1980-12-09 1980-12-09 Manufacture of bubble memory chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17359280A JPS5796516A (en) 1980-12-09 1980-12-09 Manufacture of bubble memory chip

Publications (1)

Publication Number Publication Date
JPS5796516A true JPS5796516A (en) 1982-06-15

Family

ID=15963443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17359280A Pending JPS5796516A (en) 1980-12-09 1980-12-09 Manufacture of bubble memory chip

Country Status (1)

Country Link
JP (1) JPS5796516A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0154524A2 (en) * 1984-03-03 1985-09-11 Fujitsu Limited Process for manufacturing a magnetic bubble memory chip

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0154524A2 (en) * 1984-03-03 1985-09-11 Fujitsu Limited Process for manufacturing a magnetic bubble memory chip

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