JPS57112705A - Manufacture of holographic grating - Google Patents
Manufacture of holographic gratingInfo
- Publication number
- JPS57112705A JPS57112705A JP18554480A JP18554480A JPS57112705A JP S57112705 A JPS57112705 A JP S57112705A JP 18554480 A JP18554480 A JP 18554480A JP 18554480 A JP18554480 A JP 18554480A JP S57112705 A JPS57112705 A JP S57112705A
- Authority
- JP
- Japan
- Prior art keywords
- angle
- grooves
- layer
- lattice
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/32—Holograms used as optical elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Holo Graphy (AREA)
Abstract
PURPOSE:To efficiently form a grating in a photoresist layer laid on a substrate by combinedly applying holography and ion etching in an oblique direction. CONSTITUTION:A photoresist layer 2 is laid on a substrate 1, and parallel lattice grooves 6 with a sine wave-shaped section are cut in the layer 2 by holography. The layer 2 is then irradiated with ion beams 4 at the angle of a direction which is obliquely upward to the grooves 6 and does not make a component projected on the lattice parallel to the grooves 6, e.g. at about 30 deg. angle of incidence to the substrate surface. The etching speed is maximized at about 60 deg. angle of incidence. Thus, the layer 2 is etched to form a grating (theta is a blaze angle) having lattice grooves 5 with an almost saw-toothed section.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18554480A JPS6025761B2 (en) | 1980-12-29 | 1980-12-29 | Manufacturing method of holographic grating |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18554480A JPS6025761B2 (en) | 1980-12-29 | 1980-12-29 | Manufacturing method of holographic grating |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57112705A true JPS57112705A (en) | 1982-07-13 |
JPS6025761B2 JPS6025761B2 (en) | 1985-06-20 |
Family
ID=16172655
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18554480A Expired JPS6025761B2 (en) | 1980-12-29 | 1980-12-29 | Manufacturing method of holographic grating |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6025761B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60244925A (en) * | 1984-05-21 | 1985-12-04 | Matsushita Electric Ind Co Ltd | Liquid-crystal display device and its manufacture |
JPS63118701A (en) * | 1986-11-07 | 1988-05-23 | Matsushita Electric Ind Co Ltd | Production of optical element |
JPH04170502A (en) * | 1990-11-01 | 1992-06-18 | Matsushita Electric Ind Co Ltd | Manufacture of diffraction grating |
EP1041408A1 (en) * | 1999-03-30 | 2000-10-04 | Jobin Yvon S.A. | Polarising filter and manufacturing method thereof |
US7455957B2 (en) * | 2003-11-27 | 2008-11-25 | Shimadzu Corporation | Blazed holographic grating, method for producing the same and replica grating |
-
1980
- 1980-12-29 JP JP18554480A patent/JPS6025761B2/en not_active Expired
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60244925A (en) * | 1984-05-21 | 1985-12-04 | Matsushita Electric Ind Co Ltd | Liquid-crystal display device and its manufacture |
JPS63118701A (en) * | 1986-11-07 | 1988-05-23 | Matsushita Electric Ind Co Ltd | Production of optical element |
JPH04170502A (en) * | 1990-11-01 | 1992-06-18 | Matsushita Electric Ind Co Ltd | Manufacture of diffraction grating |
EP1041408A1 (en) * | 1999-03-30 | 2000-10-04 | Jobin Yvon S.A. | Polarising filter and manufacturing method thereof |
FR2791781A1 (en) * | 1999-03-30 | 2000-10-06 | Instruments Sa | POLARIZING FILTER AND MANUFACTURING METHOD THEREOF |
US6417939B1 (en) | 1999-03-30 | 2002-07-09 | Highwave Optical Technologies | Polarizing filter and its manufacturing method |
US7455957B2 (en) * | 2003-11-27 | 2008-11-25 | Shimadzu Corporation | Blazed holographic grating, method for producing the same and replica grating |
Also Published As
Publication number | Publication date |
---|---|
JPS6025761B2 (en) | 1985-06-20 |
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