JPS5781214A - Production of blazed grating - Google Patents

Production of blazed grating

Info

Publication number
JPS5781214A
JPS5781214A JP15801680A JP15801680A JPS5781214A JP S5781214 A JPS5781214 A JP S5781214A JP 15801680 A JP15801680 A JP 15801680A JP 15801680 A JP15801680 A JP 15801680A JP S5781214 A JPS5781214 A JP S5781214A
Authority
JP
Japan
Prior art keywords
relief
grating
photoreceptor
angle
exposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15801680A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6332361B2 (enrdf_load_stackoverflow
Inventor
Yuzo Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15801680A priority Critical patent/JPS5781214A/ja
Publication of JPS5781214A publication Critical patent/JPS5781214A/ja
Publication of JPS6332361B2 publication Critical patent/JPS6332361B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP15801680A 1980-11-10 1980-11-10 Production of blazed grating Granted JPS5781214A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15801680A JPS5781214A (en) 1980-11-10 1980-11-10 Production of blazed grating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15801680A JPS5781214A (en) 1980-11-10 1980-11-10 Production of blazed grating

Publications (2)

Publication Number Publication Date
JPS5781214A true JPS5781214A (en) 1982-05-21
JPS6332361B2 JPS6332361B2 (enrdf_load_stackoverflow) 1988-06-29

Family

ID=15662422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15801680A Granted JPS5781214A (en) 1980-11-10 1980-11-10 Production of blazed grating

Country Status (1)

Country Link
JP (1) JPS5781214A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62141794A (ja) * 1985-12-16 1987-06-25 Toshiba Corp 半導体レ−ザ装置
US7175773B1 (en) 2004-06-14 2007-02-13 Carl Zeiss Laser Optics Gmbh Method for manufacturing a blazed grating, such a blazed grating and a spectrometer having such a blazed grating

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62141794A (ja) * 1985-12-16 1987-06-25 Toshiba Corp 半導体レ−ザ装置
US7175773B1 (en) 2004-06-14 2007-02-13 Carl Zeiss Laser Optics Gmbh Method for manufacturing a blazed grating, such a blazed grating and a spectrometer having such a blazed grating

Also Published As

Publication number Publication date
JPS6332361B2 (enrdf_load_stackoverflow) 1988-06-29

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