GB1363262A - Mehtod of making a diffraction grating - Google Patents

Mehtod of making a diffraction grating

Info

Publication number
GB1363262A
GB1363262A GB4806571A GB4806571A GB1363262A GB 1363262 A GB1363262 A GB 1363262A GB 4806571 A GB4806571 A GB 4806571A GB 4806571 A GB4806571 A GB 4806571A GB 1363262 A GB1363262 A GB 1363262A
Authority
GB
United Kingdom
Prior art keywords
substrate
resist
photo
oct
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4806571A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of GB1363262A publication Critical patent/GB1363262A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/32—Holograms used as optical elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

1363262 Diffraction gratings XEROX CORP 15 Oct 1971 [15 Oct 1970] 48065/71 Heading G2J A diffraction grating is formed by exposing a uniform coating of photo-resist 15 on a substrate 14 to a pattern of light interference fringes 29, developing the photo-resist to remove unexposed material and then metallizing the resultant ridge bearing surface. The metal coated ridges are then stripped away to leave a grating comprising a periodic array of fine metal strips on the substrate. The metal may be vapour deposited chromium and the substrate a glass plate. To ensure the whole photo-resist surface is exposed the light interference pattern is scanned in orthogonal directions across the surface. This is achieved by two parallel-sided glass plates 35, 36 which are rotated about axes 57, 58 at right angles to each other. The speed of rotation is computed (at 51) to give a uniform time average exposure. The interference light beams 13, 17 are preferably in the blue-violet to Ultraviolet range of wavelengths.
GB4806571A 1970-10-15 1971-10-15 Mehtod of making a diffraction grating Expired GB1363262A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US8086570A 1970-10-15 1970-10-15
US8086470A 1970-10-15 1970-10-15

Publications (1)

Publication Number Publication Date
GB1363262A true GB1363262A (en) 1974-08-14

Family

ID=26764049

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4806571A Expired GB1363262A (en) 1970-10-15 1971-10-15 Mehtod of making a diffraction grating

Country Status (2)

Country Link
DE (1) DE2150610A1 (en)
GB (1) GB1363262A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2316497A (en) * 1996-08-13 1998-02-25 Northern Telecom Ltd Forming a diffraction grating by scanning
CN113009609A (en) * 2021-03-01 2021-06-22 苏州大学 Volume grating calibration assembly, volume grating preparation device, calibration method and exposure method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2316497A (en) * 1996-08-13 1998-02-25 Northern Telecom Ltd Forming a diffraction grating by scanning
CN113009609A (en) * 2021-03-01 2021-06-22 苏州大学 Volume grating calibration assembly, volume grating preparation device, calibration method and exposure method

Also Published As

Publication number Publication date
DE2150610A1 (en) 1972-04-20

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees