JPS6332361B2 - - Google Patents
Info
- Publication number
- JPS6332361B2 JPS6332361B2 JP15801680A JP15801680A JPS6332361B2 JP S6332361 B2 JPS6332361 B2 JP S6332361B2 JP 15801680 A JP15801680 A JP 15801680A JP 15801680 A JP15801680 A JP 15801680A JP S6332361 B2 JPS6332361 B2 JP S6332361B2
- Authority
- JP
- Japan
- Prior art keywords
- grating
- photoreceptor
- exposure
- relief
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 108091008695 photoreceptors Proteins 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 3
- 239000004926 polymethyl methacrylate Substances 0.000 description 3
- 238000000992 sputter etching Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 2
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- VSQYNPJPULBZKU-UHFFFAOYSA-N mercury xenon Chemical compound [Xe].[Hg] VSQYNPJPULBZKU-UHFFFAOYSA-N 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15801680A JPS5781214A (en) | 1980-11-10 | 1980-11-10 | Production of blazed grating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15801680A JPS5781214A (en) | 1980-11-10 | 1980-11-10 | Production of blazed grating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5781214A JPS5781214A (en) | 1982-05-21 |
| JPS6332361B2 true JPS6332361B2 (enrdf_load_stackoverflow) | 1988-06-29 |
Family
ID=15662422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15801680A Granted JPS5781214A (en) | 1980-11-10 | 1980-11-10 | Production of blazed grating |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5781214A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62141794A (ja) * | 1985-12-16 | 1987-06-25 | Toshiba Corp | 半導体レ−ザ装置 |
| US7175773B1 (en) | 2004-06-14 | 2007-02-13 | Carl Zeiss Laser Optics Gmbh | Method for manufacturing a blazed grating, such a blazed grating and a spectrometer having such a blazed grating |
-
1980
- 1980-11-10 JP JP15801680A patent/JPS5781214A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5781214A (en) | 1982-05-21 |
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