JPS57112705A - Manufacture of holographic grating - Google Patents

Manufacture of holographic grating

Info

Publication number
JPS57112705A
JPS57112705A JP18554480A JP18554480A JPS57112705A JP S57112705 A JPS57112705 A JP S57112705A JP 18554480 A JP18554480 A JP 18554480A JP 18554480 A JP18554480 A JP 18554480A JP S57112705 A JPS57112705 A JP S57112705A
Authority
JP
Japan
Prior art keywords
angle
grooves
layer
lattice
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18554480A
Other languages
Japanese (ja)
Other versions
JPS6025761B2 (en
Inventor
Hideki Haikata
Kazuo Sano
Susumu Nanba
Katsunobu Aoyanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
RIKEN Institute of Physical and Chemical Research
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
RIKEN Institute of Physical and Chemical Research
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, RIKEN Institute of Physical and Chemical Research, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP18554480A priority Critical patent/JPS6025761B2/en
Publication of JPS57112705A publication Critical patent/JPS57112705A/en
Publication of JPS6025761B2 publication Critical patent/JPS6025761B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/32—Holograms used as optical elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Holo Graphy (AREA)

Abstract

PURPOSE:To efficiently form a grating in a photoresist layer laid on a substrate by combinedly applying holography and ion etching in an oblique direction. CONSTITUTION:A photoresist layer 2 is laid on a substrate 1, and parallel lattice grooves 6 with a sine wave-shaped section are cut in the layer 2 by holography. The layer 2 is then irradiated with ion beams 4 at the angle of a direction which is obliquely upward to the grooves 6 and does not make a component projected on the lattice parallel to the grooves 6, e.g. at about 30 deg. angle of incidence to the substrate surface. The etching speed is maximized at about 60 deg. angle of incidence. Thus, the layer 2 is etched to form a grating (theta is a blaze angle) having lattice grooves 5 with an almost saw-toothed section.
JP18554480A 1980-12-29 1980-12-29 Manufacturing method of holographic grating Expired JPS6025761B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18554480A JPS6025761B2 (en) 1980-12-29 1980-12-29 Manufacturing method of holographic grating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18554480A JPS6025761B2 (en) 1980-12-29 1980-12-29 Manufacturing method of holographic grating

Publications (2)

Publication Number Publication Date
JPS57112705A true JPS57112705A (en) 1982-07-13
JPS6025761B2 JPS6025761B2 (en) 1985-06-20

Family

ID=16172655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18554480A Expired JPS6025761B2 (en) 1980-12-29 1980-12-29 Manufacturing method of holographic grating

Country Status (1)

Country Link
JP (1) JPS6025761B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60244925A (en) * 1984-05-21 1985-12-04 Matsushita Electric Ind Co Ltd Liquid-crystal display device and its manufacture
JPS63118701A (en) * 1986-11-07 1988-05-23 Matsushita Electric Ind Co Ltd Production of optical element
JPH04170502A (en) * 1990-11-01 1992-06-18 Matsushita Electric Ind Co Ltd Manufacture of diffraction grating
EP1041408A1 (en) * 1999-03-30 2000-10-04 Jobin Yvon S.A. Polarising filter and manufacturing method thereof
US7455957B2 (en) * 2003-11-27 2008-11-25 Shimadzu Corporation Blazed holographic grating, method for producing the same and replica grating

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60244925A (en) * 1984-05-21 1985-12-04 Matsushita Electric Ind Co Ltd Liquid-crystal display device and its manufacture
JPS63118701A (en) * 1986-11-07 1988-05-23 Matsushita Electric Ind Co Ltd Production of optical element
JPH04170502A (en) * 1990-11-01 1992-06-18 Matsushita Electric Ind Co Ltd Manufacture of diffraction grating
EP1041408A1 (en) * 1999-03-30 2000-10-04 Jobin Yvon S.A. Polarising filter and manufacturing method thereof
FR2791781A1 (en) * 1999-03-30 2000-10-06 Instruments Sa POLARIZING FILTER AND MANUFACTURING METHOD THEREOF
US6417939B1 (en) 1999-03-30 2002-07-09 Highwave Optical Technologies Polarizing filter and its manufacturing method
US7455957B2 (en) * 2003-11-27 2008-11-25 Shimadzu Corporation Blazed holographic grating, method for producing the same and replica grating

Also Published As

Publication number Publication date
JPS6025761B2 (en) 1985-06-20

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